Catadioptric projection objective

ABSTRACT

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

The present application claims priority benefit to U.S. Provisional60/536,248 filed Jan. 14, 2004; U.S. Provisional 60/587,504 filed Jul.14, 2004; U.S. Provisional 60/617,674 filed Oct. 13, 2004; and U.S.Provisional 60/612,823 filed Sep. 24, 2004. The disclosures of all ofthese Provisional applications are incorporated into this application byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates to a catadioptric projection objective for imaginga pattern arranged in an object plane onto an image plane.

2. Description of the Related Art

Projection objectives of that type are employed on projection exposuresystems, in particular wafer scanners or wafer steppers, used forfabricating semiconductor devices and other types of microdevices andserve to project patterns on photomasks or reticles, hereinafterreferred to generically as “masks” or “reticles,” onto an object havinga photosensitive coating with ultrahigh resolution on a reduced scale.

In order to create even finer structures, it is sought to both increasethe image-end numerical aperture (NA) of the projection objective to beinvolved and employ shorter wavelengths, preferably ultraviolet lightwith wavelengths less than about 260 nm.

However, there are very few materials, in particular, synthetic quartzglass and crystalline fluorides, that are sufficiently transparent inthat wavelength region available for fabricating the optical elementsrequired. Since the Abbe numbers of those materials that are availablelie rather close to one another, it is difficult to provide purelyrefractive systems that are sufficiently well color-corrected (correctedfor chromatic aberrations).

In view of the aforementioned problems, catadioptric systems thatcombine refracting and reflecting elements, i.e., in particular, lensesand mirrors, are primarily employed for configuring high-resolutionprojection objectives of the aforementioned type.

The high prices of the materials involved and limited availability ofcrystalline calcium fluoride in sizes large enough for fabricating largelenses represent problems, particularly in the field of microlithographyat 157 nm for very large numerical apertures, NA, of, for example,NA=0.80 and larger. Measures that will allow reducing the number andsizes of lenses employed and simultaneously contribute to maintaining,or even improving, imaging fidelity are thus desired.

Catadioptric projection objectives having at least two concave mirrorshave been proposed to provide systems with good color correction andmoderate lens mass requirements. The patent U.S. Pat. No. 6,600,608 B1discloses a catadioptric projection objective having a first, purelyrefractive objective part for imaging a pattern arranged in the objectplane of the projection objective into a first intermediate image, asecond objective part for imaging the first intermediate image into asecond intermediate image and a third objective part for imaging thesecond intermediate image directly, that is without a furtherintermediate image, onto the image plane. The second objective part is acatadioptric objective part having a first concave mirror with a centralbore and a second concave mirror with a central bore, the concavemirrors having the mirror faces facing each other and defining anintermirror space or catadioptric cavity in between. The firstintermediate image is formed within the central bore of the concavemirror next to the object plane, whereas the second intermediate imageis formed within the central bore of the concave mirror next to theobject plane. The objective has axial symmetry and provides good colorcorrection axially and laterally. However, since the reflecting surfacesof the concave mirrors are interrupted at the bores, the pupil of thesystem is obscured.

The Patent EP 1 069 448 B1 discloses another catadioptric projectionobjective having two concave mirrors facing each other. The concavemirrors are part of a first catadioptric objective part imaging theobject onto an intermediate image positioned adjacent to a concavemirror. This is the only intermediate image, which is imaged to theimage plane by a second, purely refractive objective part. The object aswell as the image of the catadioptric imaging system are positionedoutside the intermirror space defined by the mirrors facing each other.Similar systems having two concave mirrors, a common straight opticalaxis and one intermediate image formed by a catadioptric imaging systemand positioned besides one of the concave mirrors are disclosed inJapanese patent application JP 2002208551 A and U.S. patent applicationSer. No. U.S. 2002/00241 A1.

European patent application EP 1 336 887 (corresponding to U.S.2004/0130806 A1) discloses catadioptric projection objectives having onecommon straight optical axis and, in that sequence, a first catadioptricobjective part for creating a first intermediate image, a secondcatadioptric objective part for creating a second intermediate imagefrom the first intermediate image, and a refractive third objective partforming the image from the second intermediate image. Each catadioptricsystem has two concave mirrors facing each other. The intermediateimages lie outside the intermirror spaces defined by the concavemirrors. Concave mirrors are positioned optically near to pupil surfacescloser to pupil surfaces than to the intermediate images of theprojection objectives.

In the article “Nikon Projection Lens Update” by T. Matsuyama, T.Ishiyama and Y. Ohmura, presented by B. W. Smith in: OpticalMicrolithography XVII, Proc. of SPIE 5377.65 (2004) a design example ofa catadioptric projection lens is shown, which is a combination of aconventional dioptric DUV system and a 6-mirror EUV catoptric systeminserted between lens groups of the DUV system. A first intermediateimage is formed behind the third mirror of the catoptric (purelyreflective) group upstream of a convex mirror. The second intermediateimage is formed by a purely reflective (catoptric) second objectivepart. The third objective part is purely refractive featuring negativerefractive power at a waist of minimum beam diameter within the thirdobjective part for Petzval sum correction.

Japanese patent application JP 2003114387 A and international patentapplication WO 01/55767 A disclose catadioptric projection objectiveshaving one common straight optical axis, a first catadioptric objectivepart for forming an intermediate image and a second catadioptricobjective part for imaging the intermediate image onto the image planeof this system. Concave and convex mirrors are used in combination.

U.S. provisional application with Ser. No. 60/511,673 filed on Oct. 17,2003 by the applicant discloses catadioptric projection objectiveshaving very high NA and suitable for immersion lithography at NA>1. Inpreferred embodiments, exactly three intermediate images are created. Across-shaped embodiment has a first, refractive objective part creatinga first intermediate image from the object, a second, catadioptricobjective part for creating a second intermediate image from the firstobject, a third, catadioptric objective part for creating a thirdintermediate image from the second intermediate image and a fourth,refractive objective part for imaging the third intermediate image ontothe image plane. The catadioptric objective parts each have one concavemirror, and planar folding mirrors are associated therewith. The concavemirrors are facing each other with the concave mirror surfaces. Thefolding mirrors are arranged in the middle or the intermirror spacedefined by the concave mirrors. The concave mirrors may be coaxial andthe optical axes of the catadioptric parts may be perpendicular or at anangle with respect to the optical axis defined in the refractive imagingsystems.

The full disclosure of the documents mentioned above is incorporatedinto this application by reference.

The article “Camera view finder using tilted concave mirror erectingelements” by D. DeJager, SPIE. Vol. 237 (1980) p. 292-298 disclosescamera view finders comprising two concave mirrors as elements of a 1:1telescopic erecting relay system. The system is designed to image anobject at infinity into a real image, which is erect and can be viewedthrough an eyepiece. Separate optical axes of refractive system partsupstream and downstream of the catoptric relay system are paralleloffset to each other. In order to build a system having concave mirrorsfacing each other mirrors must be tilted. The authors conclude thatphysically realizable systems of this type have poor image quality.

International patent applications WO 92/05462 and WO 94/06047 and thearticle “Innovative Wide-Field Binocular Design” in OSA/SPIE Proceedings(1994) pages 389ff disclose catadioptric optical systems especially forbinoculars and other viewing instruments designed as in-line systemhaving a single, unfolded optical axis. Some embodiments have a firstconcave mirror having an object side mirror surface arranged on one sideof the optical axis and a second concave mirror having a mirror surfacefacing the first mirror and arranged on the opposite side of the opticalaxis such that the surface curvatures of the concave mirrors define andintermirror space. A front refractive group forms a first intermediateimage near the first mirror and a second intermediate image is formedoutside of the space formed by the two facing mirrors. A narrow fieldbeing larger in a horizontal direction than in a vertical direction isarranged off-set to the optical axis. The object side refractive grouphas a collimated input and the image side refractive group has acollimated output and entrance and exit pupils far from telecentric areformed. The pupil shape is semi-circular unlike pupil surfaces inlithographic projection lenses, which have to be circular and centeredon the optical axis.

The PCT application WO 01/044682 A1 discloses catadioptric UV imagingsystems for wafer inspection having one concave mirror designed asMangin mirror.

SUMMARY OF THE INVENTION

It is one object of the invention to provide a catadioptric projectionobjective suitable for use in the vacuum ultraviolet (VUV) range havingpotential for very high image side numerical aperture which may beextended to values allowing immersion lithography at numerical aperturesNA>1. It is another object of the invention to provide catadioptricprojection objectives that can be build with relatively small amounts ofoptical material.

As a solution to these and other objects the invention, according to oneformulation, provides a catadioptric projection objective for imaging apattern provided in an object plane of the projection objective onto animage plane of the projection objective comprising:

a first objective part for imaging the pattern provided in the objectplane into a first intermediate image;

a second objective part for imaging the first intermediate image into asecond intermediate image;

a third objective part for imaging the second intermediate image ontothe image plane;

wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image;

pupil surfaces are formed between the object plane and the firstintermediate image, between the first and the second intermediate imageand between the second intermediate image and the image plane; and allconcave mirrors are arranged optically remote from a pupil surface.

In designs according to this aspect of the invention a circular pupilcentered around the optical axis can be provided in a centered opticalsystem. Two or more concave mirrors in the system parts contributing toforming the second intermediate image are provided, where the used areaof the concave mirrors deviates significantly from an axial symmetricillumination. In preferred embodiments exactly two concave mirrors areprovided and are sufficient for obtaining excellent imaging quality andvery high numerical aperture. Systems having one common unfolded(straight) optical axis can be provided which facilitate manufacturing,adjustment and integration into photolithographic exposure systems. Noplanar folding mirrors are necessary. However, one ore more planarfolding mirrors can be utilized to obtain more compact designs.

All concave mirrors are arranged “optically remote” from pupil surfaceswhich means that they are arranged outside an optical vicinity of apupil surface. They may be arranged optically nearer to field surfacesthan to pupil surfaces. Preferred positions optically remote from apupil surface (i.e. outside an optical vicinity of a pupil surface) maybe characterized by the ray height ratio H=h_(C)/h_(M)>1, where h_(C) isthe height of a chief ray and h_(M) is the height of a marginal ray ofthe imaging process. The marginal ray height h_(M) is the height of amarginal ray running from an inner field point (closest to the opticalaxis) to the edge of an aperture stop, whereas the chief ray heighth_(C) is the height of a chief ray running from an outermost field point(farthest away from the optical axis) parallel to or at small angle withrespect to the optical axis and intersecting the optical axis at a pupilsurface position where an aperture stop may be positioned. With otherwords: all concave mirrors are in positions where the chief ray heightexceeds the marginal ray height.

A position “optically remote” from a pupil surface is a position wherethe cross sectional shape of the light beam deviates significantly fromthe circular shape found in a pupil surface or in an immediate vicinitythereto. The term “light beam” as used here describes the bundle of allrays running from the object plane to the image plane. Mirror positionsoptically remote from a pupil surface may be defined as positions wherethe beam diameters of the light beam in mutually perpendiculardirections orthogonal to the propagation direction of the light beamdeviate by more than 50% or 100% from each other. In other words,illuminated areas on the concave mirrors may have a shape having a formstrongly deviating from a circle and similar to a high aspect ratiorectangle corresponding to a preferred field shape in lithographicprojection objectives for wafer scanners. Therefore, small concavemirrors having a compact rectangular or near rectangular shapesignificantly smaller in one direction than in the other may be used. Ahigh aperture light beam can therefore be guided through the systemwithout vignetting at mirror edges.

Wherever the terms “upstream” or “downstream” are used in thisspecification these terms refer to relative positions along the opticalpath of a light beam running from the object plane to the image plane ofthe projection objective. Therefore, a position upstream of the secondintermediate image is a position optically between the object plane andthe second intermediate image.

According to another aspect of the invention there is provided acatadioptric projection objective for imaging a pattern provided in anobjective plane of the projection objective onto an image plane of theprojection objective comprising:

a first objective part for imaging the pattern provided in the objectplane into a first intermediate image;

a second objective part for imaging the first intermediate image into asecond intermediate image;

a third objective part for imaging the second intermediate image ontothe image plane;

wherein the second objective part includes a first concave mirror havinga first continuous mirror surface and a second concave mirror having asecond continuous mirror surface, the concave mirror surfaces of theconcave mirrors facing each other and defining an intermirror space;wherein at least the first intermediate image is located geometricallywithin the intermirror space between the first concave mirror and thesecond concave mirror.

In this specification the term “intermediate image” generally refers toa “paraxial intermediate image” formed by a perfect optical system andlocated in a plane optically conjugated to the object plane. Therefore,wherever reference is made to a location or position of an intermediateimage, the axial location of this plane optically conjugated to theobject plane is meant.

The above aspect of invention may be understood more clearly based onthe following general considerations.

As Jan Hoogland has pointed out in some publications, the most difficultrequirement that you can ask of any optical design is that it have aflat image, especially if it is an all-refractive design. Providing aflat image requires opposing lens powers and that leads to strongerlenses, more system length, larger system glass mass, and largerhigher-order image aberrations that result from the stronger lenscurves.

By contrast to this, allowing a system to have a curved imageautomatically leads to low lens powers, weaker curves, a more compactdesign with much less glass mass, and much smaller higher-order imageaberrations.

Shafer has shown a lens design with a curved image that only usespositive lenses (and no aspherics) and has very good performance. Agroup of 4 or 5 weak positive lenses in front can provide correction ofspherical aberration and coma, and a thick positive immersion lens canprovide astigmatism correction. The image is quite curved.

However, a flat image is essential for lithography. Therefore thequestion then becomes how to provide this with the least disturbance ofthe good properties that result when a curved image is allowed.

Some classical lens types like the Cooke Triplet and the Double-Gaussdesigns achieve a flat image by putting strong negative power in themiddle of the design. But that completely destroys all the benefits thatwere just listed of having a curved image, and the lens powers have tobe strong and the curves lead to bad higher-order aberrations.

A much better solution is provided by the classical field-flattenedPetzval lens design, where a strong negative lens is placed just infront of the image, the closer the better. This negative lens, at thevery end of the design, then provides all the image flattening means ofthe design and the rest of the design has weak curves, low lens powers,small glass volume, etc. In addition, the aberration correctionperformance is extremely high. That is why this design form was used forthe extremely high resolution aerial reconnaissance lenses of the1960's.

However, this great design cannot be used in lithography since putting astrong negative lens right before the image leads to an exit pupillocation that is very far from telecentric. And a telecentric exit pupilis always required in lithography.

Possibly the only way a field-flattened Petzval lens can be given atelecentric exit pupil is to move the aperture stop very far out infront of the design, far away from where it wants to be for goodhigher-order aberration correction. By contrast some other design types,like the Double-Gauss, can be modified to have a telecentric exit pupilwithout too much change in the aperture stop position, compared to itspreferred location. So because of this telecentric exit pupilrequirement in lithography, one is forced to abandon the best designform and move to less desirable ones.

The invention considers these aspects and provides a good compromisesolution.

One can keep all the many benefits of a curved image design if one canfind some way to flatten the image, have a telecentric exit pupil, andyet keep the aperture stop close to where it most wants to be for goodaberration correction.

What would be perfect is if a positive power lens could be given theopposite Petzval curvature to what it actually has. Such a “magic lens”,if it could exist, could then be placed right near the curved image of acurved image design. It would then flatten the image and would even helpgive a telecentric exit pupil while leaving the design's aperture stopwhere it wants to be.

A concave mirror is ideal for the problem. A concave mirror has positivepower, like a positive lens, but the opposite sign of Petzval curvature.So a concave mirror placed right in front of the image could flatten theimage of a curved image lens design, have positive power to help inproviding a telecentric pupil, and have no color problems.

Unfortunately it also makes the resulting image be completelyinaccessible, since it sends the light right back in the direction itcame from. One solution might be to use the lens system far off-axis,and then it might be possible to have one or two reflections right nearthe image and have the final image “walk-off” the mirrors and lie clearoutside of the incoming rays. But even a moment of study will show thatthis is impractical on the high-NA end of the design, or would lead tothe main lens system (i.e. the image side focussing lens system) beingused so far off-axis that it would have very poor performance.

The situation is much better on the other end of a lithographic design,with about 4× magnification, for example. Then the main refractivedesign does not have to be used off-axis as much before the low-NA imagecan be made to “walk-off” a mirror pair. By using two concave mirrorsinstead of one, the light keeps going in the same direction and theimage is accessible. The best performance results occur when the mainlens system is used with the least amount of off-axis use. But havingthe rays get through the concave mirror pair with no vignetting ishelped by using the main lens system far off-axis. These are thenincompatible goals.

In order to minimize vignetting problems and to make them insensitive onthe system overall numerical aperture it is favorable to haveintermediate images with low NA next to all positions where two raybundels before and after a reflection lie geometrically separated, butnext to each other. The clearance is then mainly determined by the fieldsize and scales only very poorly with numerical aperture. This isimportant to reach real high NA catadioptric designs.

The best solution is to not have the two mirrors be between the mainlens system and its low-N.A object end. That then avoids a large amountof off-axis use of the main lens in order to have no vignetting at themirrors. The mirrors should be physically (not necessarily optically) oneither side of the low-NA object. Then the main lens system can be usedmuch closer to the optical axis. A less preferable solution is to haveboth mirrors be outside of the main system and its low NA end object. Ineither case, of the last two mentioned, there is a need to reimage thelow NA object, since it is no longer the end of the complete system.

While reimaging the object to a first real intermediate image, thesystem magnification of this first relay system may be designed suchthat it is an enlarging system. This reduces more and more the NA at theintermediate image and thus relaxes the vignetting problem. Thevignetting depends less and less on the system NA.

In a preferred design, there are two concave mirrors on either side(again, physically, not optically) of the low-NA object plane of themain lens system and the system is used as close to the axis as possiblewithout mirror vignetting. Then either another refractive system or acatadioptric system, working e.g. at about 1× or 1.5× enlargement, isused to relay this buried object to another real image location.

Another solution, with both mirrors physically and optically outside ofthe low-NA object, gives the possibility of just these same two mirrorsdoing the re-imaging. But the requirement of a fairly large workingdistance and thick mirror substrates makes this not practical withoutvignetting problems that require using the main system far off-axis. Sothis other solution also benefits from using a separate 1× or 1.5×enlarging refractive or catadioptric relay system.

In all of these cases, a pair of concave mirrors is used to flatten theimage of one or two refractive systems. No convex mirrors are used. Therefractive systems can then have the benefits described of being curvedimage designs.

Designs according to preferred embodiments of the invention with justtwo reflecting surfaces, both concave, have several advantages comparedwith the prior art.

In contrast to prior art systems with central pupil obscuration designsaccording to some embodiments of the invention have small mirror sizes,no obscuration at all, no double or triple-pass lenses, and veryeffective field flattening of the system due to the strong mirrorpowers. In other embodiments, double- or triple-pass lenses may bepresent.

Embodiments according to the invention, which preferably have tworefractive relay groups, may have about 3× or 4× reduction magnifycationfrom the refractive group near the wafer, i.e from the third objectivepart, (so only high N.A on one end) and the other refractive group (thefirst objective part) is low NA on both ends. As a result there is muchless lens power needed and relatively few elements are needed to get thedesired aberration correction.

Some prior art systems have been found to be limited NA systems. Bycontrast, preferred design according to the invention have no suchdifficulties and can handle very high NA values close to NA=1 or above,for immersion systems. Preferably, the two intermediate images both havelow NA values and there is no problem with the mirrors interfering witheach other's space at their rims.

It is to be noted that it is difficult to correct some useful designsaccording to the present invention for axial colour. However the lensesin preferred embodiments are small enough, and their powers weak enough,so that the axial color of the new design is at an acceptable value.

Other prior art high NA catadioptric systems for lithography, eitherrequire at least one convex mirror in the design, or have multiplemirrors and tend to give very long track length designs. The use of aconvex mirror, in combination with a concave mirror and some lenses, canbe the basis of a catadioptric design and can make it possible to havean unobscured design that does not have to be used too far off-axis toavoid vignetting. This is a characteristic of some prior patent designswhich are in-line systems with no flat fold mirrors. The catadioptricpart is on the reticle end of the system. There are at least twoproblems with such designs. One is that the first intermediate imageafter the reticle has to be clear of the concave mirror, and the lightrays leaving the convex mirror tend to have relatively steep angles withrespect to the optical axis in order to clear the edge of the concavemirror without vignetting. Some field lenses or field mirrors are thenrequired to catch these rays and bend them back towards the optical axisand the main focusing lens group. These field lens or mirrors have to bequite large and strong in power to catch the rays and reimage the pupiltowards the main focusing lens group. If they are field lenses, thenthey are large in diameter, have strong positive power, and result in anexcess of glass volume in the design. In addition they have a lot ofpositive power and make further difficulties in correcting the Petzvalcurvature of the system. If, instead, field mirrors are used then theyhave to be quite large in diameter and it is difficult to configure themto avoid vignetting of the rays. They do, however, help with Petzvalcorrection since they have the opposite sign from field lenses. Thesecond problem with these kinds of system is that the convex mirror inthe system has the wrong sign of Petzval curvature to help with imageflattening. This then tends to lead to 4 or 6 mirror systems in order tofind a way with several mirrors to provide the system with enough goodPetzval correction from mostly concave mirrors so that this burden doesnot fall entirely on the main focusing lens group.

Preferred embodiments of the invention, by contrast, do not have anyconvex mirror and have some characteristics that allow it to work quiteclose to the optical axis without obscuration or vignetting. This thenmeans that the intermediate image size is not so large and the fieldlenses in the design do not have to be too large. Since there is noconvex mirror, but just two concave mirrors, the new design is quitesimple compared to the multi-mirror systems of the prior art. Its twoconcave mirrors may provide just the right amount of Petzval correctionfor the lenses in the system, which may be almost all positive, and theresulting design has a relatively short track length, small sizeelements, small glass volume, very good aberration correction, and thecapability of working with very high immersion NA values.

There are other particularly useful features specific to the new designaccording to the invention. As the NA value of the design is increased,it makes almost no difference to the sizes of the mirrors, or how closethe design can work to the optical axis. All other in-line designs fromthe prior art have to keep working further and further off-axis, as theNA is increased, in order to avoid vignetting and obscuration. Thatleads to worse high-order aberrations, a drop in performance, and largerelement sizes in the catadioptric part. The new design is quite unusualin not having that problem.

An alternative to embodiments having one common straight optical axis isprovided by catadioptric designs which have at least one flat foldmirror. Then part of the optical path is folded, e.g. at 90 degrees tothe optical axis, and then brought back and refolded back again so thatthe reticle and wafer are parallel. The input and output axis (i.e.object and image side part of the optical axis) may be co-axial, in someembodiments, or have a lateral off-set in some other embodiments.

Such designs can have just one powered mirror in the system, which is aconcave mirror, and two flat fold mirrors. Some, designs, like thedesign disclosed in U.S. provisional application with Ser. No.60/511,673 filed on Oct. 17, 2003 by the applicant, have two concavemirrors and two flat fold mirrors. These folded designs can have many ofthe good properties of the new design according to the invention that isbeing discussed here. However, there may occur polarization problemswith these fold mirrors and that makes the preferred embodiments, withno fold mirrors, very attractive.

In some embodiments there is at least one lens having a free entrysurface and a free exit surface arranged within the intermirror space,wherein the lens is transited at least twice in the optical path betweenan intermediate image and a concave mirror or vice versa. Suchmirror-related lens may have negative refractive power and may bedesigned as a meniscus lens having a sense of curvature similar to theconcave mirror to which it is assigned. Color correction can bepositively influenced this way. The lens may be designed as a truncatedlens being arranged exclusively on the side of the optical axis wherethe associated concave mirror is situated. If a mirror-related lens isextended across the optical axis, the lens may be transited three timesby the radiation, thus increasing optical effect without significantlyincreasing lens mass. One or both concave mirrors may havemirror-related lenses.

In some embodiments the first concave mirror and the second concavemirror are designed to have essentially the same or exactly the samecurvature. This allows to manufacture the concave mirrors simultaneouslyfrom the same blank material such that firstly a mirror blank for thefirst and second concave mirror is manufactured and that, afterwards,the mirror blank is separated into two truncated mirrors used as thefirst and second concave mirror. Manufacturing can be facilitated andmore cost effective this way. Likewise, lens material used for twosimilar truncated mirror-related lenses can be manufactured from onelens blank, which is shaped first and than separated into two truncatedlenses. Systems having catadioptric subgroups which are designedidentically or almost identically and which can be arrangedsymmetrically with respect to each other can be provided this way atreasonable costs for manufacturing.

In some embodiments at least one mirror surface of a concave mirror isaspheric. In some embodiments, concave surfaces of both concave mirrorsare aspheric. Aspheric concave mirrors facilitate optical correction andallow to reduce lens mass.

In some embodiments it has been found useful to have at least one lensarranged between an intermediate image and the associated concavemirror, wherein at least one surface of the lens is aspheric. Theaspheric surface may be the surface facing the intermediate image. Fieldaberrations can be corrected effectively this way.

In some embodiments both concave mirrors have spherical mirror surfaces,thus facilitating manufacturing and improving optical performance. Ithas been found useful if the following condition is fulfilled:1<D/(|c₁|+|c₂|)·10⁻⁴<6. Here, D is a maximum diameter of a lens elementof the third objective part in [mm] and c₁ and c₂ are the curvatures ofthe concave mirrors in [mm⁻¹]. If this condition is fulfilled, thenthere is an optimum balance between the positive power in the thirdimaging system and the Petzval correction due to the concave mirrors inthe projection objective. This condition applies for both spherical andaspherical concave mirrors.

As the basic shape and, if applicable, the aspheric character of aconcave mirror strongly influences optical performance, ways ofmanufacturing of concave mirrors are desired in order to produce highquality mirrors having defined optical properties. It has been foundthat relatively “flat” concave mirrors, i.e. concave mirrors having arelatively shallow depth on the concave side, can be manufactured withparticularly high optical quality if the relation p_(max)<0.22R holdswhere p_(max)=R−(R²−D²/4)^(0.5). In this relation, R is the curvatureradius of the aspherical mirror surface and D is the diameter of theaspherical mirror. Preferably, the condition D≦1.3R or, more preferably,the condition D≦1.2R is fulfilled. Parameter p denotes the “sagitta” or“rising height” of a point on an optical surface. This parameter issometimes also denoted SAG (for sagitta) in the literature. Sagitta p isa function of the height h, i.e. the radial distance from the opticalaxis, of the respective point.

Generally it may be preferred from a manufacturing point of view to makethe curvatures of the concave mirrors at the vertex of the mirrorsurface (vertex curvature) as similar as possible. If the vertexcurvature radii of the first and second mirrors are denoted R1 and R2,preferably the following condition holds: 0.8<|R1/R2|<1.2.

Some embodiments are designed such that the first intermediate image islocated geometrically within the intermirror space whereas the secondintermediate image is arranged outside the mirror space. The first andsecond objective parts can then be catadioptric objective parts, whereinthe first concave mirror is part of the first objective part creatingthe first intermediate image, whereas the second concave mirrorcontributes to forming the second intermediate image from the firstintermediate image by the second objective part.

A mirror group defined by the first and second concave mirrors facingeach other can have a mirror group entry and a mirror group exit, eachpositioned next to the closest concave mirror closed to an edge of aconcave mirror faced in the optical axis. Pupil surfaces of theprojection objective can be arranged in the vicinity of the mirror groupentry and the mirror group exit such that the mirror group performance apupil imaging between the mirror group entry and the mirror group exit.The first and second concave mirror can then be disposed on one side ofthe optical axis. In other embodiments where field surfaces are in thevicinity of the mirror group entry and mirror group exit, the first andsecond concave mirror may be positioned at opposite sides of the opticalaxis.

According to another aspect of the invention a projection objective isprovided having a first and at least one second concave mirror, whereinthe first concave mirror has a first aspheric mirror surface and thesecond concave mirror has a second aspheric mirror surface, and whereinthe first and second mirror surfaces have essentially the same asphericshape. The aspheric shapes may be identical, i.e. may be described byidentical aspheric constants and basic spherical radius. This aspect ofthe invention may be utilized in embodiments where all concave mirrorsare arranged optically remote from the pupil surface, particularly whereexactly two concave mirrors are used. However, the advantages may alsobe used in projection objectives where one or more concave mirrors arepositioned in a pupil surface or optically near a pupil surface. If thefirst and second mirror surface have essentially the same or identicalaspheric shape, manufacturing can be simplified since the asphericshapes can be manufactured using essentially the same grinding andpolishing steps or other steps for removing material from a sphericbasic shape. Further, the testing process utilized during manufacturingof the aspheric surfaces can be organized cost-efficient since the sametesting device for characterizing the aspheric shape can be used fortesting more than one concave mirror surface. In that sense, the term“essentially the same aspheric shape” is to be understood to encompassaspheric surface shapes, which can be tested by the same optical testingdevice. If applicable, the surface shapes may be similar in that sensethat the same optical testing device can be used, but with differentworking distance.

In one embodiment, the second objective part has two concave mirrors,each having an aspheric surface, wherein the first and second mirrorsurfaces have essentially the same aspheric shape. In one embodiment,the second objective part of this type is a catoptric objective part,i.e. consisting of only two concave mirrors having aspheric mirrorsurfaces which have essentially the same aspheric shape. Catadioptricsecond objective parts of this type are also possible.

According to another aspect, the invention provides a catadioptricprojection objective having at least one concave mirror, where themirror surface of the concave mirror has a parabolic shape. In anembodiment, two concave mirrors are provided, wherein at least one ofthe concave mirrors has a parabolic shape. Utilizing a parabolic mirror(i.e. a concave mirror where a meridian of the mirror is parabolic) hasproven advantageous particularly with regard to testing the asphericsurface shape of the mirror. A parabolic mirror collects parallelincident light into one single focus, whereby parallel light raysimpinging on the parabolic mirror surface are collected free ofspherical aberration in one focal point. Parabolic mirrors of this typecan easily be tested optically using comparatively simple opticaltesting devices designed for creating a test beam having a planar wavefront. Optical testing devices with simple construction can be used,thereby making the testing of the aspheric mirror cost-effective.

Whereas optical properties are essential for obtaining the desiredfunction of a projection objective, other factors related to the costsinvolved for manufacturing the optical system and/or factors influencingthe overall size and shape of the optical system may be critical. Also,aspects of lens mounting and incorporation of lens manipulators must beconsidered. One class of embodiments is particularly advantageous inthis respect in that projection objectives having a small number of lenselements, particularly in the first objective part, are provided. In oneembodiment, the first objective part has positive lenses only. The term“lens” as used here is meant to designate optical elements havingsubstantive refractive power. In that respect, a plate havingessentially parallel plate surfaces is not a lens and may, therefore, beinserted in addition to the positive lenses. Using positive lenses onlyis enabling for providing axially compact first objective parts havingrelatively small maximum lens diameter. In one embodiment, the firstobjective part has only six lenses having substantial refractive power.One or more aspheric surfaces may be provided in the first objectivepart. By using suitable aspheric shapes of aspheric lens surfaces acompact design can be obtained. As a tendency, the first objective partcan be designed more compact the more aspheric surfaces are used. Inpreferred embodiments a ratio between a number of lens element and anumber of aspheric surfaces is less than 1.6. In one embodiment, a firstlens element of the first objective part immediately following theobject plane has an aspheric surface facing the object plane, whereinthe aspheric surface is essentially flat having a local radius R ofcurvature where R>300 mm at each point of the aspheric surface. Objectside telecentricity and an effective correction of field aberration,such as distortion, can be obtained this way.

A compact shape of a dioptric system can also be facilitated if allnegative lenses (i.e. lenses with substantial negative refractive power)are arranged optically remote from a pupil plane. With other words,negative lenses optically near a pupil plane should be avoided if adesign is to be optimized in respect to a compact shape.

Aspheric surfaces provided on optical elements, such as lenses, mirrorsand/or essentially planar faces of plates, prisms or the like can beutilized to improve both the correction status and the overall size andmaterial consumption of an optical system. Optimum surface shapes ofaspheric surfaces may be derived from theoretical considerations and/ornumerical calculations. However, whether or not an optical system can bemanufactured depends among other factors on the question whether or notan aspherical surface can actually be manufactured in the desired shapewith the necessary optical quality. Feasibility studies of the inventorshave shown some essential rules governing the use of aspheric surfacesin optical systems, particularly in high-resolution projectionobjectives suitable for microlithography.

According to one embodiment, the projection objective has at least oneoptical element having an aspherical surface with a surface shape freeof inflection points in an optically used area of the aspheric surface.In a rotationally symmetric aspheric surface an “inflection point” ischaracterized as a point along a meridional direction where a signchange occurs in the local curvature of the aspherical surface. Withother words, an inflection point is found geometrically between alocally convex surface region and a locally concave surface region of anaspheric surface. When a plurality of optical elements having at leastone aspherical surface is provided, it is preferred that all asphericsurfaces have surface shapes which are free of inflection points. As acompromise, it may be useful to design a system such that at least 50%or 60% or 70% or 80% or 90% of the aspheric surfaces are free ofinflection points. Avoiding inflection points on an aspheric surface hasproven to improve the optical quality of the finished aspheric surfacewhen compared to aspherical surfaces including inflection points. It iscontemplated that the material removing effects of surface preparationtools can be made more uniform if inflection points are avoided. On theother hand, if a polishing tool is acting on a surface area including aninflection point, the material removing action of the tool on eitherside of the inflection point may differ considerably, thus leading toirregularities in the optical quality of the finished surface.

According to another aspect of the invention the projection objectiveincludes a plurality of optical elements having at least one asphericsurface, wherein all aspheric surfaces have a surface shape free ofextremal points out-side the optical axis, wherein an extremal point isdefined by the following equations:

$\frac{\mathbb{d}p}{\mathbb{d}h} = {{0\mspace{14mu}{and}\mspace{14mu}\frac{\mathbb{d}^{2}p}{\mathbb{d}h^{2}}} \neq 0.}$

In this equation, the parameter “p” represents a distance, measuredparallel to the optical axis of an optical element, of a point at heighth from the vertex of the surface (positioned on the optical axis) asexplained in connection with the equation describing the mathematicaldescription of the aspherical surfaces given above. The parameter p(h)is also denoted as “sagitta” or “rising height” of a point on an opticalsurface. Based on these considerations, an “extremal point” is a maximumor a minimum of the function p(h), respectively. Studies of theinventors have revealed that extremal points outside the optical axis(where h=0) may be critical during manufacturing of the asphericalsurfaces since, in the region of extremal points, the material removingaction of tools used for finishing may differ significantly from theaction imposed on areas surrounding the extremal point, wherebynon-uniform optical surface quality may result.

This condition should be obeyed in an area including the opticallyutilized area (defined by the optically used radius h_(opt)) but goingbeyond that area up to a maximum height h_(max)>h_(opt), whereh_(max)=h_(opt)+OR and where OR is the radial width of an “overrun area”adjacent to the optically utilized area, where a rotary tool will be incontact with the optical surface when the periphery of the opticallyused area is polished. Typical widths of the overrun area are dependenton the tool dimensions and may be in the order of 5 mm to 15 mm.

Whereas extremal points on aspheric surfaces may be critical from amanufacturing point of view, extremal points may be desirable from anoptical point of view to provide a desired change of refractive power ofan aspheric surface in radial (meridonal) direction. As a compromise, ithas been found advantageous that aspheric surfaces having at least oneextremal point should be essentially flat cross the entire usablediameter. With other words, the basic shape of the aspherical surfacehaving at least one extremal point should be a plane or should have onlysmall deviations from a plane. In that respect, projection objectivesare preferred with at least one aspheric surface having at least oneextremal point, where the following condition holds for these asphericsurfaces:|p(h)|<^(p) _(max),where p_(max)=0.5. More preferably, p_(max)=0.25.

The preferred conditions for aspheric surfaces given above have beenderived from feasibility studies performed on certain embodiments ofthis invention. However, the conditions may also be utilized on othertypes of optical systems having optical elements with aspheric surfaces.Therefore, these aspects of the invention are useful independent ofother features of preferable embodiments of the invention.

According to another aspect of the invention the first objective partincludes a concave mirror and at least one additional mirror having acurved mirror surface, where curved mirror surfaces of the concavemirror and the additional mirror are facing each other. In thisembodiment two mirrors having curved mirror surfaces contribute to theformation of the first intermediate image. Preferably, first objectiveparts of this type are catadioptric, i.e. at least one lens ist providedin addition to the concave mirror and the additional mirror. The concavemirror and the additional mirror preferably share a common straightoptical axis coinciding with the optical axes of the second and thirdobjective part such that all objective parts share a common straightoptical axis. Preferably first objective parts of this type are designedas enlarging imaging system. In some embodiments the additional mirroris a convex mirror having a convex mirror surface compensating as atleast partially the effect of the concave mirror of that objective part.Preferably, first objective parts of this type are combined with asecond objective part including a first and a second concave mirror, theconcave mirror surfaces of which are facing each other and define anintermirror space. Whereas typically the first intermediate image may bepositioned outside that intermirror space in these embodiments, thesecond intermediate image may be positioned inside the intermirrorspace. Embodiments having at least three concave mirrors, preferablyexactly three concave mirrors, distributed in two objective parts (firstobjective part and second objective part) may be designed such that allconcave mirrors are arranged optically remote from a pupil surface.However, if desired, it is also possible that at least one concavemirror, particularly the concave mirror positioned in the firstobjective part, is positioned optically near a pupil surface.

In embodiments of this type the correction capabilities provided byconcave mirrors can be advantageously distributed between two objectiveparts separated by an intermediate image, whereby a good balance andcompensation between the correcting actions can be obtained. It is alsopossible to design the first and second objective part such that certaincorrection effects supported by concave mirrors are present twice in theoptical path. The correcting means may, however, be arranged in opticalpositions where they have different optical effects since the heights ofprincipal ray (chief ray) and marginal ray may be different fordifferent concave mirrors in different objective parts. All advantagesprovided by in-line-arrangement of the optical elements (one commonstraight optical axis) can be preserved.

The previous and other properties can be seen not only in the claims butalso in the description and the drawings, wherein individualcharacteristics may be used either alone or in sub-combinations as anembodiment of the invention and in other areas and may individuallyrepresent advantageous and patentable embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a longitudinally sectioned view of a first embodiment of aprojection objective according to the invention;

FIG. 2 is a representation of an inner off-axis beam passing through thesystem of FIG. 1,

FIG. 3 is a representation of an outer off-axis beam passing through thesystem of FIG. 1;

FIG. 4 is a longitudinally sectioned view of a second embodiment of aprojection objective according to the invention;

FIG. 5, 6 are schematic diagrams showing footprints of beams on theconcave mirrors of the embodiment shown in FIG. 4;

FIGS. 7, 8 and 9 show variants of the embodiment of FIG. 4 havingdifferent NA values and different positions of the aperture stop;

FIG. 10, 11 show a schematic representation and a lens section,respectively, of a third embodiment of a projection objective accordingto the invention;

FIG. 12, 13 show a schematic representation and a lens section,respectively, of a fourth embodiment of a projection objective accordingto the invention;

FIG. 14 shows a perspective view of the catadioptric objective part ofthe third embodiment to demonstrate the mirror geometry;

FIG. 15 shows a schematic representation of another embodiment havingdouble-passed lenses between concave mirrors and an oblique field (FIG.15 a);

FIG. 16 shows a lens section through an embodiment constructed accordingto FIG. 15;

FIG. 17 shows a lens section of another embodiment constructed accordingto the principles shown in FIG. 15;

FIG. 18 shows a schematic representation of an embodiment havingtriple-passed lenses between the concave mirrors;

FIG. 19 shows a lens section of an embodiment constructed according tothe principles shown in FIG. 18;

FIG. 20 shows a lens section through an embodiment having amirror-related lens close to one of the concave mirrors;

FIG. 21 shows a lens section through another embodiment of a projectionobjective according to the invention;

FIG. 22 shows a lens section of another embodiment of a projectionobjective according to the invention having similar, shallow concavemirrors;

FIG. 23 shows a lens section of another embodiment of a projectionobjective according to the invention having similar, shallow concavemirrors;

FIG. 24 shows a diagram for defining the plunging depth of a concavemirror;

FIG. 25 shows a lens section of another embodiment of a projectionobjective according to the invention having only one intermediate imagein the intermirror space and pupil planes close to the entrance and exitof the mirror group;

FIG. 26 shows an enlarged view of a section of the embodiment shown inFIG. 25 between the object plane and the first intermediate image;

FIG. 27 shows a lens section of an embodiment of the invention, where acatoptric second objective part has two concave mirrors having exactlythe same aspheric shape;

FIG. 28 show a lens section of an embodiment having a catoptric secondobjective part, where the first concave mirror is designed as aparabolic mirror;

FIG. 29 is a schematic diagram showing a testing device for opticallytesting a parabolic mirror;

FIGS. 30-32 show embodiments of projection objectives having a compactfirst objective part having positive lenses only and different numbersof aspheric surfaces;

FIG. 33 shows schematic diagrams of a conventional aspheric surfacehaving an inflection point;

FIG. 34 shows a lens section of an embodiment where all asphericsurfaces are free of inflection points;

FIG. 35 is a schematic diagram showing aspheric surfaces having extremalpoints;

FIG. 36 shows a lens section of an embodiment of a projection objectivewhere problems due to the existence of extremal points are avoided;

FIG. 37 shows a lens section of another embodiment having a small numberof aspheric surfaces;

FIG. 38 shows a lens section of another embodiment having a small numberof aspheric surfaces;

FIG. 39 shows a lens section of an embodiment having a catadioptricfirst objective part including two curved mirrors and a catadioptricsecond objective part having two concave mirrors; and

FIG. 40 shows a lens section of another embodiment having a firstobjective part with two curved mirrors and a catadioptric secondobjective part having two concave mirrors.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

In the following description of preferred embodiments of the invention,the term “optical axis” shall refer to a straight line or sequence ofstraight-line segments passing through the centers of curvature of theoptical elements involved. The optical axis is folded by folding mirrors(deflecting mirrors) or other reflective surfaces. In the case of thoseexamples presented here, the object involved is either a mask (reticle)bearing the pattern of an integrated circuit or some other pattern, forexample, a grating pattern. In the examples presented here, the image ofthe object is projected onto a wafer serving as a substrate that iscoated with a layer of photoresist, although other types of substrate,such as components of liquid-crystal displays or substrates for opticalgratings, are also feasible.

Where tables are provided to disclose the specification of a designshown in a figure, the table or tables are designated by the samenumbers as the respective figures.

FIG. 1 shows a first embodiment of a catadioptric projection lens 100according to the invention designed for ca. 193 nm UV workingwavelength. It is designed to project an image of a pattern on a reticlearranged in the object plane 101 into the image plane 102 on a reducedscale, for example, 4:1, while creating exactly two real intermediateimages 103, 104. A first refractive objective part 110 is designed forimaging the pattern in the object plane into the first intermediateimage 103 at an enlarged scale, a second, catadioptric objective part120 images the first intermediate image 103 into the second intermediateimage 104 at a magnification close to 1:1, and a third, refractiveobjective part 130 images the second intermediate image 104 onto theimage plane 102 with a strong reduction ratio. The second objective part120 comprises a first concave mirror 121 having the concave mirrorsurface facing the object side, and a second concave mirror 122 havingthe concave mirror surface facing the image side. The mirror surfacesare both continuous or unbroken, i.e. they do not have a hole or bore.The mirror surfaces facing each other define a catadioptric cavity 125,which is also denoted intermirror space 125, enclosed by the curvedsurfaces defined by the concave mirrors. The intermediate images 103,104 are both situated inside the catadioptric cavity 125, at least theparaxial intermediate images being almost in the middle thereof wellapart from the mirror surfaces.

Each mirror surface of a concave mirror defines a “curvature surface” or“surface of curvature” which is a mathematical surface extending beyondthe edges of the physical mirror surface and containing the mirrorsurface. The first and second concave mirrors are parts of rotationallysymmetric curvature surfaces having a common axis of rotationalsymmetry.

For improved clarity of the beam path through the optical system, FIGS.2 and 3 show two distinguished beam bundles originating from theoff-axis object field. The beam bundle in FIG. 2 originates from anobject point closest to the optical axis, whereas in FIG. 3 the beambundle originates from an object point farthest away from the opticalaxis. The situation of the intermediate images almost in the middlebetween the concave mirrors can be clearly seen in this representation.In FIG. 2, the shown positions of the intersections of the crossinglight beams between the mirrors are close to the positions of theparaxial intermediate images. In contrast, in FIG. 3 the shown positionsor zones of the intersections of the crossing light beams between themirrors are further offset from the positions of the paraxialintermediate images.

The system 100 is rotational symmetric and has one straight optical axis105 common to all refractive and reflective optical components. Thereare no folding mirrors. The concave mirrors have small diametersallowing to bring them close together and rather close to theintermediate images lying in between. The concave mirrors are bothconstructed and illuminated as off-axis sections of axial symmetricsurfaces. The light beam passes by the edges of the concave mirrorsfacing the optical axis without vignetting (compare e.g. FIG. 4 or FIG.7-9).

A maximum light beam height at the concave mirrors is almost the same asthe maximum light beam height within the third objective part.Preferably, the maximum light beam height at the concave mirrors is lessthan the 1.5 fold or less than the 1.2 fold of the maximum light beamheight within the third objective part. This allows constructionswherein all light beams within the projection objective are locatedwithin a space defined as a cylinder around the optical axis of saidthird objective part, extending from the object plane to the image planeand having a maximum radius of the 1.5 fold, preferably the 1.2 fold, ofa maximum beam height within said third objective part.

The system has good lateral color correction, whereas axial color is notentirely corrected. In this embodiment, both concave mirrors aredesigned as Mangin mirrors. Each Mangin mirror consists of a negativemeniscus lens with a mirrored convex surface. The undercorrectedspherical aberration of the mirror is offset by the overcorrectedspherical aberration of the negative lens. Both concave mirrors havevery little refractive power. The concave mirrors may also be designedas simple mirrors (compare FIG. 4). If they are simple mirrors (withoutmeniscus lens), then the mass of transparent optical material is lessbut it may be necessary to cut the mirrors.

The projection objective is designed as an immersion lens. Thecorrection status is about 9 milliwaves at 1.1 NA over a 26·5.0 mm²field. The field radius is 65 mm. No aspheric surfaces having adeparture from a best fitting sphere (deformation) larger than 1.0 mmare necessary. A maximum diameter of 220 mm for the largest elementsshows the potential for a low lens mass consumption. The design has 1160mm track length (axial distance between object plane and image plane)and small glass mass. The last lens next to the image plane is made ofcalcium fluoride, for immersion.

This new design has very good lateral colour correction but none foraxial colour. But the small lens sizes give it less axial colour than anall-refractive design of the same NA. The pupil aberration is wellcorrected and the chief rays are almost exactly telecentric on bothends.

The design with only two reflections and the small glass volume has noproblem with obscuration, so the mirrors can be a good size—not solarge—and their strong power provides almost all the Petzval correctionof the system. In the embodiment the two intermediate images are almostexactly in the middle of the catadioptric cavity.

A modification not shown here has a first refractive objective part anda third refractive objective part quite similar to those disclosed inU.S. provisional application with Ser. No. 60/511,673 filed on Oct. 17,2003 by the applicant. The corresponding specification is incorporatedby reference.

This basic design has potential to get by on even smaller amounts ofoptical material volume, especially if the Mangin mirrors have theirglass removed. (Compare FIG. 4).

In FIG. 4 a second embodiment is shown. Features or feature groupsidentical or similar in structure and/or function to those in FIG. 1 aredenoted by similar numerals increased by 100.

The projection objective 200 is designed as an immersion lens for λ=193nm having an image side numerical aperture NA=1.20 when used inconjunction with a high index immersion fluid, e.g. pure water, betweenthe exit face of the objective and the image plane. The field size is26·5.0 mm². The specifications for this design are summarized in Table4. The leftmost column lists the number of the refractive, reflective,or otherwise designated surface, the second column lists the radius, r,of that surface [mm], the third column lists the distance, d [mm],between that surface and the next surface, a parameter that is referredto as the “thickness” of the optical element, the fourth column liststhe material employed for fabricating that optical element, and thefifth column lists the refractive index of the material employed for itsfabrication. The sixth column lists the optically utilizable, clear,semi diameter [mm] of the optical component. A radius r=0 in a tabledesignates a planar surface (having infinite radius).

In the case of this particular embodiment, twelve surfaces, namelysurfaces 2, 3, 8, 12, 15, 16, 17, 19, 22, 30, 33 and 35 in table 4, areaspherical surfaces. Table 4A lists the associated data for thoseaspherical surfaces, from which the sagitta or rising height p(h) oftheir surface figures as a function of the height h may be computedemploying the following equation:p(h)=[((1/r)h ²)/(1+SQRT(1−(1+K)(1/r)² h ²))]+C 1·h⁴ +C 2·h⁶+ . . . ,where the reciprocal value (1/r) of the radius is the curvature of thesurface in question at the surface vertex and h is the distance of apoint thereon from the optical axis. The sagitta or rising height p(h)thus represents the distance of that point from the vertex of thesurface in question, measured along the z-direction, i.e., along theoptical axis. The constants K, C1, C2, etc., are listed in Table 4A.

Since the objective has 17 lenses, more than 50% or more than 60% of thelenses are aspheric lenses.

Like the embodiment of FIG. 1, there are no folding mirrors leaving astraight, unfolded optical axis common to all optical components. Incontrast to the first embodiment, the two concave mirrors 221, 222facing each other are simple mirrors instead of Mangin-mirrors, whichallows to reduce the overall mass of the system. In order to demonstratethe path of the light transiting the catoptric (purely reflective) group220, FIGS. 5 and 6 show the “footprints” of the beams on the concavemirrors. In FIG. 5, footprints at the position of the first concavemirror 221 are shown. The lower group of elliptic lines represent beamsreflected at the first concave mirror 221, and the upper group ofelliptic lines represent the beams coming from the second concave mirror222 towards the second refractive part 230. In FIG. 6, the footprints atthe position of the second concave mirror 222 are shown. The lower partrepresents beams running from the first refractive part 210 to the firstconcave mirror 221, whereas the upper elliptic lines represent the beamsreflected at the second concave mirror 222 and running to the imageplane. It can be seen that the used areas on the mirrors have simplecontiguous shapes such that the mirrors may be fabricated, for example,as a rectangular mirror, which is easy to mount.

It is a characterizing feature that the overall cross sectional beamshape at a concave mirror deviates significantly from a circular shapefound at pupil positions. The beam diameters in mutually perpendiculardirections have a ratio of about 1:3 in this embodiment, where thediameter in scan direction y is less than 50% or 30% of the diameter ina cross scan direction x. The beam shape resembles the rectangular fieldshape indicating that the concave mirror is closer to a field surfacethan to a pupil surface, i.e. the concave mirror is positioned opticallyremote from a pupil surface. Small, narrow mirrors can therefore be usedas concave mirrors. This facilitates guiding the light flux past theconcave mirrors at one side without vignetting even when the numericalaperture is high.

Generally, in embodiments according to the invention, the size of theconcave mirrors is not directly coupled to the numerical aperture suchthat very high values of NA, e.g. NA>1.3 or NA>1.4 can be obtainedwithout unduly increasing the mirror size.

In FIG. 7 to 9 some beneficial variants of the second embodiment areshown. Features or feature groups identical or similar in structureand/or function to those in FIG. 4 are denoted by similar numerals. Allvariants are designed as immersion lens for λ=193 nm having an imageside numerical aperture NA>1 when used in conjunction with a high indeximmersion fluid, e.g. pure water, between the exit face of the objectiveand the image plane. The field size is 26 mm ˜5.0 mm. Specifications aregiven in Tables 7 and 7A for FIG. 7, and in tables 8 and 8A for FIG. 8and for FIG. 9. The designs in FIGS. 8 and 9 are the same, thedifference lies in the position of the aperture stop A.

The variant of FIG. 7 (NA=1.1) is characterized by the fact that theused areas on the concave mirrors are smaller than in the embodiment ofFIG. 4. Consequently, the sizes of the rectangularly shaped concavemirrors may be further reduced.

The variant of FIG. 8 (NA=1.15) is characterized by the fact that theaperture stop A is positioned in the third, purely refractive part 230in the region of maximum beam diameter. By contrast, in the closelyrelated variant in FIG. 9 (NA=1.15) the aperture stop A is positioned inthe first refractive objective part 210. This demonstrates that thedesigns allow flexibility as to where the aperture stop can be placed.

The embodiments described above are characterized by a straight,unfolded optical axis common to all optical elements. A potentialproblem of such designs may be that the mounts provided for the concavemirrors may lead to a long track length or may interfere with the beampath. In the following, embodiments comprising at least one planarfolding mirror are shown as design alternatives to obtain compactdesigns.

In FIG. 10 a third embodiment is shown. Features or feature groupsidentical or similar in structure and/or function to those in FIG. 1 aredenoted by similar numerals increased by 200. FIG. 11 represents alongitudinal sectional view of an embodiment designed on the basisdepicted in FIG. 10.

The embodiment of a catadioptric projection objective 300 in FIG. 10 issimilar to some of the above mentioned embodiments in that it comprisesa first, refractive objective part 310 for creating a first intermediateimage 303, a second, catoptric objective part 320 for creating a secondintermediate image 304 from the first intermediate image, and a third,refractive objective part 330 for re-imaging the second intermediateimage onto the image plane 302. The second objective part may include atleast one lens such that it becomes a catadioptric objective part.

In contrast to the embodiments shown above, the second objective part320 includes four reflective surfaces, namely two planar folding mirrors306, 307 and two concave mirrors 321, 322 facing each other. The concavemirror surfaces of these mirrors define a catoptric cavity 325 insidewhich the folding mirrors and the intermediate images are located.

The first folding mirror 306 located immediately near the firstintermediate image 303 is arranged for reflecting the radiation comingfrom the object plane onto the first concave mirror 321, which reflectsthe light directly, i.e. without intermediate image, to the secondconcave mirror 322. Light reflected from the second concave mirrorstrikes the second folding mirror 307 which reflects the light to theobject plane, thereby creating the second intermediate image immediatelynear the second folding mirror. In this construction, the concavemirrors and the mounts of these mirrors are situated outside the centralmain part running between object plane and image plane. The concavemirrors have a common optical axis 305′ which may be exactly or almostperpendicular to the object side and image side parts 305″ and 305′″ ofthe optical axis, which are laterally offset in this embodiment.Inclination angles of the folding mirrors with respect to the opticalaxis may be 45° or may deviate significantly therefrom, e.g. by up to 5or 10 degrees. Therefore, inclination angles between 70° and 110° mayoccur between the common optical axis of the concave mirrors and theobject and image side part of the optical axis.

Whereas the intermediate images are geometrically situated between theconcave mirrors, it is to be noted that no intermediate image liesoptically between the concave mirrors. This configuration allows forsmall spot diameters on the concave mirrors, which is advantageous forreducing the geometric light guidance value (etendue). A pupil plane 309lies at a distance from both concave mirrors at the position where thechief ray 308 crosses the optical axis 305′ defined by the concavemirrors. An aperture stop may be positioned here. It may be beneficialif at least one of the concave mirrors has an aspheric reflectingsurface having a curvature which decreases from the optical axis to theedge of the mirror in a radial direction.

The purely refractive first objective part 310, which transforms the offaxis object field into the first intermediate image, has a first lensgroup LG11 with positive power and a second lens group LG12 with apositive power. An aperture stop may be provided between these lensgroups where the chief ray 308 crosses the optical axis. The catoptricobjective part 320 images the first intermediate image into the secondintermediate image and has a pupil plane between the concave mirrors.The purely refractive third objective part 330 has a first lens groupLG31 with positive power, and a second lens group LG32 with a positivepower. An position for an aperture A stop lies between LG31 and LG32.

FIG. 12 shows a schematric representation of another projectionobjective 400 having two concave mirrors 421 and 422 and twointermediate images 403, 404. Features or feature groups identical orsimilar in structure and/or function to those in FIG. 10 are denoted bysimilar numerals increased by 100. FIG. 13 represents a longitudinalsectional view of an embodiment designed on the basis depicted in FIG.12.

In contrast to the embodiment shown in FIGS. 10, 11, the concave mirrors421, 422 do not share a common straight optical axis. Instead, theoptical axis of the concave mirror 421 corresponds to the optical axis405 between object plane and image plane. The optical axis of theconcave mirror 422 is nearly perpendicular to the optical axis 405. Theconstruction space for the mirror mounts lies outside the optical axisconnecting object and image plane, which may be favorable. Note that theobject side and the image side section of the optical axis are coaxial.As the concave mirrors both lie on one side of the optical axis 405, thefirst and second folding mirror can be designed as one single planarmirror 406 with a mirror face facing the concave mirrors and used twiceas the light passes through. Also, the two separate concave mirrors 421,422 can be combined to form one single concave mirror which is usedtwice.

FIG. 14 shows a perspective view of the catoptric objective part of thethird embodiment to demonstrate the mirror geometry. It can be seen thatthe folding mirrors and the concave mirrors can have geometricallysimple shapes since the illuminated areas are of simple form andcontiguous. The concave mirrors and the folding mirrors in thisembodiment have rectangular shape which facilitates mounting.

FIG. 15 shows a schematic representation of another embodiment of aprojection objective 500 having features improving optical performanceand features facilitating manufacturing. FIG. 16 shows a lens section ofa projection objective designed according to the principles shown inFIG. 15. The specification of this embodiment is shown in tables 16 and16A. Features or feature groups identical or similar in structure and/orfunction to those in FIG. 1 are denoted by similar numerals, increasedby 400.

The second objective part 520 which serves to image the firstintermediate image 503 into the second intermediate image 504 includes afirst concave mirror 521 and a second concave mirror 522 opticallydownstream of the first concave mirror 521. The curvature surfaces ofthe first and second concave mirror have a common axis of rotationalsymmetry co-axial with the optical axis shared by all optical elementsof the projection objective. The unbroken mirror surfaces used on thefirst and second concave mirror are on opposite sides of the opticalaxis 505. A first mirror-related lens 551 is arranged optically betweenthe first intermediate image 503 and the first concave mirror 521immediately in front of the first concave mirror such that it istransited twice in the optical path between the first intermediate imageand the first concave mirror and in the optical path between the firstconcave mirror and the second concave mirror. In order to avoidinfluencing the optical path between the second concave mirror and theimage plane the first mirror-related lens 551 is designed as a truncatedlens arranged outside the optical axis. A second mirror-related lens 552is arranged immediately in front of the second concave mirror 522 suchthat is used twice in the optical path between the first and the secondconcave mirror and in the optical path between the second concave mirrorand the image plane 502. The lens 552 is truncated such that it does notextend into the optical path between the object plane 501 and the firstconcave mirror 521. Both the first and second mirror related lenses 551,552 are free standing lenses having free entrance and exit surfaces.Particularly, the lens surfaces facing the respective concave mirrorshave curvatures different from the curvatures of the concave mirrors,which allows additional degrees of freedom when compared to theembodiments having Mangin mirrors (compare FIG. 1). Both mirror-relatedlenses 551, 552 are designed as negative meniscus lenses having a senseof curvature similar to the curvature of the associated concave mirror,i.e. having a convex surface facing the concave mirror surface of theassociated concave mirror. The negative refractive power arrangedimmediately in front of the concave mirrors serves to improve correctionof the chromatic length aberration (CHL). All optically active surfacesof the second objective part are spherical, which greatly facilitatesmanufacturing and improves the optical performance. Particularly, straylight may be reduced when compared to embodiments having asphericsurfaces, particularly aspheric mirror surfaces.

The field having the shape of a high aspect ratio rectangle having awidth a in cross-scan direction (x-direction) and a smaller width b inscan direction (y-direction) and arranged off-axis at a distance c fromthe optical axis is shown in FIG. 15 a. The immersion objective hasimage side numerical aperture NA=1.2 when used in conjunction with purewater as an immersion medium at 193 nm. The system is telecentric on theobject and image side and essentially free of field zone aberrations.

In FIG. 17 a lens section of a variant of a system according to theprinciples explained in connection with FIG. 15 is shown. Thespecification of the 193 nm immersion lens having NA=1.2 is given intables 17 and 17A. Features or feature groups identical or similar instructure and/or function to those in FIG. 1 are denoted by similarnumerals, increased by 500. The second objective part 620 has asphericalnegative meniscus lenses 651, 652 immediately in front of the sphericalconcave mirrors 621, 622 and used twice in the light path to and fromthe respective concave mirrors. For the sake of simplicity, each groupof optical elements consisting of a concave mirror 621, 622 and theassociated lenses 651, 652 immediately ahead of the respective concavemirror is denoted as “catadioptric sub-group”. In the embodiment of FIG.17 the catadioptric sub-group 621, 651 and the catadioptric sub-group622, 652 are designed identically and arranged symmetrically withrespect to each other. Particularly, the radii of the optical surfaces,the axial distances or thicknesses of the optical surfaces and thediameters of the optical surfaces of the symmetry related lenses as wellas the symmetry related concave mirrors are identical. This makes itpossible that the lenses 651, 652 and the mirrors 621, 622,respectively, may be manufactured simultaneously from the same blankmaterial. Therefore, arrangements of the type exemplarily shown in FIG.17 allow for significant reduction in costs for material andmanufacturing for the optical elements used in the second, catadioptricobjective part.

In a corresponding method of manufacturing optical elements for ancatadioptric or catoptric objective part of a projection lens having afirst concave mirror and a second concave mirror designed as truncatedmirrors the first and second mirrors are fabricated such that firstly amirror blank for the first and second concave mirror is manufactured toobtain the desired concave shape of the mirror surface and secondly theshaped mirror blank is separated into two truncated mirrors used asfirst and second concave mirror. The mirror blank may be a single piececut into two pieces after surface preparation. It is also possible tojoin two separate blank parts together, e.g. by wringing or cementing,prior to shaping the mirror surface. This allows easy separation afterthe surface preparation. The coating of the mirror substrate may beperformed prior to or after separation of the mirror substrate parts.The mirror related lenses may be manufactured correspondingly.

A further difference to the embodiment shown in FIG. 16 lies in the factthat at least one of the surfaces of the lenses 651, 652 close to therespective concave mirrors has aspheric shape. In the embodiment, eachconcave lens surface of the lenses 651, 652 is aspheric. The asphericsurfaces arranged closed to the respective intermediate images, whichare field surfaces of this system, can be designed such that a stronginfluence on field dependent aberrations, like distortion on the objectimaging or the spherical aberration of the pupil imaging, areinfluenced. Generally, it may be useful to have at least one lensarranged between an intermediate image and the associated concave mirroroptically near the intermediate image (upstream or downstream of theintermediate image), wherein at least one surface of the lens arrangedbetween the intermediate image and the concave mirror is aspheric.Particularly, the lens surface facing the intermediate image may beaspheric.

In an alternative embodiment the mirror related lenses, which aretruncated lenses in the embodiments of FIGS. 16 and 17, are designed asfull meniscus shaped negative lenses extending across the optical axissuch that they are transited three times. Specifically, lens 652(associated to the second concave mirror 622) may extend across theoptical axis 605 such that light coming from the object plane transitsthis lens prior to forming the first intermediate image 603 and then, onthe other side of the optical axis, in the optical path between firstand second concave mirror and second concave mirror and image plane.Likewise, lens 651 associated to the first concave mirror 621 may extendacross the optical axis such that the lens is used twice in the opticalpath to and from the first concave mirrors and a third time in theoptical path between the second intermediate image 604 and the imageplane. In this embodiment, two aspheric surfaces transited three timesupstream and downstream of an intermediate image are provided, whichfacilitates optical correction. In addition, mounting of the lenses isimproved when compared to the mounting of truncated lenses (compareFIGS. 18 and 19).

In FIG. 18 a schematic representation of a projection objective 700having two lenses used three times in transmission is shown. FIG. 19shows an embodiment of this type, for which the specification is givenin tables 19 and 19A. Features similar or identical to featuresdescribed in detail in connection with FIG. 15 to 17 are designated withthe same reference numbers, increased by 100 or 200, respectively.

The catadioptric second objective part 720 serves to image the firstintermediate image 703 into the second intermediate image 704. A firstmirror related lens 751 is arranged optically between the firstintermediate image 703 and the first concave mirror 721, whereas, on theopposite side of the optical axis 705, the second mirror related lens752 is arranged optically between the second concave mirror 722 and thesecond intermediate image 704. Both mirror-related lenses 751, 752extend across the optical axis into the beam pass of light passing therespective concave mirrors 721, 722. Particularly, the second mirrorrelated lens 752 extends into the beam pass between the object plane 751and the first concave mirror 721, whereas the first mirror related lens751 extends into the beam path into the second concave mirror 752 andthe image plane. Therefore, each of the mirror-related lenses 751, 752is optically used three times, whereby the optical effect of a lens canbe maximized and, at the same time, the consumption of optical materialcan by minimized. In addition, mounting of the lenses 751, 752 isfacilitated when compared to a mounting of truncated lenses.

The triply passed lenses 751, 752 may preferably be designed asmulti-grade lenses having a first lens zone associated with one side ofthe optical axis and transited twice in the optical path to and from theassociated concave mirror and a second zone associated with the oppositeside of the optical axis and transited once, where the first lens zoneand the second lens zone have different lens surface curvature on atleast one side of the lens such that the multigrade lens forms a pair ofmutually independently acting lenses acting at a common location. Amonolithic multigrade lens providing different optical powers onopposite sides of the optical axis may be fabricated from a single lensblank and can be mounted conventionally with a circular mount. The lenszones on either side of the optical axis may have different asphericshape, where the aspheres are preferably based on the same sphericalbase shape to facilitate manufacturing. Note that the part of lens 752closest to the first intermediate image and the part of lens 751 closestto the second intermediate image are both located close to fieldsurfaces such that the lens surfaces are effective for correcting fieldaberrations, particularly if they are made aspheric.

In the embodiment shown in FIG. 19, both lenses 751, 752 with triple useare designed as negative meniscus lenses having a sense of curvaturesimilar to the related concave mirrors and having weak negativerefractive power. In other embodiments, the lenses may also be almostwithout optical power. In both cases, at least one lens surface may beaspheric in order to support optical correction.

In all embodiments the first, dioptric objective part serves to form thefirst intermediate image from a flat object field. The size and axialposition of the first intermediate image as well as the aberrationsassociated with the first intermediate image are determined by theoptical properties of the first objective part. Like in the embodimentsshown above, the first objective part may be subdivided into a firstlens group LG11 having positive refractive power and the second lensgroup LG12 having positive refractive power, wherein a pupil surface 711of the system is disposed between the lens groups in an axial positionwhere the chief ray 708 of the imaging intersects the optical axis. Anaperture stop for determining the numerical aperture used in the imagingprocess may be provided in the vicinity of this pupil surface. However,in the embodiment shown in FIGS. 18 and 19, the aperture stop A isprovided in the vicinity of a pupil surface optically conjugate to thispupil surface in the third, dioptric objective part. The second lensgroup LG12 between the pupil surface 711 and the first intermediateimage includes the negative meniscus lens 752 immediately upstream ofthe first intermediate image.

In the embodiment of FIG. 19 the first lens group LG11 consists of apositive meniscus lens 781 having an image side concave surface and weakoptical power, a negative meniscus lens 782 having an image side concavesurface and weak negative power, a positive meniscus lens 783 having anobject side concave surface, a biconvex positive lens 784, a positivemeniscus lens 785 having an image side concave surface and a positivemeniscus lens 786 having an image side concave surface immediately aheadof the pupil surface 711. The second lens group LG12 includes a meniscusshaped lens 787 having a strongly curved concave surface facing theobject, a positive meniscus lens 788 having an object side concavesurface and a biconvex positive lens 789 immediately behind, and thenegative meniscus lens 752 which is integral part of the mirror relatedsecond lens. The meniscus lens 787 immediately following the pupilsurface and having the concave surface facing the pupil and the objectplane is particularly useful for correcting spherical aberration,astigmatism and image curvature in the first objective part. The opticalcorrection is also positively influenced by a negative-positive-doubletformed by the negative meniscus lens 782 and the positive meniscus lens783 arranged in the divergent beam section of the first lens group LG11.The negative meniscus lens having the concave exit surface opticallyclose to the object plane is arranged in a region where the height ofthe chief ray is larger than the height of the marginal ray, wherebyfield aberrations, like distortion, can be effectively corrected.

The embodiment of a projection objective 800 shown in FIG. 20 having aspecification as given in tables 20 and 20A can be described as avariant of the embodiment shown in FIG. 19. Similar to that embodiment,a negative meniscus lens 851 is arranged immediately ahead of the firstconcave mirror 821, the lens 851 being passed three times by the lightbeam. In contrast to the embodiment of FIG. 19, lens 851 is the onlylens passed three times by the light beam. There is no negativerefractive power or positive refractive power immediately in front ofthe second concave mirror 822. Therefore, the mass of transparentoptical material required for the catadioptric objective part is smallerthan in the embodiment shown in FIG. 19. The first objective part hasmagnifycation |β₁|≈1.9.

In FIG. 21 another embodiment of a projection objective 900 is shownwhich is generally designed according to the principles explained indetail in connection with FIG. 15. The specification is given in tables21 and 21A. Reference numerals are similar, but increased by 400.Particularly, to each concave mirror 921, 922 is as signed a negativemeniscus lens 951, 952 immediately in front of the concave mirroroptically between the respective concave mirror and an intermediateimage upstream or downstream of the concave mirror. Each negativemeniscus lens 951, 952 is designed as a truncated lens arranged only atthe side of the optical axis where the associated concave mirror ispositioned. Therefore, the mirror-related lens is passed twice by thelight. The first objective part 910 can be subdivided into two lensgroups, lens group LG11 being arranged between the object plane and thepupil plane 911, whereas lens group LG12 is arranged between the pupilplane and the first intermediate image 903. Like in the embodiment shownin FIG. 19, the first lens group LG11 includes anegative-positive-doublet 982, 983, the negative meniscus 982 beingarranged close to the object plane and having a concave exit side facingthe image plane. The positive refractive power following this negativelens is split into two positive meniscus lenses, each having a concaveside facing the object. A meniscus lens 987 having a strongly curvedconcave entrance side facing the object is arranged immediatelydownstream of the pupil plane 911. Optically, this lens is useful forcorrecting spherical aberration, astigmatism and image curvature in thefirst objective part.

The third objective part 930 is composed of a first lens group LG31between the second intermediate image 904 and the aperture stop A, andthe second lens group LG32 between the aperture stop A and the imageplane. The aperture stop is arranged between the region of largest beamdiameter of the third objective part and the image plane. The biconvexpositive lens 996 immediately following the aperture stop A is abiaspherical lens having both the entrance side and the exit side beingaspheric surfaces. The aspheric surfaces in close vicinity to each otherand arran-ged in the convergent beam path immediately upstream of theimage plane have a strong influence on aberration correction.Particularly, higher orders of spherical aberration and coma arepositively influenced. There is only one negative lens 991 arranged inthe third objective part. The biconvex negative lens 991 defines ashallow waist in the beam path of the third objective part. All lensesdownstream of negative lens 991 are positive lenses. Avoiding negativelenses in the region of increasing and large beam diameters of the thirdobjective part allows to keep the beam diameter small, thus decreasingthe demand of optical material used for the lenses of the thirdobjective part.

Both concave mirrors 921, 922 have spherical mirror surfaces, thusfacilitating manufacturing and improving optical performance. If D is amaximum diameter of a lens element of the third objective part in [mm]and c₁ and c₂ are the curvatures of the concave mirrors 921, 922 in[mm⁻¹], then the following condition is fulfilled by the embodiment ofFIG. 21: 1<D/(|c₁|+|c₂|)·10⁻⁴<6. The curvature c is the reciprocal ofthe curvature radius at the vertex. If this condition is fulfilled, thena good balance between Petzval correction and positive power in thethird objective part can be obtained.

FIG. 22 shows a variant of a projection objective 1000 having a generalconstruction similar to that of the embodiment shown in FIG. 4, i.e.having a second objective part 1020 consisting of two concave mirrors1021, 1022 and having no refractive optical elements. Reference numeralsfor similar features/feature groups are similar, increased by 800. Thespecification is given in tables 22 and 22A. The first, dioptricobjective part 1010 for creating the first intermediate image 1003 issubdivided into a first lens group LG11 between object plane and pupilplane 1011 and a second lens group LG12 between the pupil plane and thefirst intermediate image. The first lens group LG11 starts with thebiconvex positive lens 1081, followed by a negative meniscus lens 1082having an image side concave surface and a biconvex positive lens 1083.Particularly high incidence angles occur at the concave exit side of thenegative meniscus lens 1082, which is arranged in a region where thelight beam is slightly divergent. The high incidence angles have strongcorrecting influence. The sequence positive-negative-positive providedby lenses 1081, 1082, 1083 has been found to be useful. Therefore, itmay be preferable if the first objective part creating the firstintermediate image includes at least one concave surface facing theimage, which is preferably included in a sequence ofpositive-negative-positive lenses.

FIG. 23 shows another embodiment of a projection objective 1100generally designed in accordance of the principles explained inconnection with the FIG. 4. The specification is given in tables 23 and23A. The second objective part 1120 is purely reflective, thus requiringno transparent optical material. Some aspects regarding featuresfacilitating manufacturing will now be explained in connection with thisembodiment and with FIG. 24. They may, however, be implemented in otherembodiments. Both concave mirrors 1121, 1122 have similar surfaces,which facilitates manufacturing and improves optical performance.Generally, the shape of a concave mirror has a strong influence oncertain aberrations. Particularly, the image curvature (Petzvalcurvature) is influenced by the vertex curvature of the mirror. If anaspherical mirror surface is used, the basic data of the asphericsurface define certain field dependent aberrations, particularly thespherical aberration of the pupil, which is proportional to y⁴, where yis the beam height at the concave mirror. Both factors influencing theshape of the mirror surface are deeply rooted in the optical design andare dependent from one another. Particularly, the second factorregarding the type of asphere is strongly influenced by the first factor(basic curvature), since, for example, a strong curvature of the concavemirror will induce strong field dependent aberrations.

Certain crucial factors influencing a good compromise betweenmanufacturability and optical performance of concave mirrors have beenidentified. One disruptive factor resulting from manufacturing of aconcave mirror is the depth up to which a tool must plunge into thematerial of the mirror substrate in order to create the concave mirrorsurface. This plunging depth is denoted “p_(max)” in connection withFIG. 24. The maximum sagitta or rising height at the edge of a mirrormay be defined as the axial separation of a plane normal to the opticalaxis and touching the edge of the concave mirror to a plane parallelthereto and touching the vertex of the concave mirror. As schematicallyshown in FIG. 24, p_(max) is dependent on the curvature radius R of theaspherical mirror surface, and the diameter D of the aspherical mirror.In a first approximation (for aspherical form) p_(max) is given by:p_(max)=R−(R−D²−D²/4)^(0.5). Since the basic shape of the mirror cannotbe altered without strongly influencing the optical effect, only thediameter of the mirror surface can be used as a free parameter toinfluence manufacturability. When considering manufacturing, thegrinding of the mirror substrate necessary to define the basic shape ofthe mirror substrate prior to polishing is particularly addressed. Ithas been found that it is preferable if the condition D≦1.3R isfulfilled and that it may be more preferable if the condition D≦1.2R isfulfilled such that also the condition: p_(max)<0.22R is fulfilled.Manufacturing is also facilitated if the radii of curvature at thevertex of the curved mirror surfaces for two mirrors are as similar aspossible. If R1 is the vertex radius of curvature of a first mirror andR2 is the vertex radius of curvature of the second mirror, it ispreferable that the following condition is fulfilled: 0.8<|R1/R2 |<1.2.In the embodiment shown in FIG. 23 this condition and the two followingconditions are fulfilled: p_(max)≦0.22R and D≦1.3R. It may be sufficientif, in addition to the condition regarding the relation of curvatureradii one of the latter conditions is fulfilled.

In the embodiment shown in FIG. 23 the curvatures of the mirrors 1121,1122 are almost identical (curvature radii differ within less than 1%)and the aspheric shapes are almost identical. The mirrors 1121, 1122 arethe only optical elements of the second objective part, thus making thispart a catoptic part. The maximum diameter of optical elements of thesecond objective part 1120 is smaller or almost equal to the maximumdiameter of lenses in the third objective part. This facilitatesimplementation of the axial symmetric projection objective into a waferstepper or a wafer scanner. Although the aperture stop A is provided inthe third objective part, it may also be provided in the first objectivepart in the vicinity of the pupil surface 1111 thereof.

In FIG. 25 another embodiment of a projection objective 1200 is shown.FIG. 26 shows a detailed view of a section between the object plane 1201and the second intermediate image 1204 which is the object of a purelyrefractive objective part 1230 for imaging the second intermediate imageonto the image plane 1290 at a reduced scale of about 1:4.

The entire projection objective 1200 designed to image an objectdisposed in the object plane 1201 onto the image plane 1202 at a reducedscale consists of three objective parts 1210, 1220, 1230, each designedto image a field plane upstream of the objective part into field planedownstream of the objective part. The first objective part 1210 consistsof four consecutive lenses 1211, 1212, 1213 and 1214 followed by thefirst concave mirror 1221 immediately upstream of the first intermediateimage 1203. Therefore, the first objective part is catadioptric. Thesecond objective part 1220 is also catadioptric, including the secondconcave mirror 1222 immediately downstream of the first intermediateimage 1203 and positive lenses 1226, 1227, 1228, 1229, all effective forrefocusing the first intermediate image 1203 into the secondintermediate image 1204. The third objective part 1230 is purelyrefractive and includes the freely accessible aperture stop A of thesystem.

In contrast to the embodiments shown above, only the first intermediateimage 1203 is positioned in the intermirror space defined by the concavemirrors 1221, 1222, whereas the second intermediate image 1204 liesoutside of this intermirror space. The mirror group defined by the twoconcave mirrors 1221, 1222 facing each other has a mirror group entryand a mirror group exit. At the mirror group entry positionedgeometrically next to the edge of the second mirror 1222 facing theoptical axis 1205 radiation coming from the object side enters theintermirror space and at the mirror group exit positioned geometricallynext to the edge of the first mirror 1221 facing the optical axis theradiation exits the intermirror space after the reflections on theconcave mirrors. It is a characterizing feature of this embodiment thata first pupil surface PS1 of the projection objective lies in thevicinity of the mirror group entry and a second pupil surface PS2 liesin the vicinity of the mirror group exit. In contrast, in most otherembodiments, for example those shown in FIGS. 1 to 4, 7 to 14, the entryof the mirror group and the exit of the mirror group are optically closeto the intermediate images, which are field surfaces of the projectionlens. Also, in the embodiments mentioned above the radiation reflectedfrom the first concave mirror crosses the optical axis prior toimpinging on the second concave mirror which effectively leaves thefootprints of the radiation on the reflecting surfaces of the concavemirrors at opposite sides of the optical axis. In contrast, in theembodiment shown in FIGS. 25 and 26, first and second concave mirrors1221, 1222 are disposed on the same side of the optical axis. Due tothis difference the optical path within the space defined by the concavemirrors has almost point symmetry with respect to a symmetry pointarranged midways between the vertices of the concave mirrors in theembodiments mentioned above, whereas the optical path is almostmirror-symmetric with respect to a mirror plane perpendicular to theoptical axis and arranged midways between vertices of the concavemirrors in the embodiment of FIGS. 25, 26.

Optically, embodiments designed essentially according to the principlesof the embodiment shown in FIGS. 25, 26 can be advantageous if it isdesired to influence field aberrations by the action of lenses close tofield planes since one of the field planes between object plane 1201 andimage plane 1202, namely the field surface of the second intermediateimage 1204 is arranged freely accessible at a distance outside theintermirror space defined by the concave mirrors 1221, 1222. As shown inFIG. 25, two field lenses 1229, 1235 are arranged close to the secondintermediate image 1204 immediately upstream (1229) and immediatelydownstream (1235) of this intermediate image, thus forming a field lensgroup for aberration correction.

The first and second objective parts 1210, 1220 are effective to form anintermediate image 1204 at a distance from the mirror group defined bythe concave mirrors 1221, 1222 geometrically behind this mirror group.Since a pupil surface PS2 is arranged in the vicinity of the exit of themirror group, a group of lenses 1226 to 1228 acting in combination as aFourier-transforming lens group can be used to position and define thecharacteristics of the intermediate image 1204, which then is reimagedon the image plane 1202 by the third objective part 1230. Theseproperties make the sub-system formed by the first and second objectivepart 1210, 1220 useful as a relay system for linking light paths ofoptical systems ahead and downstream of the relay system together. Dueto the action of the concave mirrors 1221, 1222 of the mirror group thisrelay system can be designed to have strong influence on the imagecurvature compensating at least partly the opposite influence ofpositive lenses upstream and downstream of the mirror group.

FIG. 27 shows a variant of a projection objective 1300 having a generalconstruction similar to that of the embodiment shown in FIG. 4, i.e.having a second, catoptric objective part 1320 consisting of two concavemirrors 1321, 1322 and having no refractive optical element. Referencenumerals for similar features/feature groups are similar as in FIG. 4,increased by 1100. The specification is given in tables 27, 27A.

The first, dioptric objective part 1310 for creating the firstintermediate image 1303 has a first lens element 1312 immediatelyfollowing the object surface 1301, where the entrance surface of thisfirst lens element is aspheric and convex to the object surface and anaperture stop A is provided in the first objective part in between lensgroups each having positive refractive power. The concave mirrors 1321,1322 of the catoptric second objective part 1320 each have an asphericmirror surface. It is a characterizing feature of this design that theaspheric mirror surfaces of mirrors 1321, 1322 have identical asphericshape. This allows to use exactly the same optical testing device formeasuring the aspheric shape of both concave mirrors in themanufacturing process. As it can be seen from tables 27, 27A the radiiof the concave mirrors (describing the basic shape of the mirrorsurface) and the aspheric constants (describing the aspherical deviationfrom the basic shape of surfaces 25, 26) are identical. In otherembodiments the basic shape and the aspheric constants may vary slightlybetween the two concave mirror. Even in that case significantimprovements relating to costs of the manufacturing process can beobtained if the mirror surfaces are shaped similar such that the samemeasuring optics can be used for testing both mirror surfaces.

The projection objective 1400, a lens section of which is shown in FIG.28, has a general construction similar to that on the embodiment shownin FIG. 4. Therefore, reference numerals for similar features/featuregroups are similar, increasing by 1200. The specification is given intables 28 and 28A.

A first, dioptric objective part 1410 including an aperture stop A isdesigned for creating a first intermediate image 1403. The second,catoptric (purely reflective) objective part 1420 consists of a firstconcave mirror 1421 and a second concave mirror 1422 which, incombination, create the second intermediate image 1404 from the firstintermediate image 1403. A dioptric third objective part 1430 isdesigned for imaging the second intermediate image 1404 onto the imageplane 1402, whereby, during operation, a thin layer of immersion fluid I(water) is transited by the radiation. When optimizing the design,particular care was taken to facilitate optical testing of the asphericmirror surfaces during mirror manufacturing. For this purpose, themirror surface of the first concave mirror 1421 has a parabolic shape(compare table 28A, surface 23).

The following considerations are provided to facilitate understandingwhy a parabolic shape of a mirror surface facilitates testing. In ageneral case, optical testing of an aspherical mirror surface requiresuse of specifically adapted optical testing system designed to createtesting radiation having a distorted wave front which is adapted to thedesired aspheric shape of the mirror surface such that the localincidence angles of the test wave onto the aspheric surface arerectangular for each location of the aspheric surface. Optical testingdevices using aplanatic optical systems, or compensation systems(K-systems) or computer generated holograms (CGH) or a combinationthereof for shaping the distorted wave front are usually employed forthis purpose. Since the construction of specifically designed testingoptics for each aspherical shape is expensive, alternative methods aredesired.

An aspheric mirror having a parabolic shape, in contrast, can be testedwith simple testing equipment. For further explanation, it is consideredthat a purely conical, rotational symmetric surface shape can bedescribed by the following equation:

$p = \frac{{ch}^{2}}{1 + \sqrt{1 - {{c^{2}\left( {k + 1} \right)}h^{2}}}}$

Here, p is the axial coordinate of a surface point, k is a conicalconstant, c is the curvature (i.e. the reciprocal (1/r) of radius r) ofthe surface at the vertex (where the optical axis intersects the mirrorsurface) and h is the height (measured perpendicular to the opticalaxis). Using this equation, different conical, rotational symmetricsurface shapes can be generated depending on the value of the conicalconstant k. For example, a spherical shape corresponds to k=0, a valuek=−1 describes a parabola, values k<−1 describe a hyperbola and values−1<k<0 describe an elliptic shape. All these shapes have in common thatan object point arranged in a specific position (depending on the shapeof the surface) will be imaged without aberrations (stigmatic imaging).At least one non-spherical conical mirror may therefore be useful in anembodiment of the invention or in other projection objectives havingconcave mirrors. Considering the requirements of mirror testing, aparabolic shape (k=−1) is particularly useful since the object point,which will be imaged without spherical aberrations, is positioned atinfinity. With other words: light from a test beam or parallel lightimpinging parallel to the optical axis on a parabolic surface will befocused in one and only one focal point by the parabolic mirror. This isadvantageous since no special arrangements for diverging or converging abeam bundle of a test wave are necessary. The test wave has a planarwave front.

A possible testing arrangement is schematically shown in FIG. 29. Here,the parabolic mirror surface 1421 is shown together with the opticalaxis OA defined by that mirror surface. The testing equipment includes atesting optical system 1460 designed for creating a parallel test lightbeam parallel to the optical axis OA and incident on the parabolicmirror surface. The testing arrangement further includes a sphericalmirror 1470 shaped and arranged with respect to the desired shape of theparabolic mirror 1421 such that the center of curvature 1490 of thespherical mirror 1470 coincides with the focal point of the parabolicmirror. In this arrangement, a test wave 1495 having a plane wave frontprovided by the optics 1460 and incident on the parabolic mirror surface1421 is first converged by the parabolic mirror into the focal point1490 of the parabolic mirror prior to impinging on the spherical mirror1470. The spherical mirror 1470 reflects the test wave back along thesame path into the test optics 1460. Deviations in path length between aplanar reference wave and the wave reflected back from the parabolicmirror can be used to characterize the parabolic shape of the parabolicmirror.

The projection objective 1400 is telecentric on the object side and onthe image side. One feature contributing to telecentricity on the objectside is the particular convex shape of the entrance side of the firstlens element (positive meniscus 1412) immediately following the objectplane. Aspheric surfaces on the first two lenses on the object sidecontribute to telecentricity. The telecentric beam is essentially freeof field zone errors on the object and image side, i.e. there isvirtually no variation of telecentricity across the object or imagefield.

In FIGS. 30 to 32 three further embodiments of projection objectives1500, 1600 and 1700 having a general construction similar to that shownin FIG. 4 having a catoptric second objective part are shown. Referencenumerals for similar features/feature groups are similar, increased by1300, 1400, 1500 respectively. For example, the object and image planesfor projection objective 1500 are indicated as object plane 1501 andimage plane 1502. respectively. Also, projection objective 1500 includesmirrors 1521 and 1522. The object and image planes for projectionobjective 1600 are indicated as object plane 1601 and image plane 1602.respectively. Also, projection objective 1600 includes mirrors 1621 and1622. The object and image planes for projection objective 1700 areindicated as object plane 1701 and image plane 1702, respectively. Also,projection objective 1700 includes mirrors 1721 and 1722. Thespecifications are given in tables 30, 30 A, 31, 31 A and 32, 32 A. Whendesigning these embodiments, special emphasis was placed on optimizationof material consumption and installation space required for the first,dioptric objective part 1510, 1610, 1710 serving as a relay system forimaging the object field into the first intermediate image.

As a common feature to all embodiments of FIGS. 30, 31 and 32 the firstobjective part has only six lens elements, i.e. transparent opticalelements having considerable refractive power. Only positive lenses areused, thereby creating first objective parts with strong convergingpower in an axially short objective part having relatively small maximumdiameter. In all embodiments, a plane parallel plate 1519, 1619, 1719 ispositioned immediately following the respective first pupil plane 1511,1611, 1711 of the projection objective. One advantage of placing atleast one essentially plane parallel plate near a pupil surface is thatsuch plate can be aspherized to correct for aberrations introduced bymanufacturing or other effects (correction asphere). Such plate can beex-. changeable. In the embodiment of FIG. 30, an aperture stop A isprovided within the first objective part 1510 at the pupil positionimmediately ahead of the parallel plate 1519. In the embodiments ofFIGS. 31 and 32 the aperture stop is arranged within the third objectivepart in the region of maximum beam diameter at the third pupil surface1631, 1731 respectively. All embodiments mentioned here have onlypositive lenses between the image side pupil plane and the image plane,where the embodiment in FIG. 30 has five such positive lenses and theother embodiments (FIGS. 31, 32) have only four positive lenses betweenthe image side pupil surface and the image plane.

A comparative view of the first objective parts of the embodiments inFIGS. 30 to 32 reveals certain relations between the use of asphericsurfaces and the curvature of the entrance surface of the first lenselement immediately following the objective plane. In the embodiment ofFIG. 30, first lens element 1512 is a biconvex positive lens having aaspheric entrance surface facing the object plane, where this entrancesurface is only slightly curved, with the radius of curvature exceeding300 mm. Six aspheric surfaces (indicated by dots) are used. As evidentfrom the rays crossing in the region of the first intermediate image1503, coma is one prominent imaging error in the first intermediateimage 1503. This error is compensated by the design of the opticalsurfaces downstream of the first intermediate image. In contrast, in theembodiment shown in FIG. 31 the aspheric entrance surface of the firstlens element (positive meniscus 1612) has a relatively strong convexcurvature having a radius of curvature below 300 mm (R≈154 mm in thiscase). Only four aspheric surfaces are employed in the first objectivepart 1610. The aspheric surfaces are adapted to the optical effect ofthe curved entrance surface such that the first intermediate image 1603is essentially free of coma. This indicates a trend that a strong convexcurvature of the entrance side is useful for obtaining a good qualityfirst intermediate image with a small number of aspherical surfaces. Inthe first objective part 1710 of the embodiment shown in FIG. 32 anintermediate number of five aspheric surfaces is used in combinationwith an entrance surface of the first element (biconvex lens 1712)having moderate curvature (radius of curvature>300 mm). Providing anentry surface of the projection objective having no curvature (planarsurface) or weak curvature (e.g. value of radius of curvature>500 nm ormore) renders the objective relatively insensitive against pressurefluctuations of ambient pressure. As the number of aspheric surfaces isequal or less than the number of positive lenses in the first objectivepart of all three embodiments it can be seen that compact designs can beobtained when only positive lens elements are used and if a ratiobetween the number of lenses having refractive power and the number ofaspheric surfaces is smaller than 1.6.

The embodiments of FIG. 30 to 32 show that in the framework of apreferred design having a straight optical axis common to all objectiveparts and a catoptric second objective part it is possible to design therelay system on the entrance side of the objective (first objectivepart) with an axial length considerably smaller than the axial length ofthe third objective part. The axial length (measured between the objectsurface and the first intermediate image) may be less than 90% or lessthan 80% of the axial length of the third objective part (measuredbetween the second intermediate image and the image plane). Thisindicates that the design can be used with various different positionsof the second (catoptric or catadioptric) objective part between therefractive objective parts.

In the embodiments of FIGS. 30 to 32 the plano-convex lens closest tothe image plane, i.e. the last lens of the objective, is made of calciumfluoride. Since this material is less sensitive to radiation induceddensity variations (particularly compaction) the service life time ofthe objective maybe increased when compared to objectives having lastlenses made of fused silica. However, in immersion objectives designedfor operating with water based immersion liquids last lens elements ofcalcium fluoride are problematic since calcium fluoride is soluble inwater. Therefore, the life time of the system may be reduced. Therefore,a protection layer protecting the last lens element from degradationcaused by an aggressive immersion liquid may be useful. Suitableprotection layers are described, for example, in U.S. provisionalapplication 60/530,623 filed on Dec. 19, 2003 by the applicant, thedisclosure of which is incorporated herein by reference. In theembodiments of FIGS. 30 to 32 a thin plane parallel plate of fusedsilica having a thickness of 0.3 mm is adhered to the planar exitsurface of the plano-convex calcium fluoride lens by wringing. The planeparallel quartz glass plate providing the exit surface of the projectionobjective can be exchanged, if desired. Exchanging may be desired if thefused silica material is damaged due to high radiation load and/or ifcontamination and/or scratches on the fused silica protection plateoccur.

Using the embodiment of FIG. 32 as an example further characteristicfeatures of projection objectives according to the invention areexplained. To this end, a chief ray CR running from an outermost fieldpoint (furthest away from the optical axis AX) essentially parallel tothe optical axis and intersecting the optical axis at three consecutivepupil surface positions P1, P2, P3, each within one of the imagingobjective parts 1710, 1720, 1730, is drawn in bold line to facilitateunderstanding. The angle included between the optical axis AX and thechief ray CR at each position along the chief ray is denoted “chief rayangle” in the following. The chief ray CR is divergent (chief ray heightincreasing in light propagation direction) at the position of the firstintermediate image 1703. The increasing chief ray height after the firstintermediate image corresponds to a negative chief ray intersectionlength of the first objective part 1710 downstream of the firstintermediate image 1703. Here, the “chief ray intersection length” isdefined as an axial length between the position of the intermediateimage and the intersection point of a tangent to the chief ray CR at theintermediate image. The intersection point is positioned on the objectside of the first intermediate image within the first objective part1710. A negative chief ray intersection length relative to the firstintermediate image corresponds to a negative (virtual) exit pupil of thefirst objective part. In contrast, a convergent chief ray exists at thesecond intermediate image 1704, corresponding to a positive chief rayintersection length downstream of the second intermediate image, whichcorresponds to a real exit pupil existing downstream of the secondintermediate image. The real exit pupil of the second objective part1720 relative to the second intermediate image 1704 is thereforepositioned outside the third objective part 1730 (real exit pupil)beyond the image plane. The virtual exit pupil of the first objectivepart 1710 coincides with the real entrance pupil of the second objectivepart 1720. Given these conditions a projection objective is providedhaving at least two intermediate images, wherein one imaging objectivepart (here the catadioptric or catoptric second objective part disposedbetween a refractive first objective part and a refractive thirdobjective part) performs a real image formation between the first andsecond intermediate images wherein, in addition, a real entrance pupilis imaged into a real exit pupil. Since there is an accessible pupilsurface P1 within the refractive first objective part and anotheraccessible pupil surface P3 within the third objective part projectionobjectives of this type have two potential positions for placing anaperture stop to effectively define the numerical aperture used in theimaging process. Here, the term “accessible” refers to a potentialaperture stop position in a section of an objective part passed onlyonce by the light running through the projection objective.

Further, projection objectives according to preferred embodimentsdiscussed here, have three real pupil surfaces P1, P2, P3 between objectplane and image plane, wherein the maximum chief ray angle in one ofthese pupil surfaces is smaller than the object side numerical apertureand wherein in addition at least one of the following conditions isfulfilled: (1) The maximum marginal ray height in two of the three pupilsurfaces is at most 50% of the maximum marginal ray height in the thirdpupil surface (here the third pupil surface P3); (2) the maximum chiefray angle in two of the pupil surfaces is at least twice as large as amaximum chief ray angle in the third pupil surface; (3) a maximum chiefray angle in two of the pupil surfaces is at least twice as large as theobject side numerical aperture.

In the following, a number of embodiments are shown which are optimizedwith respect to the aspect of manufacturing and testing the asphericsurfaces used therein. In order to demonstrate one of the problemsarising during preparation of aspheric surfaces on lenses FIGS. 33( a)and 33(b) each show an enlarged partial view of a meridonal lens sectionthrough a conventional objective having a thin positive lens L having anaspheric entrance surface AS. In FIG. 33( a) a characteristic ray R1running along the periphery of the transmitted beam bundle and acharacteristic beam R2 running close to the optical axis of the opticalsystem are shown to demonstrate the optical action of the asphericallens L. In the conventional system CONV the aspheric surface AS isdesigned to act as a positive lens for rays passing close to the opticalaxis and as a negative lens for rays close to the periphery of the lightbeam (ray R1). In order to obtain this variation of refractive power inmeridional direction the aspheric surface has a positive curvature (C>0)in the area around the optical axis and a negative curvature (C<0) inthe peripheral region where ray R1 passes. An inflection point IPcharacterized by a local curvature C=0 is positioned between the convexsection (around the optical axis) and the concave section (at theperiphery). Although the local change of the sense of curvature obtainedthis way may be desirable from an optical point of view, inflectionpoints are critical when the surface finishing is considered since afinishing tool (schematically shown as tool T in FIG. 33( b)) having areasonable diameter for efficient surface polishing may havesubstantially non-uniform effect in the region around the inflectionpoint. Therefore, sufficient optical quality of aspherical surfaceshaving inflection points is difficult to obtain.

These problems can be avoided if the aspherical surface has noinflection point. The projection objective 1800 shown in FIG. 34(specification given in tables 34 and 34A) is designed such that none ofthe aspherical surfaces has an inflection point.

Another feature of aspheric surfaces identified by inventors as beingcritical from a manufacturing point of view is explained in connectionwith FIG. 35. The inventors have found that high optical quality ofaspheric surfaces can be obtained if extremal points (minima or maxima)on the surface shape of an aspheric surface outside the optical axis areavoided or, if that is not possible, if extremal points are only used onaspheric surfaces having an essentially flat basic shape. In FIG. 35 thesurface shapes of two aspheric surfaces AS1 and AS2 are shownschematically in terms of the function p(h), where p is measuredparallel to the optical axis (z-direction) and h is the height of asurface point, where the height corresponds to the radial distancebetween a surface point and the optical axis. Parameter p, as used here,denotes the axial separation of a plane normal to the optical axis andintersecting the relevant surface point to a plane parallel thereto andtouching the vertex V of the optical elements on the optical axis.

In that respect, an extremal point on an aspheric surface ischaracterized by the fact that the first derivative (characterizing theslope of the surface) given by

$\frac{\mathbb{d}p}{\mathbb{d}h} = 0$and that the second derivative

$\frac{\mathbb{d}^{2}p}{\mathbb{d}h^{2}} \neq 0$(here the second derivative describes the surface curvature). Therefore,the first asphere AS1 in FIG. 35 has a first extremal point EX11 and asecond extremal point EX12 having opposite signs of the secondderivative, whereas the second asphere AS2 has only one extremal pointEX21. In the definitions used here the vertex V of the optical surface(where h=0) is excluded from the considerations, since the vertex alwaysis an extremal point of rotational symmetric aspheric surfacesconsidered here.

In FIG. 35, the surface shape is depicted schematically between theoptical axis (h=0) and the outer periphery of an area of the surface,which is finished with a tool e.g. by polishing. This finishing area ischaracterized by a maximum height h_(max). The maximum area opticallyused in operation is generally smaller such that the optically utilizedradius is characterized by a maximum value h_(opt)<h_(max). The areaoutside the optically used area between the edge of that area and theedge of the optical component is denoted overrun region OR. This area isnormally used for mounting the optical elements. However, duringmanufacturing the overrun region has to be included into theconsideration regarding an optimum surface shape.

In the following it will be explained why extremal points on asphericsurfaces may be critical if optimum surface quality is desired. To thisend, a rotary polishing tool T having a reasonable sized diameter isoperating in the region of the first extremal point EX11. Depending onthe relative dimensions between the “valley” around the extremal pointEX11 and the tool T the area at the bottom of the concave valley may notto be polished sufficiently enough since the tool “bridges” the criticalbottom area most of the time. Therefore, the surface quality in theextremal point region may be different from the surface quality ofregions farther a way from the critical extremal point. On the otherhand, if the extremal point corresponds to a convex “hill” on theaspheric surface, this area may be polished stronger than thesurrounding area, which may also lead to irregularities of the surfacequality in the extremal point region. These problems can be avoided ifthe aspheric surface has no extremal points (with the exception of thenecessary extremal point at the vertex). Since the tool T will generallyextend beyond the maximum optically used area (at h_(opt)) when theperipheral region of the optically used area is treated, it is desirablethat extremal points are avoided also in the edge region OR.

On the other hand, aspheric surfaces having extremal points may bedesired to obtain certain variations of refractive power of an asphericsurface in meridonal direction. It has been found by the inventors thatextremal points can be acceptable from a manufacturing point of view ifthe extremal point is present on an optical surface having anessentially flat basic shape. For example, the aspheric surface may beformed on a flat side of a plano convex or a plano concave lens or on asurface of a plane parallel plate. Preferably, the absolute value of themaximum z-variation (p_(max)) of such surfaces having an extremal pointshould not exceed 0.5 mm, more preferably should be smaller than 0.25mm. The optical advantages of extremal points on aspheric surfaces canthus be obtained without significant irregularities in optical surfacequality.

In FIG. 36 an embodiment of a projection objective 1900 is shown whereall aspheric surfaces are free of extremal points outside the opticalaxis. The specification is given in tables 36 and 36A. If an asphericalsurface with an extremal point should be desired, this should be formedon an optical surface having an essentially flat basic shape, typicallyhaving a long radius with |r|>2000 mm.

FIGS. 37 and 38 show embodiments of projection objectives 2000, 2100designed according to the general construction given in FIG. 4, i.e.having a catoptric (purely reflective) second objective part 2020, 2120,respectively. Reference numerals for similar features/feature groups aresimilar, increased by 1800, 1900, respectively. The specifications aregiven in tables 37, 37A and 38, 38A. When designing these embodiments,special emphasis was placed on a balanced design having only fewcorrecting means, such as aspheres, and a moderate number of lenselements. In addition, a balanced distribution of refractive poweramongst different parts of the projection objective contributes to aharmonic beam deflection throughout the optical system. The harmonicgeneral construction makes the designs less sensitive againstmaladjustment of single lens elements or lens groups and facilitatesincorporation of manipulators for dynamically influencing theperformance of the optical system, e.g. by moving of single lenses orlens groups in axial direction, perpendicular to the optical axis and/orby tilting.

In the embodiment of FIG. 37 only ten aspheric surfaces are used, which,according to the considerations given above, can be manufactured andtested in a relatively cost-effective way. The last optical element(plano-convex lens 2050 immediately ahead of the image plane 2002) ismade of fused silica, having a thickness at the edge of the optical usedarea of about 23 mm. The overall wave front error is reduced to 1.6 mλ.All lenses are made of fused silica, about 60 kg blanc material of fusedsilica being necessary to make all lenses. In contrast, the plano-convexlens 2150 forming the last element of the embodiment of FIG. 38 is madeof calcium fluoride, which material is less prone to radiation induceddensitiy variations (compaction and rarefaction). Using 12 asphericsurfaces which can be manufactured with moderate effort it is possibleto obtain a performance characterized by a wave front error of 2.1 mλ.An overall blanc mass of about 63 kg fused silica and 1.5 kg calciumfluoride is used for this embodiment.

In FIGS. 39 and 40 two embodiments are shown which are characterized,amongst other features, by the fact that the first objective partimaging the object field into the first intermediate image is acatadioptric objective part including one concave mirror and oneadditional mirror having a curved mirror surface, where the curvedmirror surfaces of the concave mirror and the additional mirror arefacing each other such that the first objective part can serve as arelay system in projection objectives of preferred embodiments havingone straight common optical axis for all objective parts.

The specification of the projection objective 2200 shown in FIG. 39 isgiven in table 39 and 39A (aspheric constants). The system is designedfor 193 nm for using water (n=1.436677) as an immersion fluid. Alllenses except the last image side optical element (plano-convex lens2260 made of calcium fluoride) are made of fused silica. An image sidenumerical aperture NA=1,2 is obtained at an image field size 26 mm·5.5mm arranged 21,8 mm outside the optical axis. The track length (objectimage distance) is 1125 mm.

A first, catadioptric objective part 2210 is designed for creating afirst intermediate image 2203. The second, catadioptric objective part2220 designed for creating the second intermediate image 2204 from thefirst intermediate image includes a first concave mirror 2221 and asecond concave mirror 2222 having concave mirror surfaces facing eachother and defining an intermirror space, and a positive meniscus lens2229 having an aspheric, concave entrance surface immediately downstreamof the first intermediate image. A dioptric third objective part 2230 isdesigned for imaging the second intermediate image onto the image plane2202, whereby a thin layer of water (immersion fluid I) is transited bythe radiation. An aperture stop A is positioned in the third objectivepart.

The first objective part 2210 includes, in that optical sequence fromthe object field, a biconvex positive lens 2211 having a stronglyaspheric entrance surface and an aspheric exit surface, a positivemeniscus lens 2212 having an aspheric concave entrance surface and aspherical exit surface, and a concave mirror 2213 having an object sideconcave mirror surface and being arranged eccentrically to the opticalaxis, but intersecting the optical axis 2205. The radiation reflectedback from the concave mirror transits the positive meniscus 2212 in theopposite direction and mostly on the opposite side of the optical axiscompared to the radiation passing between object field and concavemirror 2213. An additional mirror 2214 with convex mirror surface isprovided by an off-axis mirror coating on the image side surface ofconvex lens 2211. The radiation passes the positive meniscus 2212 athird time prior to formation of the first intermediate image.Therefore, the lens 2212 is used three times at laterally offset lensregions.

Whereas concave mirror 2213 is positioned optically near a pupilsurface, convex mirror 2214 is arranged optically near to theintermediate image 2203. Therefore, field aberrations and pupilaberrations can be corrected separately by selecting according shapes ofthe concave and convex mirrors 2213, 2214. This allows to adjust thecorrection status of the first intermediate image 2203 such thatresidual imaging errors can be compensated by the two objective partsfollowing downstream of the first intermediate image including thecatadioptric second objective part 2220.

The first objective part is designed as an enlarging system having asignificant magnification |β₁|>1. The first intermediate image 2203 ispositioned geometrically near the closest edge of convave mirror 2213outside the intermirror space defined between the concave mirrors 2221and 2222 of the second objective part, whereby the optical distancebetween the first intermediate image and the first concave mirror 2221becomes rather large, whereas the optical distance between the secondconcave mirror 2222 and the second intermediate image 2204 becomesrather small. Therefore, the sizes of the concave mirrors of the secondobjective part differ significantly, the optically used area of thefirst concave mirror being about twice as large as the correspondingarea on the second concave mirror. Both concave mirrors 2221 and 2222are positioned outside the optical axis such that the optical axis doesnot intersect the optically used mirror surfaces. Since the concavemirrors are positioned at different positions with regard to the ratiobetween the ray heights of principal ray and marginal ray, thecorrecting effects of the concave mirrors on different imaging errorscan be distributed between the two catadioptric objective parts 2210 and2220.

The projection objective 2300 shown in FIG. 40 is designed as a “solidimmersion lens” having a finite image side working distance in the orderof the design wavelength λ of the system (193 nm) or fractions thereof(e.g. λ/2 or λ/4 or below). Evanescent fields exiting from the exitsurface of the last lens can be used for imaging. The system is adaptedfor optical near field lithography. Reference is made to German patentapplication DE 10332112.8 filed on Jul. 9, 2003 by the applicant, wherepreferred conditions for optical near field lithography are specified.No liquid immersion fluid is necessary in this case for obtaining animage side numerical aperture NA>1. In the embodiment NA=1.05 for aimage field size 22 mm ˜4.5 mm, where the image field is arranged 39 mmoff-axis. The overall reduction ratio is 1:4, the track length is 1294.4mm. In this design, all lenses including the last, image sideplano-convex lens 2360 are made of fused silica. The specification isgiven in tables 40 and 40A (aspheric constants).

The first, catadioptric objective part 2310 designed for creating thefirst intermediate image 2303 from the object field on an enlarged scaleincludes, in that sequence along the optical path, a biconvex positivelens 2311 having an aspheric entrance surface and a spherical exitsurface, a concave mirror 2312, having an object side mirror surface, aconvex mirror 2313 having slightly curved convex mirror surface facingthe concave mirror and being formed by a mirror coating on an elevatedsection of the image side lens surface of lens 2311, a bisphericalpositive meniscus lens 2314 having a concave entry side, and a biconvexpositive lens 2315 having a strongly aspheric exit surface positioned inthe immediate vicinity of the first intermediate image 2303.

The second, catadioptric objective part 2320 picks up the firstintermediate image 2303 and forms the second intermediate image 2304located geometrically within an intermirror space defined by the firstconcave mirror 2321 and the second concave mirror 2322 of the secondobjective part. The second objective part further includes negativemeniscus lenses 2325, 2326 each positioned immediately ahead of themirror surface of an associated concave mirror 2321 and 2322,respectively. A strong correcting effect on longitudinal chromaticaberration (CHL) can be obtained this way. A biconvex positive lens 2328having an object side aspheric surface and an image side sphericalsurface extents across the entire diameter of the projection objectivebetween the first and second concave mirrors 2321, 2322 and is passedthree times by the radiation, once between the first intermediate imageand the first concave mirror, a second time between the first and thesecond concave mirrors 2321, 2322 and a third time between the secondconcave mirror 2322 and the second intermediate image 2304.

In this embodiment, all three concave mirrors 2312, 2321, 2322 arepositioned optically remote from the pupil surface of the projectionobjective. Also, the almost flat convex mirror 2313 is positionedclearly outside the first pupil surface P1. The design allows todistribute the correcting effects of catadioptric objective partsbetween the first and the second objective part.

The invention allows to manufacture catadioptric projection objectiveswhich, in many respects of practical implementation into a projectionexposure apparatus, have similar properties to conventional refractiveprojection objectives, whereby a change over between refractive systemsand catadioptric systems is greatly facilitated. Firstly, the inventionallows to built catadioptric projection objectives having one straight(unfolded) optical axis. Further, an object field disposed on one sideof the optical axis may be imaged into an image field disposed on theopposite side of the optical axis, i.e. the imaging is performed with“negative magnification”. Thirdly, the objectives can be designed tohave isotropic magnification. Here, the term “isotropic magnification”refers to an image formation without “image flip”, i.e. without a changeof chirality between object field and image field. With other words,features on the reticle described in a right handed coordinate systemcan be described in a similar right handed coordinate system in theimage. The negative isotropic magnification is present in both x- andy-directions perpendicular to the optical axis. This allows to use thesame type of reticles also used for imaging with refractive projectionobjectives. These features facilitate implementation of catadioptricprojection objectives according to the invention in conventionalexposure apparatus designed for refractive projection objectives sinceno major reconstructions are required, for example, at the reticle- andwafer-stages. Also, reticles designed for use with refractive projectionobjectives can in principle also be used with catadioptric projectionobjectives according to the invention. Considerable cost savings for theend user can be obtained this way.

As mentioned earlier, the invention allows to built catadioptricprojection objectives with high numerical aperture, particularlyallowing immersion lithography at numerical apertures NA>1, that can bebuilt with relatively small amounts of optical material. The potentialfor small material consumption is demonstrated in the followingconsidering parameters describing the fact that particularly compactprojection objectives can be manufactured.

Generally, the dimensions of projection objectives tend to increasedramatically as the image side numerical aperture NA is increased.Empirically it has been found that the maximum lens diameter Dmax tendsto increase stronger than linear with increase of NA according toD_(max)˜NA^(k), where k>1. A value k=2 is an approximation used for thepurpose of this application. Further, it has been found that the maximumlens diameter D_(max) increases in proportion to the image field size(represented by the image field height Y′). A linear dependency isassumed for the purpose of the application. Based on theseconsiderations a first compactness parameter COMP1 is defined as:COMP 1=D _(max)/(Y′·NA ²).

It is evident that, for given values of image field height and numericalaperture, the first compaction parameter COMP1 should be as small aspossible if a compact design is desired.

Considering the overall material consumption necessary for providing aprojection objective, the absolute number of lenses, N_(L) is alsorelevant. Typically, systems with a smaller number of lenses arepreferred to systems with larger numbers of lenses. Therefore, a secondcompactness parameter COMP2 is defined as follows:COMP 2=COMP 1·N _(L)

Again, small values for COMP2 are indicative of compact optical systems.

Further, projection objectives according to the invention have at leastthree objective parts for imaging an entry side field plane into anoptically conjugate exit side field plane, where the imaging objectiveparts are concatenated at intermediate images. Typically, the number oflenses and the overall material necessary to build an projectionobjective will increase the higher the number Nop of imaging objectiveparts of the optical system is. It is desirable to keep the averagenumber of lenses per objective part, N_(L)/N_(OP), as small as possible.Therefore, a third compactness parameter COMP3 is defined as follows:COMP 3=COMP 1·N _(L) /N _(OP).

Again, projection objectives with low optical material consumption willbe characterized by small values of COMP3.

Table 41 summarizes the values necessary to calculate the compactnessparameters COMP1, COMP2, COMP3 and the respective values for theseparameters for each of the systems presented with a specification table(the table number (corresponding to the same number of a figure) isgiven in column 1 of table 41). Therefore, in order to obtain a compactcatadioptric projection objective having at least one concave mirror andat least three imaging objective parts (i.e. at least two intermediateimages) at least one of the following conditions should be observed:COMP1<11

Preferably COMP1<10,8, more preferably COMP1<10,4, even more preferablyCOMP1<10 should be observed.COMP2<300

Preferably COMP2<280, more preferably COMP2<250, even more preferablyCOMP2<230 should be observedCOMP3<100

Preferably COMP3<90, more preferably COMP3<80, even more preferablyCOMP3<75 should be observed.

Table 41 shows that preferred embodiments according to the inventiongenerally observe at least one of these conditions indicating thatcompact designs with moderate material consumption are obtainedaccording to the design rules laid out in this specification.

If desired, various types of filling gases can be used to fill the emptyspaces between the optical elements of the projection objectives. Forexample, air or nitrogen or helium can be used as filling gas dependingor desired properties of the embodiment.

Favorable embodiments may be characterized by one or more of thefollowing conditions. The first objective part is preferably designed asan enlarging system, preferably having a magnification β₁ in the range1<|β₁|<2.5. This ensures low NA at the first intermediate image andhelps to avoid vignetting problems. |β₁| may be 1:1 or may be slightlysmaller, e.g. 0.8≦|β₁β≦1. The second objective part is preferablydesigned as a system having near to unit magnification, i.e. almost nomagnification or reduction. Particularly, the second objective part maybe designed as a system having a magnification β₂ in the range0.4<|β₂|<1.5, more preferably in the range 0.8<β₂|<1.25 or in the range0.9<|β₂|<1.1. The third objective part preferably has a reducingmagnification |β₃|<1. The entire projection objective has amagnification β where β=β₁·β₂·β₃. The second intermediate image may havea size larger than the image size.

Preferably, both the first intermediate image and the secondintermediate image are located geometrically within the intermirrorspace between the first concave mirror and the second concave mirror.They may be located geometrically in a middle region centered around themidpoint between the two concave mirrors within the intermirror spacebetween the first concave mirror and the second concave mirror, whereinthe middle region extends in a space having an axial extension ≦90% ofan axial distance between the vertices of the curvature surfaces of thefirst and second concave mirror.

If d is the distance on the optical axis between the two concavemirrors, d1 is the distance on the optical axis between the firstintermediate image and the first concave mirror and d2 is the distanceon the optical axis between the second concave mirror and the secondintermediate image, then the relations: 0.5 d/2<d1<1.5 d/2 and 0.5d/2<d2<1.5 d/2 are preferably satisfied. The distances mentioned aboveare to be measured along the optical axis, which may be folded.Preferably, a chief ray of the most off axial field point intersects theoptical axis in the same described region between d/4 and 3d/4 betweenthe two concave mirrors in the vicinity of the location of the firstintermediate image. Pupil positions are then remote from mirrors.

It has been found useful to design the optical system such that at leastone intermediate image, preferably all intermediate images arepositioned such that there exists a finite minimum distance between theintermediate image and the next optical surface, which is a mirrorsurface in most embodiments. If a finite minimum distance is maintainedit can be avoided that contaminations or faults on or in the opticalsurface are imaged sharply into the image plane such that the desiredimaging of a pattern is disturbed. Preferably, the finite distance isselected depending on the numerical aperture of the radiation at theintermediate image such that a sub-aperture (footprint of a particularfield point) of the radiation on the optical surface next to theintermediate image has a minimum diameter of at least 3 mm or at least 5mm or at least 10 mm or at least 15 mm. It is obvious from the figuresand tables that these conditions are easily met by most or allembodiments in relation to the distance between an intermediate imagewithin the intermirror space and the mirror surface arranged opticallynearest to the intermediate image. Embodiments having intermediateimages arranged in the middle region between the concave mirrors areparticularly well-natured in this respect.

All transparent optical components of the embodiments described above,with a possible exception at the last image side lens, which may be ofcalcium fluoride, are fabricated from the same material, namely fusedsilica (SiO₂). However, other materials, in particular, crystallinealkaline earth metal fluoride materials, that are transparent at theworking wavelength may also be used. At least one second material mayalso be employed in order to, for example, assist correction forchromatic aberration, if necessary. Of course, the benefits of theinvention may also be utilized in the case of systems intended for useat other wavelengths, for example, at 248 nm or 157 nm.

Some or all conditions are met by some or all embodiments describedabove.

It is to be understood that all systems described above may be completesystems for forming a real image (e.g. on a wafer) from a real object.However, the systems may be used as partial systems of larger systems.For example, the “object” for a system mentioned above may be an imageformed by an imaging system (relay system) upstream of the object plane.Likewise, the image formed by a system mentioned above may be used asthe object for a system (relay system) downstream of the image plane.

The above description of the preferred embodiments has been given by wayof example. From the disclosure given, those skilled in the art will notonly understand the present invention and its attendant advantages, butwill also find apparent various changes and modifications to thestructures and methods disclosed. It is sought, therefore, to cover allchanges and modifications as fall within the spirit and scope of theinvention, as defined by the appended claims, and equivalents thereof.

The contents of all the claims is made part of this description byreference.

TABLE 4 J 205 Surface Radius Thickness Material ½ Diam. 1 151.64711839.665046 SIO2 86.120 2 −1368.552447 69.197177 85.246 3 158.99278315.145647 SIO2 75.907 4 206.923841 38.570349 73.675 5 97.67887240.014335 SIO2 69.070 6 −5437.460665 6.811056 64.924 7 138.80150916.000000 SIO2 53.028 8 573.226631 49.296968 47.448 9 −57.86217714.263643 SIO2 47.630 10 −84.936107 112.509668 57.274 11 −413.25047739.459821 SIO2 106.087 12 −160.648303 5.882304 109.942 13 797.27793334.177152 SIO2 115.560 14 −430.752073 244.699332 115.661 15 −199.609067−204.699112 REFL 134.925 16 157.344690 246.319295 REFL 109.289 17862.084499 22.994398 SIO2 70.571 18 −419.719089 18.726730 69.767 19−150.816336 15.000000 SIO2 67.991 20 131.971848 26.143914 70.182 21−1567.196375 19.813697 SIO2 72.656 22 −217.593380 44.615314 76.740 23−2829.863046 39.782748 SIO2 103.845 24 −203.824432 1.000000 107.411 25524.684787 25.000000 SIO2 114.960 26 902.564365 1.000000 115.451 27530.781146 38.825378 SIO2 116.178 28 −473.210631 1.000000 116.066 290.000000 0.000000 113.556 30 322.948582 29.038119 SIO2 113.791 31−2580.799702 1.000000 113.022 32 512.569763 30.174661 SIO2 110.876 33−677.235877 1.000000 109.014 34 106.347684 68.066974 SIO2 90.295 35−1474.944139 0.999719 77.627 36 54.296611 42.467148 CAF2 45.513 370.000000 3.000000 H2O 20.998

TABLE 4A Aspherical Constants SRF 2 3 8 12 15 16 K 0 0 0 0 0 0 C1  3.477033e−08 −6.813990e−09   3.966411e−07   4.439638e−09  1.447452e−08   4.549402e−08 C2 −4.731536e−13 −8.621629e−12−4.007014e−12   1.686758e−13   2.261476e−13 −5.067161e−12 C3  2.796504e−17 −2.762099e−16   7.436146e−15   8.011815e−19  2.580774e−18   2.777252e−16 C4 −6.649516e−22 −9.615951e−21  1.520683e−18   9.201114e−22   1.377485e−22 −3.138154e−20 C5−2.829603e−25 −5.726076e−24 −9.949722e−22 −4.382820e−26 −3.426657e−27  2.350745e−24 C6   1.815473e−29   3.251913e−28   7.293926e−25  1.782591e−30   1.279942e−31 −7.599030e−29 SRF 17 19 22 30 33 35 K 0 00 0 0 0 C1   1.523352e−07   1.162948e−07 −1.982157e−08   1.201912e−08  1.147736e−08   9.136462e−08 C2 −5.763168e−12 −6.089203e−13−5.382822e−13 −1.705175e−13   4.202468e−13 −5.545932e−13 C3  7.475933e−17 −1.025185e−16   1.200748e−17 −8.926277e−17 −1.260714e−17  1.560631e−16 C4   6.617515e−20   2.192456e−20 −2.867314e−21−4.435922e−21 −2.591704e−21 −3.601282e−20 C5 −2.264827e−24 −5.792211e−25  1.105789e−25   8.175482e−25   4.606100e−26   8.986671e−25 C6−1.064596e−28   5.642674e−28 −3.023003e−31 −2.371799e−29   9.707119e−30  3.847941e−29

TABLE 7 J 206 Surface Radius Thickness Material ½ Diam. 1 0.0000000.000000 76.473 2 196.748623 27.263207 SIO2 81.548 3 1380.47854727.173549 81.569 4 148.118896 29.558580 SIO2 83.220 5 985.95250945.383760 81.731 6 587.017766 26.742601 SIO2 74.752 7 −268.6876265.952675 73.075 8 121.069967 20.000000 SIO2 59.416 9 338.97229415.471207 55.151 10 123.398576 16.000000 SIO2 42.222 11 493.23919638.514952 36.268 12 −56.743953 79.995013 SIO2 40.070 13 −98.46520460.825433 74.618 14 −3097.977653 27.304241 SIO2 102.327 15 −295.5267623.782338 104.658 16 271.693311 37.763865 SIO2 112.015 17 −3936.28948325.000000 112.208 18 162.629416 202.628857 112.852 19 −195.636303−202.628857 REFL 119.680 20 162.629416 202.628857 REFL 104.093 21−195.636303 44.391294 76.907 22 −1229.055417 33.250147 SIO2 83.109 23−160.024467 37.552215 84.448 24 −246.047659 15.000000 SIO2 74.951 25134.897718 28.252914 72.042 26 −768.808515 15.000000 SIO2 73.163 27−355.461110 71.356200 76.177 28 −3425.435334 32.788842 SIO2 102.647 29−255.172254 10.903212 105.332 30 695.872359 30.470261 SIO2 110.205 31−625.346253 9.352817 110.381 32 0.000000 −8.352817 108.884 33 329.99010140.669818 SIO2 110.434 34 −427.546014 1.000000 110.052 35 158.67846645.978153 SIO2 102.564 36 378.976619 1.000000 95.391 37 108.60600871.612816 SIO2 81.775 38 526.305326 1.000000 54.478 39 52.23689836.413852 CAF2 39.598 40 0.000000 3.000000 H2O 19.842

TABLE 7A Aspherical Constants SRF 4 11 15 18 19 K 0 0 0 0 0 C1−6.330577e−08   3.463909e−07   1.324809e−08 −7.037790e−09   2.310646e−08C2 −3.872322e−12 −2.533709e−11   2.103578e−13 −2.219032e−13  3.623856e−13 C3   1.663761e−17   3.527218e−14   3.059213e−18−7.410203e−18   5.711204e−18 C4 −2.340311e−20 −2.199769e−17−5.028780e−23 −1.155705e−22   8.453421e−23 C5   1.375334e−24−1.507925e−21   1.624941e−26 −8.984707e−27   1.508061e−27 C6−1.682943e−29   5.496658e−24 −6.281302e−31 −1.590542e−31   1.239941e−31SRF 22 24 27 34 36 38 K 0 0 0 0 0 0 C1   6.335247e−08   3.536885e−08  8.583557e−08   2.169817e−08 −1.524001e−08   1.877887e−07 C2−1.090600e−11   9.732363e−12   3.629209e−12 −5.404878e−13   1.625696e−12  1.445239e−11 C3   2.432505e−16 −1.879646e−16 −8.012301e−17  5.551093e−17 −3.076521e−16   1.060456e−16 C4 −1.490760e−21  1.841476e−20   5.223547e−20 −2.305595e−21   8.708326e−21  3.470869e−19 C5   1.908731e−24 −2.885890e−24 −9.160836e−24  4.260803e−26   4.665020e−25 −6.424228e−23 C6 −1.282225e−28  2.916860e−28   1.028273e−27 −9.442220e−32 −2.136828e−29   1.397331e−26

TABLE 8 J 201 Surface Radius Thickness Material ½ Diam. 1 0.0000000.000000 77.084 2 144.715774 34.413396 SIO2 85.539 3 1168.82083842.714222 84.636 4 137.626538 26.913912 SIO2 78.160 5 231.76869625.969904 74.133 6 −256.723584 9.491982 SIO2 73.679 7 −300.09961924.637606 73.830 8 95.378233 35.795212 SIO2 66.319 9 2978.1567446.137057 62.554 10 113.175934 18.340535 SIO2 50.838 11 791.56688342.223464 45.085 12 −57.334745 47.676082 SIO2 42.772 13 −104.05764585.668623 64.264 14 −747.828120 23.558823 SIO2 98.262 15 −237.78002911.502675 100.729 16 466.711415 38.824036 SIO2 109.480 17 −377.47370839.986102 109.791 18 160.832778 201.116223 111.102 19 −190.162844−201.116223 REFL 125.335 20 160.832778 201.116223 REFL 106.939 21−190.162844 40.087040 74.503 22 −429.676099 17.543012 SIO2 77.631 23−222.069915 45.151970 78.588 24 −438.919401 16.685064 SIO2 75.545 25125.893773 22.634903 73.362 26 706.231560 15.535140 SIO2 74.562 27−483.323705 69.793709 76.473 28 −1219.864506 31.389217 SIO2 101.495 29−226.588128 6.763552 104.174 30 443.080071 40.992305 SIO2 110.047 31−556.882957 4.990520 109.849 32 0.000000 −3.144971 107.701 33 274.80357729.023782 SIO2 108.934 34 −6968.358008 0.969032 108.499 35 213.74867046.817088 SIO2 106.084 36 −8609.746220 0.945349 101.542 37 114.82126164.641285 SIO2 84.961 38 −4598.248046 0.926317 66.788 39 53.64779240.301900 CAF2 42.988 40 0.000000 3.000000 H2O 20.327

TABLE 8A Aspherical Constants SRF 4 11 15 18 19 K 0 0 0 0 0 C1−5.141395e−08   4.483031e−07   1.313620e−08 −7.985633e−09   2.017668e−08C2 −5.556822e−12 −9.959839e−12   3.644835e−13 −2.642498e−13  3.361249e−13 C3 −2.754499e−16   5.082134e−15   5.949608e−18−6.856089e−18   4.310554e−18 C4 −1.253113e−20   2.578467e−18  5.732895e−22 −5.142965e−22   1.686493e−22 C5 −4.228497e−24−3.461879e−21 −2.284813e−26   1.912150e−26 −3.551936e−27 C6  2.490029e−28   1.628794e−24   8.340263e−31 −1.470786e−30  2.057764e−31 SRF 22 24 27 34 36 38 K 0 0 0 0 0 0 C1   4.549402e−08  1.523352e−07   1.162948e−07 −1.982157e−08   1.201912e−08  1.148008e−07 C2 −5.067161e−12 −5.763168e−12 −6.089203e−13−5.382822e−13 −1.705175e−13 −5.056506e−13 C3   2.777252e−16  7.475933e−17 −1.025185e−16   1.200748e−17 −8.926277e−17   1.189381e−16C4 −3.138154e−20   6.617515e−20   2.192456e−20 −2.867314e−21−4.435922e−21 −1.274117e−20 C5   2.350745e−24 −2.264827e−24−5.792211e−25   1.105789e−25   8.175482e−25 −3.981271e−24 C6−7.599030e−29 −1.064596e−28   5.642674e−28 −3.023003e−31 −2.371799e−29  3.798968e−28

TABLE 16 NA = 1.2, β = 0.25 Field a b c 26 5 4.75 WL 193.3 nm SILUV1.56049116 CAFUV 1.50110592 H2OV 1.4368 Surface Radius ThicknessMaterial ½Diam. Type 0 0.000000000 31.999475127 AIR 65.000 1133.894287787 14.995217082 SILUV 84.778 2 127.681095498 25.597460396 AIR82.945 3 402.041163143 34.247197246 SILUV 84.808 4 −292.7952484880.996612226 AIR 85.527 5 −865.792789804 19.686989978 SILUV 84.845 6−194.300017249 0.997731584 AIR 84.746 7 166.499926718 34.205033740 SILUV81.167 8 −3411.356708300 0.997606594 AIR 78.713 9 108.52846306916.234112594 SILUV 67.657 10 101.654206518 13.668730583 AIR 60.671 11161.992336120 14.997158671 SILUV 58.598 12 2789.766305580 83.396846659AIR 54.555 13 −51.475183292 14.997760255 SILUV 49.489 14 −64.4803780160.998543606 AIR 60.882 15 −523.449669764 57.729408261 SILUV 91.022 16−124.018124564 0.995673329 AIR 97.756 17 213.269322132 24.422343766SILUV 111.322 18 368.130596294 326.268973067 AIR 110.123 19−161.615015336 14.998434538 SILUV 131.765 20 −312.345980956 31.430358591AIR 153.714 21 −214.602996812 −31.430358591 AIR 155.986 REFL 22−312.345980956 −14.998434538 SILUV 149.921 23 −161.615015336−238.077915164 AIR 116.301 24 149.287132498 −14.998202246 SILUV 103.16925 317.538289321 −33.202694396 AIR 133.495 26 186.422421298 33.202694396AIR 137.843 REFL 27 317.538289321 14.998202246 SILUV 136.305 28149.287132498 324.504871734 AIR 116.434 29 304.025895186 51.634530337SILUV 102.695 30 −321.237280055 36.471806645 AIR 101.284 31−141.718556476 14.999755253 SILUV 84.799 32 104.217593104 30.610688625AIR 74.074 33 581.141203674 15.015591714 SILUV 75.850 34 −637.26689924322.019923725 AIR 78.058 35 −222.755672262 20.582750922 SILUV 80.475 36−149.492790226 0.999906680 AIR 84.782 37 260.619344057 25.604090348SILUV 101.752 38 1033.029187190 30.684011762 AIR 102.212 39181.295872049 62.489568781 SILUV 109.856 40 −319.175759184 1.032697080AIR 108.616 41 0.000000000 24.649355928 AIR 99.183 42 241.32224626226.360109939 SILUV 88.680 43 −555.614152728 2.010445644 AIR 85.697 4477.526002487 41.372376482 SILUV 67.268 45 494.197664171 0.978420324 AIR60.833 46 46.187199269 35.625423750 CAFUV 39.405 47 0.0000000002.999559725 H2OV 20.942 48 0.000000000 0.000000000 AIR 16.250

TABLE 16A Aspherical Constants Surface K C1 C2 C3 3 0.00000000e+000−8.36067621e−008   2.12798795e−011 −1.45207564e−015 6 0.00000000e+000  7.69835587e−008   2.07985891e−012   1.16482389e−016 7 0.00000000e+000  1.36850714e−007 −9.44752603e−012 −1.50977238e−016 12 0.00000000e+000  7.53715484e−007 −6.61209701e−011   4.22074183e−015 16 0.00000000e+000−5.85261742e−008   7.70941737e−013 −1.40836094e−016 29 0.00000000e+000  9.56507182e−008 −2.16638529e−012 −1.23753850e−017 31 0.00000000e+000  1.85417093e−007 −2.24667567e−012   6.93769095e−017 34 0.00000000e+000  1.66095759e−007   2.43350203e−012   8.88822140e−017 39 0.00000000e+000−3.25790615e−009 −2.00206347e−012   4.31870304e−017 42 0.00000000e+000−5.33787564e−008   2.40117270e−012   3.20136118e−016 43 0.00000000e+000  1.13532739e−007 −5.93286761e−012   1.32296454e−015 45 0.00000000e+000  8.97031378e−008   2.47066509e−011 −2.77876411e−016 Surface C4 C5 C6 3  7.63154357e−020   2.95348560e−024 −3.46561258e−028 6 −4.80737790e−021  5.59439946e−024 −1.29197249e−028 7 −5.84681939e−020   7.86623559e−024−7.24516725e−028 12 −8.02992365e−019 −7.38686026e−022   1.22771230e−02516   6.45911985e−021 −3.82872278e−025   4.17640461e−031 29  2.58232933e−022 −6.80943505e−025   3.02935682e−029 31  6.79498891e−020 −6.82812342e−024   2.20970580e−028 34  2.60945386e−020 −3.60666201e−024   5.36227764e−028 39 −2.48544823e−021  5.50166118e−026 −3.31463292e−031 42   9.55299044e−021 −9.27935397e−024  8.13460411e−028 43 −1.88960302e−019   1.04299856e−023  1.69382125e−028 45 −7.08589002e−019   1.20774587e−022 −7.67132589e−027

TABLE 17 NA = 1.2, β= 0.25 Field a b c 26 5 4.75 WL 193.3 nm SILUV1.56049116 CAFUV 1.50110592 H2OV 1.438 Surface Radius Thickness Material½Diam. Type 0 0.000000000 31.997721704 AIR 65.000 1 579.46450613920.317824521 SILUV 74.592 2 −577.479988552 0.999475036 AIR 75.821 32572.370914820 28.040565960 SILUV 76.612 4 243.390586919 11.985977074AIR 79.119 5 500.676303821 43.989139515 SILUV 80.893 6 −155.06404411821.184157632 AIR 82.707 7 1381.321630200 18.191562266 SILUV 75.159 8−393.944847792 0.998449340 AIR 74.340 9 87.946501567 40.892320851 SILUV65.550 10 99.239178252 25.553101192 AIR 52.382 11 209.13814091315.063951314 SILUV 45.950 12 −601.200979555 66.005892131 AIR 42.845 13−55.332841330 14.999477956 SILUV 50.547 14 −72.577526567 1.163693447 AIR62.349 15 −346.873498438 34.446292165 SILUV 80.990 16 −150.4206973832.645359711 AIR 86.680 17 611.326207207 44.474569849 SILUV 99.391 18−228.818841769 265.128541011 AIR 100.925 19 −190.727371287 15.000448317SILUV 108.586 20 −237.320724749 14.700965847 AIR 118.645 21−194.872786703 −14.700965847 AIR 120.611 REFL 22 −237.320724749−15.000448317 SILUV 116.199 23 −190.727371287 −195.428248584 AIR 100.83024 190.727371287 −15.000448317 SILUV 104.448 25 237.320724749−14.700965847 AIR 120.847 26 194.872786703 14.700965847 AIR 124.569 REFL27 237.320724749 15.000448317 SILUV 122.685 28 190.727371287266.167203345 AIR 111.392 29 315.808627637 45.375871773 SILUV 95.944 30−367.849317765 64.350407265 AIR 94.229 31 −123.002265506 14.998717744SILUV 70.954 32 113.714722161 32.318363032 AIR 68.389 33 −990.74935141721.237444356 SILUV 71.838 34 −292.571717802 35.154029607 AIR 78.053 35−18220.224013700 40.604404749 SILUV 103.420 36 −201.0280207041.097799815 AIR 107.104 37 366.725287540 37.745092677 SILUV 119.548 38−961.362776974 0.999856805 AIR 119.749 39 338.337923773 38.019811036SILUV 118.590 40 −1026.771599840 −1.410077329 AIR 117.118 41 0.00000000012.743520660 AIR 115.541 42 280.022380007 19.482737236 SILUV 110.210 431517.149279230 1.197846646 AIR 108.733 44 719.327066326 32.079810786SILUV 107.695 45 −474.571764529 2.724748590 AIR 105.913 46 89.47999201448.063302904 SILUV 75.467 47 364.001398221 2.359587817 AIR 64.121 4852.126874613 39.040570663 CAFUV 42.333 49 0.000000000 2.999196815 H2OV20.183 50 0.000000000 0.000000000 AIR 16.250

TABLE 17A Aspherical Constants Surface K C1 C2 C3 6 0.00000000e+000−1.15035308e−009   6.18896918e−013 −4.28285081e−016 7 0.00000000e+000−1.72652480e−008 −3.70258486e−014 −1.25882856e−015 12 0.00000000e+000  3.77928406e−007   1.46912216e−011   2.33469503e−015 16 0.00000000e+000−6.96857458e−008 −2.84037647e−012   2.05085140e−017 19 0.00000000e+000−2.08753341e−008 −3.76211193e−013 −1.18384407e−017 23 0.00000000e+000−2.08753341e−008 −3.76211193e−013 −1.18384407e−017 24 0.00000000e+000  2.08753341e−008   3.76211193e−013   1.18384407e−017 28 0.00000000e+000  2.08753341e−008   3.76211193e−013   1.18384407e−017 29 0.00000000e+000  7.78624253e−008 −5.29798090e−013   3.91516327e−018 31 0.00000000e+000  4.28231334e−008   1.84180203e−011   2.69407820e−017 34 0.00000000e+000  1.06085944e−007   5.27851125e−012   1.44463148e−016 42 0.00000000e+000−4.37269250e−008 −1.57509731e−012   8.65198568e−019 45 0.00000000e+000−9.157705516−009 −5.99358306e−014 −2.27293408e−016 47 0.00000000e+000  6.18789306e−008   2.40430885e−011 −5.44722370e−015 Surface C4 C5 C6 6  4.88391880e−021   3.14518856e−024 −2.05304958e−028 7   1.13451047e−019−1.35997879e−023   1.27061565e−027 12 −6.54678942e−018   3.46881149e−021−5.35085168e−025 16 −1.26467485e−020   4.46161412e−025 −4.85676248e−02919 −1.88960591e−021   1.06203954e−025 −5.85068978e−030 23−1.88960591e−021   1.06203954e−025 −5.85068978e−030 24   1.88960591e−021−1.06203954e−025   5.85068978e−030 28   1.88960591e−021 −1.06203954e−025  5.85068978e−030 29 −1.04724068e−020   6.70919693e−025 −2.39519868e−02931   9.37813713e−020 −2.33189316e−023   9.94588095e−028 34  1.26175655e−020 −1.49657869e−024   2.33032636e−028 42 −3.26636505e−021  2.73829199e−025   2.06805365e−030 45   2.70272716e−020−1.30446854e−024   3.13007511e−029 47   7.58602437e−019 −6.94042849e−023  2.94089737e−027

TABLE 19 NA = 1.2, β = 0.25 Field a b c 26 4.5 4.75 WL 193.3 nm SILUV1.56049116 CAFUV 1.50110592 H2OV 1.4368 Surface Radius ThicknessMaterial ½Diam. Type 0 0.000000000 31.999270282 AIR 65.000 1161.244041962 14.998636035 SILUV 82.320 2 200.129661131 4.944776020 AIR81.953 3 138.221863276 14.998396795 SILUV 85.474 4 156.49699279850.903040817 AIR 83.945 5 −173.315527687 16.279875172 SILUV 84.438 6−142.013268785 1.000634788 AIR 87.160 7 15501.649257700 32.544206280SILUV 87.713 8 −158.845141838 0.999631849 AIR 89.436 9 91.59709736367.410407247 SILUV 79.148 10 107.035143103 13.851994874 AIR 57.324 11213.854334447 15.987143481 SILUV 54.995 12 −484.417010515 72.563101783AIR 51.059 13 −54.334592127 14.997747797 SILUV 49.752 14 −68.0723525030.998695446 AIR 60.236 15 −601.365655277 24.817582741 SILUV 80.082 16−242.182339653 0.995504271 AIR 83.903 17 920.810751329 35.748197919SILUV 91.860 18 −213.159366146 55.021374074 AIR 93.280 19 246.61272221714.997702082 SILUV 89.716 20 222.836314969 195.136099792 AIR 86.935 21−235.528678750 14.998801176 SILUV 123.772 22 −252.575360887 16.051090308AIR 131.942 23 −208.057958857 −16.051090308 AIR 133.654 REFL 24−252.575360887 −14.998801176 SILUV 128.868 25 −235.528678750−195.136099792 AIR 114.227 26 222.836314969 −14.997702082 SILUV 106.19127 246.612722217 −15.024807366 AIR 119.874 28 190.206428127 15.024807366AIR 122.140 REFL 29 246.612722217 14.997702082 SILUV 120.950 30222.836314969 195.136099792 AIR 111.677 31 −235.528678750 14.998801176SILUV 83.094 32 −252.575360887 56.045936568 AIR 86.484 33 370.97966378447.033021034 SILUV 99.224 34 −371.323272898 62.417517206 AIR 97.788 35−121.118365852 14.999357361 SILUV 74.709 36 120.855315866 33.365820253AIR 72.995 37 20779.359547400 24.110061836 SILUV 77.786 38−269.244136428 16.073764059 AIR 83.845 39 −236.048531861 28.909364173SILUV 86.677 40 −161.907128190 8.188854525 AIR 94.856 41 842.23035067646.587674654 SILUV 117.052 42 −262.240874081 3.490322496 AIR 119.226 43374.311200849 50.091253523 SILUV 123.021 44 −396.081152439 −8.144186891AIR 122.235 45 0.000000000 9.143428258 AIR 118.495 46 290.81526967569.706490303 SILUV 113.550 47 −465.439617778 0.998821533 AIR 106.611 4884.362795313 48.231691787 SILUV 73.577 49 220.065022009 0.997153094 AIR60.089 50 51.630320906 38.562324381 CAFUV 42.677 51 0.0000000002.998760762 H2OV 20.925 52 0.000000000 0.000000000 AIR 16.250

TABLE 19A Aspherical Constants Surface K C1 C2 C3 6 0.00000000e+000  5.22123357e−008   8.58887551e−013 −4.54164064e−016 7 0.00000000e+000−5.20183796e−008 −4.57191269e−012 −4.91479340e−016 12 0.00000000e+000  3.52517346e−007   2.85321977e−011   9.33189645e−017 16 0.00000000e+000−1.19054499e−007 −6.17053971e−013   8.29918331e−017 20 0.00000000e+000  2.35880706e−008   1.10625664e−014   1.52718231e−017 21 0.00000000e+000−1.93271271e−008 −1.21191457e−014 −9.08764375e−018 25 0.00000000e+000−1.93271271e−008 −1.21191457e−014 −9.08764375e−018 26 0.00000000e+000  2.35880706e−008   1.10625664e−014   1.52718231e−017 30 0.00000000e+000  2.35880706e−008   1.10625664e−014   1.52718231e−017 31 0.00000000e+000−1.93271271e−008 −1.21191457e−014 −9.08764375e−018 33 0.00000000e+000  1.34282593e−007 −1.85430392e−012 −4.26524890e−017 35 0.00000000e+000−2.95757718e−009   1.59584067e−011 −3.65004253e−016 38 0.00000000e+000  1.44418264e−007   4.50598204e−012 −8.46201050e−019 46 0.00000000e+000−1.03608598e−008 −1.39868032e−012 −2.06257372e−017 47 0.00000000e+000−2.35449031e−008   6.28466297e−017   5.46615500e−020 49 0.00000000e+000  1.18378675e−007   2.25652288e−011 −6.89451988e−015 Surface C4 C5 C6 6  1.80084384e−021 −1.27939182e−025   9.21858288e−029 7   3.70354199e−020−2.59625588e−024 −9.35416883e−031 12   1.46216022e−018   1.35490801e−022−4.07118530e−026 16 −1.92366012e−020   1.44946211e−024 −4.85055808e−02920   4.13946988e−022 −1.55058201e−026   1.20806176e−030 21−5.34976868e−023 −1.13872365e−027 −9.05434146e−032 25 −5.34976868e−023−1.13872365e−027 −9.05434146e−032 26   4.13946988e−022 −1.55058201e−026  1.20806176e−030 30   4.13946988e−022 −1.55058201e−026  1.20806176e−030 31 −5.34976868e−023 −1.13872365e−027 −9.05434146e−03233   2.28325758e−022 −3.90557972e−026 −2.65242779e−030 35  2.40761278e−019 −3.76176852e−023   1.70246167e−027 38 −5.19608735e−021−2.54791026e−025   1.06081720e−028 46 −1.69652628e−021   1.44074754e−025  2.91395857e−030 47   5.71824030e−021 −4.38179150e−025  1.61431061e−029 49   1.27155044e−018 −1.75366514e−022  1.10664062e−026

TABLE 20 NA = 1.2, β = 0.25 Field a b c 26 4.5 4.75 WL 193.3 nm SILUV1.56049116 CAFUV 1.50110592 H2OV 1.4368 Surface Radius ThicknessMaterial ½Diam. Type 0 0.000000000 44.536474494 AIR 64.000 1−145.614238159 20.028968251 SILUV 71.569 2 −106.712344272 3.165042254AIR 75.720 3 −126.799930892 14.997327707 SILUV 77.371 4 −400.52900998324.938975486 AIR 89.386 5 −153.978050679 32.035367034 SILUV 91.679 6−113.485754514 3.962209737 AIR 96.767 7 481.661051100 51.626847869 SILUV109.810 8 −218.069217303 0.986417498 AIR 110.501 9 95.46130680678.518887093 SILUV 88.224 10 197.024903934 20.433893299 AIR 65.510 11245.480984290 15.389927680 SILUV 50.234 12 208.931069399 52.005350380AIR 39.571 13 −51.537539329 25.208829578 SILUV 43.896 14 −67.25677358331.133045864 AIR 59.014 15 −353.059395237 33.742142302 SILUV 97.721 16−152.100516860 1.776048462 AIR 102.828 17 −246.044785191 45.384512544SILUV 109.125 18 −136.487212093 39.988466465 AIR 113.661 19 0.000000000201.398483236 AIR 114.931 20 −233.811577421 14.982820253 SILUV 137.71321 −370.567496646 37.810813405 AIR 153.233 22 −216.552824900−37.810813405 AIR 155.425 REFL 23 −370.567496646 −14.982820253 SILUV147.967 24 −233.811577421 −201.398483236 AIR 120.238 25 168.695670563201.398483236 AIR 106.748 REFL 26 −233.811577421 14.982820253 SILUV76.924 27 −370.567496646 37.810813405 AIR 81.451 28 0.00000000040.022296005 AIR 92.209 29 241.209000864 59.448832101 SILUV 108.950 30−367.385238353 16.411120649 AIR 108.057 31 357.895873274 15.315252659SILUV 93.192 32 94.401040596 38.563342544 AIR 77.588 33 442.57962851114.989394891 SILUV 78.610 34 12021.837327700 28.864129981 AIR 79.433 35−191.074651244 21.063184315 SILUV 81.221 36 −155.506376055 9.229041305AIR 86.157 37 185.464309512 44.606063412 SILUV 101.263 38−1150.340708410 31.620758000 AIR 100.270 39 0.000000000 −0.000000330 AIR92.899 40 134.597113443 29.097516432 SILUV 92.514 41 296.9372345493.458534424 AIR 90.494 42 150.878027709 36.379168022 SILUV 87.171 43−494.554249982 0.979230496 AIR 84.334 44 65.631220570 30.011852752 SILUV57.267 45 126.706468270 0.934188028 AIR 49.586 46 43.42632288931.956384174 CAFUV 36.843 47 0.000000000 2.999915964 H2OV 20.807 480.000000000 0.000000000 AIR 16.001

TABLE 20A Aspherical Constants Surface K C1 C2 C3 1 0.00000000e+000−1.87990337e−008 −7.06178066e−012 −1.25139326e−015 6 0.00000000e+000  2.08430698e−009   3.65727833e−013   1.43149385e−018 7 0.00000000e+000  1.33126997e−008 −2.47997131e−012   3.62223701e−017 12 0.00000000e+000  6.92559246e−007   1.01811160e−010   4.16533262e−015 16 0.00000000e+000  1.26266812e−008 −7.60497043e−013   5.26322462e−017 20 0.00000000e+000−2.84981575e−008   5.16388350e−013 −2.39579817e−017 24 0.00000000e+000−2.84981575e−008   5.16388350e−013 −2.39579817e−017 26 0.00000000e+000−2.84981575e−008   5.16388350e−013 −2.39579817e−017 29 0.00000000e+000  1.10496506e−007 −6.42644915e−012   2.43910073e−016 31 0.00000000e+000−8.94334736e−008   5.51621746e−012   2.64317734e−016 34 0.00000000e+000  7.27650226e−008   5.05452869e−012   2.12206759e−016 42 0.00000000e+000−5.69019750e−008 −3.78079018e−012 −3.58536429e−016 43 0.00000000e+000  3.85631053e−008 −1.96032685e−012 −4.18174469e−016 45 0.00000000e+000  1.32980535e−007   6.98357216e−011 −9.96688046e−015 Surface C4 C5 C6 1  1.04002349e−019   1.61613724e−024 −2.08243603e−028 6   3.84125705e−021−4.35918853e−025   5.89812982e−029 7 −3.52780013e−022   1.86263171e−025−7.15398794e−030 12   2.76714831e−017 −1.56122873e−020   5.24368076e−02416   1.50861183e−021   2.14471673e−025   2.66224210e−030 20  3.35275866e−022 −8.50016423e−028 −1.97442790e−031 24   3.35275866e−022−8.50016423e−028 −1.97442790e−031 26   3.35275866e−022 −8.50016423e−028−1.97442790e−031 29 −1.98759724e−020   8.00452148e−025 −9.31628471e−03031   3.20019743e−020 −4.26422117e−024   1.50940276e−028 34  5.08829476e−020 −5.03622460e−024   7.39342220e−028 42 −4.25536201e−020  2.42006208e−024   1.84293028e−028 43   9.23637376e−020−8.60875665e−024   4.05098414e−028 45 −3.10084571e−019   1.88265675e−022−4.40640742e−026

TABLE 21 NA = 1.2, β = 0.25 Field a b c 26 4.5 4.75 WL 193.3 nm SILUV1.56049116 CAFUV 1.50110592 H2OV 1.4368 Surface Radius ThicknessMaterial ½Diam. Type 0 0.000000000 31.999392757 AIR 64.675 1149.202932404 20.120662646 SILUV 82.837 2 233.357095260 1.010428853 AIR82.195 3 172.529012606 14.999455624 SILUV 83.021 4 153.11681165837.462782355 AIR 80.924 5 −385.292133909 24.003915576 SILUV 81.802 6−189.041850576 1.014246919 AIR 84.223 7 −1521.447544300 27.529894754SILUV 83.808 8 −150.691487200 0.999361796 AIR 85.384 9 89.23840784756.953687562 SILUV 75.993 10 101.329520927 13.713067990 AIR 58.085 11176.794820361 18.039991299 SILUV 55.978 12 −447.950790449 73.129977874AIR 52.127 13 −57.595257960 16.299538518 SILUV 50.436 14 −83.0366305420.999811850 AIR 64.360 15 −2287.430407510 44.210083628 SILUV 86.772 16−147.632600397 0.998596167 AIR 92.132 17 −352.966686998 32.886671205SILUV 97.464 18 −153.824954969 271.807415024 AIR 100.038 19−238.525982305 14.998824247 SILUV 122.669 20 −315.714610405 19.998064817AIR 131.899 21 −202.650261219 −19.998064817 AIR 131.917 REFL 22−315.714610405 −14.998824247 SILUV 131.852 23 −238.525982305−196.811186275 AIR 112.411 24 207.441141965 −14.998504935 SILUV 107.77125 268.178120713 −19.998469851 AIR 124.363 26 193.196124575 19.998469851AIR 127.679 REFL 27 268.178120713 14.998504935 SILUV 125.948 28207.441141965 271.807924190 AIR 114.576 29 325.701461380 38.709870586SILUV 92.964 30 −885.381927410 59.476563453 AIR 90.975 31 −123.86724218318.110373017 SILUV 74.226 32 126.359054159 30.087671186 AIR 73.733 33−16392.865249200 31.626040348 SILUV 77.090 34 −299.59269853415.292623049 AIR 86.158 35 −296.842399050 24.895495087 SILUV 89.777 36−163.748333285 8.131594074 AIR 94.529 37 675.259743609 47.908987883SILUV 116.712 38 −263.915255162 1.054743285 AIR 118.641 39 356.01068114447.536295502 SILUV 120.712 40 −435.299476405 3.543672029 AIR 119.727 410.000000000 10.346485925 AIR 112.597 42 256.262375445 67.382487780 SILUV107.047 43 −454.037284452 0.998990981 AIR 99.451 44 84.43468054736.424585989 SILUV 70.101 45 207.490725651 0.997139930 AIR 62.005 4650.112836179 41.301883710 CAFUV 43.313 47 0.000000000 2.999011124 H2OV20.878 48 0.000000000 0.000000000 AIR 16.169

TABLE 21A Aspherical Constants Surface K C1 C2 C3 6 0.00000000e+000  5.47357338e−008   1.50925239e−012 −1.14128005e−015 7 0.00000000e+000−5.65236098e−008 −4.45251739e−012 −1.12368170e−015 12 0.00000000e+000  3.75669258e−007   2.00493160e−011 −1.57617930e−015 16 0.00000000e+000−2.97247128e−008 −1.16246607e−013   1.91525676e−016 19 0.00000000e+000−1.79930163e−008 −1.81456294e−014 −6.42956161e−018 23 0.00000000e+000−1.79930163e−008 −1.81456294e−014 −6.42956161e−018 24 0.00000000e+000  1.41712563e−008   1.42766536e−013   5.35849443e−018 28 0.00000000e+000  1.41712563e−008   1.42766536e−013   5.35849443e−018 29 0.00000000e+000  1.42833387e−007   3.55808937e−014 −1.23227147e−017 31 0.00000000e+000−1.51349602e−008   1.62092054e−011 −4.43234287e−016 34 0.00000000e+000  1.39181850e−007   3.36145772e−012 −4.99179521e−017 42 0.00000000e+000−4.24593271e−009 −1.84016360e−012 −2.09008867e−017 43 0.00000000e+000−1.75350671e−008   1.70435017e−014   1.85876255e−020 45 0.00000000e+000  4.03560215e−008   2.57831806e−011 −6.32742355e−015 Surface C4 C5 C6 6  2.03745939e−022 −1.46491288e−024   3.18476009e−028 7   7.05334891e−020−6.42608755e−024   4.64154513e−029 12   2.00775938e−018 −1.81218495e−022  1.59512857e−028 16 −5.42330199e−021   4.84113906e−025 −1.50564943e−03019 −1.72138657e−022   4.34933124e−027 −2.46030547e−031 23−1.72138657e−022   4.34933124e−027 −2.46030547e−031 24   5.30493751e−022−2.04437497e−026   1.09297996e−030 28   5.30493751e−022 −2.04437497e−026  1.09297996e−030 29   1.26320560e−021   1.99476309e−025−1.46884711e−029 31   2.01248512e−019 −3.73070267e−023   1.98749982e−02734 −8.18195448e−021   4.05698527e−025   4.11589492e−029 42−2.89704097e−021   1.96863338e−025   6.53807102e−030 43  6.37197338e−021 −5.19573140e−025   2.34597624e−029 45  9.55984243e−019 −1.13622236e−022   6.56644929e−027

TABLE 22 Surface Radius Thickness Material ½Diam. Type 0 0.00000000031.993696817 AIR 65.000 1 0.000000000 −0.006216437 AIR 75.178 2173.245898492 28.849219645 SILUV 80.701 3 −1901.645842520 1.159056366AIR 81.186 4 139.958280577 17.383993593 SILUV 82.800 5 114.69072080165.798932682 AIR 78.012 6 177.803002075 54.744184912 SILUV 88.979 7−204.801382425 0.997356478 AIR 88.078 8 89.450127459 21.884550473 SILUV62.734 9 143.066432170 15.678153833 AIR 57.180 10 −13433.89170330015.000276693 SILUV 54.058 11 −8853.549440170 13.872934681 AIR 46.493 120.000000000 0.000000000 AIR 37.955 13 0.000000000 61.755398574 AIR38.009 14 −66.760883146 14.994014816 SILUV 54.182 15 −72.01231674123.617101147 AIR 60.909 16 −63.807677134 21.572901785 SILUV 62.830 17−76.257505928 1.720678480 AIR 75.095 18 1299.192911670 55.482510512SILUV 104.240 19 −148.321651349 39.989348698 AIR 106.312 20 0.000000000232.380264110 AIR 95.929 21 −201.575622280 −232.380264110 AIR 121.585REFL 22 199.702239038 232.380264110 AIR 118.875 REFL 23 0.00000000039.986853275 AIR 91.439 24 162.499205332 44.748459237 SILUV 93.810 25−2036.857320830 1.012661476 AIR 91.212 26 141.444403824 15.471017813SILUV 77.784 27 167.499214725 41.441314042 AIR 72.833 28 −106.50521569714.992253348 SILUV 70.530 29 98.946616742 44.625025386 AIR 64.458 30−139.301063148 14.998444853 SILUV 66.132 31 −339.669887909 0.997145626AIR 79.298 32 1356.020956420 23.905236106 SILUV 86.623 33 −340.1090546985.477848077 AIR 90.957 34 472.296115575 52.138063579 SILUV 108.763 35−222.876812950 8.808100307 AIR 112.258 36 2053.528638090 24.342755161SILUV 119.824 37 −621.581254067 1.014456714 AIR 120.910 38 210.45544877943.312493694 SILUV 124.650 39 −1489.901649750 5.393215295 AIR 124.077 40210.646045010 47.972124824 SILUV 119.142 41 −627.180734089 0.998977914AIR 117.607 42 97.515291800 53.409662718 SILUV 82.565 43 469.5772089200.998603706 AIR 69.163 44 58.393704585 42.102914517 CAFUV 46.689 450.000000000 3.001333990 H2OV 20.956

TABLE 22A Aspherical Constants Surface 2 Surface 5 Surface 6 K 0.0000 K0.0000 K 0.0000 C1 −4.85507054e−008   C1 4.63982284e−008 C17.93368538e−008 C2 8.30450606e−013 C2 −4.36308368e−016   C2−3.49340213e−012   C3 −6.55835562e−016   C3 −4.56700150e−016   C3−3.72450023e−016   C4 6.07754089e−020 C4 1.41944231e−020 C4−1.50853577e−020   C5 −4.30736726e−024   C5 −2.58792066e−024   C54.35840155e−024 C6 9.97068342e−029 C6 2.91613493e−032 C6−1.74914218e−028   C7 0.00000000e+000 C7 0.00000000e+000 C70.00000000e+000 C8 0.00000000e+000 C8 0.00000000e+000 C8 0.00000000e+000C9 0.00000000e+000 C9 0.00000000e+000 C9 0.00000000e+000 Surface 11Surface 19 Surface 21 K 0.0000 K 0.0000 K 0.0000 C1 3.21277393e−007 C11.27016347e−008 C1 1.00526801e−008 C2 2.34047891e−012 C2 4.09192710e−013C2 1.78849410e−013 C3 1.48915392e−014 C3 2.48214285e−017 C32.48862104e−018 C4 −1.12960188e−017   C4 9.66053244e−022 C49.77481750e−023 C5 3.70333100e−021 C5 1.60329104e−027 C5−3.23740664e−028   C6 −4.63366043e−025   C6 2.07652380e−030 C66.28188299e−032 C7 0.00000000e+000 C7 0.00000000e+000 C7 0.00000000e+000C8 0.00000000e+000 C8 0.00000000e+000 C8 0.00000000e+000 C90.00000000e+000 C9 0.00000000e+000 C9 0.00000000e+000 Surface 22 Surface24 Surface 28 K 0.0000 K 0.0000 K 0.0000 C1 −8.36189868e−009   C13.26436925e−008 C1 1.73452145e−007 C2 −1.86708153e−013   C29.95492740e−013 C2 9.62198511e−012 C3 −3.35782535e−018   C33.47886760e−017 C3 8.33010916e−016 C4 −6.14811355e−023   C46.60667009e−021 C4 −4.89738667e−020   C5 −6.72093224e−028   C5−3.90366799e−025   C5 −2.08149618e−023   C6 −5.98449275e−032   C64.03156525e−029 C6 2.57941116e−027 C7 0.00000000e+000 C7 0.00000000e+000C7 0.00000000e+000 C8 0.00000000e+000 C8 0.00000000e+000 C80.00000000e+000 C9 0.00000000e+000 C9 0.00000000e+000 C9 0.00000000e+000Surface 31 Surface 34 Surface 38 K 0.0000 K 0.0000 K 0.0000 C11.28849399e−007 C1 −2.57944586e−008   C1 −1.91471943e−008   C24.99181087e−012 C2 7.33527637e−013 C2 −1.34589512e−012   C35.65181638e−017 C3 −5.33079171e−018   C3 3.11852582e−017 C42.64289484e−020 C4 −8.21688122e−022   C4 −2.35897615e−021   C5−3.15869403e−024   C5 −2.94478649e−026   C5 6.73415544e−026 C6−3.04781776e−029   C6 2.23217522e−030 C6 1.62707757e−030 C70.00000000e+000 C7 0.00000000e+000 C7 0.00000000e+000 C8 0.00000000e+000C8 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 C90.00000000e+000 C9 0.00000000e+000 Surface 40 Surface 41 Surface 43 K0.0000 K 0.0000 K 0.0000 C1 −6.30346424e−008   C1 −2.41682461e−008   C11.25460964e−007 C2 −4.64729134e−013   C2 1.18102559e−013 C27.10922055e−012 C3 3.22359222e−017 C3 −1.34037856e−016   C3−1.61078694e−015   C4 2.89305419e−023 C4 1.79602212e−020 C41.49634597e−019 C5 −2.15332629e−026   C5 −8.86179442e−025   C5−1.71885653e−023   C6 8.39177392e−031 C6 1.89592509e−029 C61.04621563e−027 C7 0.00000000e+000 C7 0.00000000e+000 C7 0.00000000e+000C8 0.00000000e+000 C8 0.00000000e+000 C8 0.00000000e+000 C90.00000000e+000 C9 0.00000000e+000 C9 0.00000000e+000

TABLE 23 WL 193.3 nm 193.4 nm 193.2 nm SILUV 1.560491 1.560332 1.560650CAFUV 1.501106 1.501010 1.501202 H2OV 1.436800 1.436800 1.436800 Ymax =64.675 mm; NA = 1.2 Surface Radius Thickness Material ½Diam. Type  00.000000000 32.343320391 AIR 64.675  1 0.000000000 0.319194773 AIR74.840  2 165.502154849 22.393605178 SILUV 81.725  3 427.56447222978.042155049 AIR 81.442  4 362.770694637 28.092832019 SILUV 88.424  5−418.998032701 0.953143564 AIR 88.789  6 108.458706796 42.211528711SILUV 85.410  7 309.813567338 43.976162585 AIR 80.542  8 440.56340635217.425727560 SILUV 60.495  9 −278.343745406 54.725816031 AIR 56.963 10−65.973394609 15.012675322 SILUV 50.057 11 −89.483928231 44.616098218AIR 59.618 12 −164.547135387 29.271100213 SILUV 82.247 13 −110.1009566350.995307980 AIR 86.942 14 −467.051029385 33.374516855 SILUV 94.291 15−156.421752282 39.987151223 AIR 96.378 16 0.000000000 229.883694545 AIR89.855 17 −196.922423263 −229.883694545 AIR 115.021 REFL 18196.894790764 229.883694545 AIR 115.024 REFL 19 0.000000000 40.005209742AIR 89.120 20 158.312187294 42.217660752 SILUV 95.332 21 2467.13105646070.144222480 AIR 92.913 22 −160.335654972 14.992560808 SILUV 73.410 23116.412074936 38.531709122 AIR 69.984 24 −250.712291671 18.369318291SILUV 71.881 25 −300.079780156 31.051013458 AIR 80.817 26 5705.51010348024.334610155 SILUV 107.710 27 −458.981124329 14.563800138 AIR 111.524 28946.448274166 62.249192106 SILUV 126.621 29 −192.486608755 1.015402218AIR 129.650 30 −4079.043797180 15.732935333 SILUV 130.993 31−1100.089935780 14.595769901 AIR 131.283 32 0.000000000 0.000000000 AIR130.790 33 0.000000000 −13.603116119 AIR 131.340 34 220.44590086451.281950308 SILUV 133.878 35 −1597.683074300 5.271684397 AIR 133.124 36215.527385603 15.522171709 SILUV 124.678 37 314.221642044 4.657196014AIR 121.589 38 305.812344416 42.963421749 SILUV 120.269 39−771.778612980 0.996840378 AIR 117.157 40 109.741348234 43.192990855SILUV 84.698 41 708.633799886 6.161060319 AIR 76.900 42 66.40477950939.130193750 CAFUV 46.929 43 0.000000000 2.999814914 H2OV 20.723 440.000000000 0.000000000 AIR 16.171

TABLE 23A Aspherical Constants Surface 3 Surface 4 Surface 9 K   0.0000K   0.0000 K   0.0000 C1   5.16435696e−008 C1   9.50247881e−010 C1  1.24922845e−007 C2 −3.34181067e−012 C2 −3.73319015e−012 C2  1.54187542e−011 C3   3.14093710e−017 C3 −6.51837734e−017 C3−3.69685941e−016 C4 −3.87421162e−022 C4 −7.93160821e−021 C4  1.37785719e−018 C5 −8.61200118e−027 C5 9.00091591e−025 C5−3.60351270e−022 C6 −1.47089082e−029 C6 −1.92340271e−028 C6  2.85480659e−026 C7   0.00000000e+000 C7   0.00000000e+000 C7  0.00000000e+000 C8   0.00000000e+000 C8   0.00000000e+000 C8  0.00000000e+000 C9   0.00000000e+000 C9   0.00000000e+000 C9  0.00000000e+000 Surface 13 Surface 17 Surface 18 K   0.0000 K   0.0000K   0.0000 C1   1.45134700e−009 C1   9.25585261e−009 C1 −8.29620456e−009C2   1.24926632e−014 C2   1.67052938e−013 C2 −1.78159419e−013 C3  8.37553299e−018 C3   2.68611580e−018 C3 −3.07128696e−018 C4  2.49716672e−021 C4   1.04166910e−022 C4 −8.08505340e−023 C5−2.66380030e−025 C5 −1.70724722e−027 C5   2.33488811e−028 C6  2.61815898e−029 C6   1.10260829e−031 C6 −8.31087015e−032 C7  0.00000000e+000 C7   0.00000000e+000 C7   0.00000000e+000 C8  0.00000000e+000 C8   0.00000000e+000 C8   0.00000000e+000 C9  0.00000000e+000 C9   0.00000000e+000 C9   0.00000000e+000 Surface 20Surface 22 Surface 25 K   0.0000 K   0.0000 K   0.0000 C1  1.71573479e−008 C1 −9.04880266e−009 C1   1.11732794e−007 C2  5.87191967e−013 C2   3.31829223e−012 C2   5.01044308e−012 C3  3.53602344e−017 C3 −7.82564703e−017 C3   1.82247821e−016 C4  3.89188764e−021 C4   7.87650776e−020 C4   2.99282347e−021 C5−2.56256746e−025 C5 −7.94502597e−024 C5 −2.06723334e−024 C6  2.81528130e−029 C6   2.40943558e−027 C6   2.32093750e−029 C7  0.00000000e+000 C7   0.00000000e+000 C7   0.00000000e+000 C8  0.00000000e+000 C8   0.00000000e+000 C8   0.00000000e+000 C9  0.00000000e+000 C9   0.00000000e+000 C9   0.00000000e+000 Surface 28Surface 34 Surface 36 K   0.0000 K   0.0000 K   0.0000 C1−2.42933057e−008 C1 −8.91439687e−009 C1 −5.63334250e−008 C2  3.07041360e−014 C2 −7.33160527e−013 C2 −3.26907281e−013 C3  7.41003764e−018 C3 −4.83885006e−018 C3   9.72642980e−017 C4−5.26534391e−022 C4 −2.37515306e−022 C4   4.30118073e−021 C5  1.17630052e−026 C5   2.33792040e−026 C5 −5.03894259e−025 C6−1.17982545e−031 C6 −2.27854885e−032 C6   1.42974281e−029 C7  0.00000000e+000 C7   0.00000000e+000 C7   0.00000000e+000 C8  0.00000000e+000 C8   0.00000000e+000 C8   0.00000000e+000 C9  0.00000000e+000 C9   0.00000000e+000 C9   0.00000000e+000 Surface 39Surface 41 K   0.0000 K   0.0000 C1 −1.21454753e−008 C1  4.06678857e−008 C2   1.19750305e−012 C2   3.94505025e−012 C3−6.39990660e−017 C3 −2.03790398e−016 C4   4.10753453e−021 C4  2.07246865e−020 C5 −1.17680773e−025 C5 −3.19577553e−024 C6  4.05203512e−030 C6   2.12601962e−028 C7   0.00000000e+000 C7  0.00000000e+000 C8   0.00000000e+000 C8   0.00000000e+000 C9  0.00000000e+000 C9   0.00000000e+000

TABLE 27 (EM28) Sur- ½ face Radius Asphere Thickness Material Diameter 10.000000 −0.028411 LUFTV193 76.078 2 148.374584 AS 30.141343 SIO2V82.524 3 2980.684122 2.731918 N2VP950 82.907 4 177.363525 46.196958SIO2V 84.542 5 765.980001 AS 27.096346 N2VP950 80.837 6 2666.33511822.841301 SIO2V 73.658 7 −291.755432 AS 0.990907 N2VP950 70.887 8230.707988 26.508915 SIO2V 65.013 9 −298.406132 21.906961 N2VP950 61.38910 −112.314548 10.039397 SIO2V 45.510 11 −118.846218 2.540087 N2VP95043.187 12 0.000000 0.000000 N2VP950 35.411 13 0.000000 18.000000 N2VP95035.411 14 0.000000 10.013160 SIO2V 46.508 15 0.000000 0.991399 N2VP95050.085 16 237.566392 20.385633 SIO2V 54.619 17 −476.646043 28.746587N2VP950 57.184 18 −81.332740 10.129443 SIO2V 59.250 19 −86.4146010.995700 N2VP950 63.535 20 −2069.485733 AS 30.115541 SIO2V 71.732 21−141.210644 0.983397 N2VP950 74.255 22 962.252932 AS 9.980083 SIO2V74.793 23 819.084531 36.977869 N2VP950 75.040 24 0.000000 198.944441N2VP950 77.850 25 −167.595461 AS −198.944441 REFL 139.680 26 167.595461AS 198.944441 REFL 111.811 27 0.000000 36.992449 N2VP950 110.123 28268.305681 49.624605 SIO2V 123.343 29 −828.322347 AS 47.027120 N2VP950122.544 30 327.800199 39.684648 SIO2V 108.912 31 −1269.440044 AS0.995014 N2VP950 106.029 32 331.950903 9.989996 SIO2V 93.089 3395.290319 49.810064 N2VP950 76.973 34 −442.703787 9.991655 SIO2V 76.73735 143.501616 20.229593 N2VP950 77.748 36 483.451705 9.993273 SIO2V79.933 37 241.810075 15.546146 N2VP950 84.505 38 928.401379 29.795388SIO2V 88.441 39 −298.259102 AS 8.829909 N2VP950 94.008 40 −1812.559641AS 29.628322 SIO2V 101.744 41 −270.502936 7.417032 N2VP950 107.779 42−7682.999744 AS 45.892645 SIO2V 118.999 43 −231.286706 27.404554 N2VP950122.729 44 449.487156 46.556603 SIO2V 134.549 45 −668.069375 1.250913N2VP950 134.857 46 886.959900 AS 43.269922 SIO2V 133.822 47 −295.6124180.987420 N2VP950 133.749 48 230.112826 44.287713 SIO2V 112.987 49−2356.132765 AS 0.978312 N2VP950 108.183 50 92.104165 41.465221 SIO2V76.439 51 253.332614 1.131452 N2VP950 67.260 52 84.180015 39.033045CAF2V193 50.611 53 0.000000 3.000000 H2OV193 21.082 54 0.000000 0.000000AIR 16.500

TABLE 27A Aspherical Constants Surface 2 5 7 20 22 K   0   0   0   0   0C1 −7.058653e−08 −1.114728e−07   1.398385e−07 −1.149358e−08−5.629065e−08 C2 −2.984480e−12   4.526601e−12 −6.219606e−12−6.065516e−12   1.905377e−12 C3 −1.303901e−16   1.421882e−16  3.410808e−16   6.763250e−16 −2.554160e−16 C4 −5.960748e−21−1.154537e−19   3.575265e−20 −7.651964e−20   6.886775e−21 C5−6.187687e−25   1.628794e−23 −2.900443e−23   5.689563e−24 −6.938594e−25C6   8.668981e−29 −6.255900e−28   2.343745e−27 −2.312648e−28−2.420574e−29 C7   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C8   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 C9   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 Surface 2526 29 31 39 K −2.31378 −2.31378   0   0   0 C1 −4.828221e−08  4.828221e−08   1.342570e−08 −9.018801e−08   3.278431e−08 C2  7.051572e−13 −7.051572e−13 −3.644532e−13   6.045342e−12   1.370822e−17C3 −2.377185e−17   2.377185e−17 −2.375681e−18 −1.273791e−16  1.643036e−16 C4   6.284480e−22 −6.284480e−22 −3.970849e−22−2.702171e−21 −2.021350e−20 C5 −1.385194e−26   1.385194e−26−4.372813e−27   3.262226e−25   2.670722e−24 C6   1.514567e−31−1.514567e−31   6.283103e−31 −6.948598e−30 −1.187217e−28 C7  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00 C8   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C9   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 Surface 40 42 46 49 K   0  0   0   0 C1 −5.316551e−08 −1.954895e−09 −4.282391e−08 −3.095959e−08C2 −7.707570e−14   5.606761e−14 −1.948121e−13   3.451241e−12 C3  2.146900e−16 −6.199304e−17   7.664802e−17 −1.219768e−16 C4−2.184878e−20   3.478339e−21 −2.354982e−21   4.060098e−21 C5  2.255720e−24 −1.558932e−25   1.361973e−26 −9.053687e−26 C6−9.545251e−29   4.899450e−30   2.019923e−31   1.610152e−30 C7  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 C8  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 C9  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00

TABLE 28 (EM25) WL 193.368 nm 193.468 nm 193.268 nm SIO2V′ 1.56078571.56062813 1.56094365 CAF2V193′ 1.50175423 1.50185255 1.50195109H2OV193′ 1.4364632 1.43667693 1.43689123 NA 1.2; Fmin = 18.63 mm; Fmax =66 mm Surface Radius Thickness Material ½Diam. Type  0 0.00000000031.974939715 AIR 66.000  1 0.000000000 −0.024765663 AIR 76.143  2148.940822391 31.463360093 SIO2V 83.171  3 6331.489300420 40.453855135AIR 83.210  4 928.302406310 14.994423747 SIO2V 83.796  5 251.96791882313.753137508 AIR 83.372  6 172.912005335 50.243372901 SIO2V 87.569  7−197.856766081 1.000964332 AIR 86.631  8 81.522536296 17.681593406 SIO2V65.574  9 88.327907526 30.256558951 AIR 60.047 10 117.55142745218.843304175 SIO2V 50.042 11 855.507852453 8.921765220 AIR 45.493 120.000000000 0.000000000 AIR 37.552 13 0.000000000 49.799403498 AIR37.641 14 −56.887108985 19.216557050 SIO2V 46.868 15 −153.9528817620.978745522 AIR 66.363 16 −10783.364868000 53.980836551 SIO2V 79.120 17−370.423261824 5.444267505 AIR 97.662 18 −1928.185768980 46.883883025SIO2V 104.839 19 −156.534475362 0.983619441 AIR 108.499 20−2025.935551520 37.434974978 SIO2V 114.116 21 −206.57264470934.979106092 AIR 115.758 22 0.000000000 220.766423587 AIR 108.107 23−187.624624543 −220.766423587 AIR 140.612 REFL 24 185.347836932220.766423587 AIR 130.980 REFL 25 0.000000000 38.094302401 AIR 87.940 26572.857393641 19.003060435 SIO2V 84.526 27 −2621.148115610 0.995124659AIR 83.267 28 286.158521436 14.994640836 SIO2V 80.188 29 106.16569118342.739053946 AIR 72.275 30 −269.972769063 14.994253287 SIO2V 72.751 31217.103611286 19.468009312 AIR 79.551 32 49574.268497900 15.072135262SIO2V 82.355 33 −1724.117745890 7.993795407 AIR 87.009 34 −681.15217180739.742301517 SIO2V 89.501 35 −135.848489522 0.995182990 AIR 93.025 36729.076676327 18.240313704 SIO2V 99.335 37 −1221.183105010 8.112527507AIR 100.052 38 470.281491581 33.610782817 SIO2V 101.641 39−393.774605114 34.640728842 AIR 101.306 40 −135.515968276 14.997016204SIO2V 100.625 41 −242.973369762 0.998166637 AIR 109.176 42 629.21888569133.238719341 SIO2V 114.327 43 −476.667589984 1.000069241 AIR 114.673 44609.210504505 31.634185939 SIO2V 112.966 45 −463.558570174 0.991784251AIR 112.249 46 181.331821629 26.489265851 SIO2V 99.538 47 478.4670685750.985154964 AIR 96.400 48 166.964883598 32.619952496 SIO2V 90.254 4934746.976265700 0.961982243 AIR 86.267 50 65.547601143 30.975153472SIO2V 58.849 51 118.066733717 1.052010322 AIR 51.946 52 68.70687079132.347686260 CAF2V193 43.646 53 0.000000000 3.000000148 H2OV193 21.13454 0.000000000 0.000000000 AIR 16.501

TABLE 28A Aspherical Constants Surface K C1 C2 C3 C4  2  0.00000000e+000 −5.25595959e−008 −5.05125696e−014 −3.39834764e−016  1.43455947e−022  4   0.00000000e+000 −9.82547285e−009 −3.46617126e−012  4.26908111e−016   8.30046581e−021  7   0.00000000e+000  4.35702944e−008   3.07328355e−012 −6.64471080e−016   8.46058187e−02011   0.00000000e+000   1.78059855e−008 −4.49918001e−011 −1.45873634e−015−5.93868926e−020 15   0.00000000e+000   9.71039823e−009 −5.80809116e−012  1.66373755e−015 −6.79295769e−020 18   0.00000000e+000 −9.90188358e−009−3.63667799e−012   4.39791888e−016 −4.05829074e−020 20   0.00000000e+000−3.56668353e−008   1.04282881e−012 −3.79146258e−017   1.77203987e−021 23−1.00000000e+000   0.00000000e+000   0.00000000e+000   0.00000000e+000  0.00000000e+000 24   0.00000000e+000 −4.12889632e−009 −9.85960529e−014−2.94691200e−018 −3.56770055e−025 26   0.00000000e+000   2.84735678e−008  8.22076690e−013   8.98622393e−019   1.63369077e−020 36  0.00000000e+000 −3.45458233e−008   7.01690612e−013   2.53558597e−017−2.32833922e−023 42   0.00000000e+000   6.80041144e−009 −3.73953529e−014−4.59353922e−017   3.53253945e−021 47   0.00000000e+000  3.44340794e−008   8.40449554e−013 −3.72972761e−016   3.22089615e−02049   0.00000000e+000   1.97298275e−008   2.76921584e−012  1.03703892e−016 −5.16050166e−020 Surface C5 C6 C7 C8  2  5.23175535e−024 −1.25244222e−027   1.21805557e−031 −4.43910196e−036  4−4.64399579e−024   1.19810111e−027 −1.78448775e−031   9.48653785e−036  7−6.78485826e−024   2.18615691e−028   1.27733528e−032 −7.77343429e−037 11  2.10051516e−021 −2.86208035e−027 −1.14692199e−028 −9.07436019e−033 15  4.67315167e−024   1.33956477e−027 −1.86319592e−031   1.80116188e−03618   3.14215669e−024 −1.78747424e−028   6.25454799e−033 −9.94933562e−03820 −1.02830257e−025   1.63016234e−030   9.47579264e−035 −3.37443982e−03923   0.00000000e+000   0.00000000e+000   0.00000000e+000  0.00000000e+000 24 −4.97425291e−027   1.63379520e−032  3.42393048e−036 −1.99876678e−040 26 −7.11352194e−024   7.18534327e−028−1.59298542e−032 −4.89537949e−037 36   2.60044530e−026 −1.74079904e−030−4.85763706e−034   2.78340967e−038 42 −9.74225973e−026   9.00308701e−031  0.00000000e+000   0.00000000e+000 47 −2.63108130e−024  2.07908763e−028 −7.57742152e−033   9.89130621e−038 49  8.50503256e−024 −9.50392825e−028   5.47302796e−032 −1.31141198e−036

TABLE 30 (EM29) Sur- ½ face Radius Asphere Thickness Material Diameter 10.000000 −0.000674 LV193975 75.450 2 501.388885 AS 15.700263 SIO2V76.793 3 −2140.989756 1.030768 HEV19397 78.495 4 142.094518 41.139801SIO2V 86.380 5 4509.859821 AS 48.031590 HEV19397 84.694 6 294.04782542.018849 SIO2V 75.299 7 −284.632088 AS 0.899132 HEV19397 70.073 8196.950986 32.325473 SIO2V 62.732 9 −427.997978 AS 24.031073 HEV1939755.024 10 0.000000 0.000000 HEV19397 35.604 11 0.000000 17.973629HEV19397 35.604 12 0.000000 9.999076 SIO2V 45.185 13 0.000000 34.757744HEV19397 48.346 14 997.955935 AS 34.646365 SIO2V 67.618 15 −300.92783215.875609 HEV19397 75.070 16 −346.766852 AS 31.454835 SIO2V 80.051 17−123.279874 36.439684 HEV19397 83.364 18 0.000000 205.977742 HEV1939786.638 19 −174.397052 AS −205.977742 REFL 131.209 20 170.274411 AS205.977742 REFL 116.516 21 0.000000 37.095745 HEV19397 97.388 22437.401009 36.383480 SIO2V 104.301 23 −468.489757 45.906894 HEV19397104.284 4 −1223.579996 21.742866 SIO2V 97.101 5 −511.114441 AS 8.072398HEV19397 96.542 26 432.469418 10.004999 SIO2V 85.308 27 102.88910442.520104 HEV19397 75.234 28 −594.379481 9.996510 SIO2V 75.720 29174.356867 19.418323 HEV19397 79.411 30 715.897359 10.937733 SIO2V82.556 31 324.211087 13.818484 HEV19397 88.129 32 1110.064311 30.443596SIO2V 93.022 33 −264.206409 AS 7.862028 HEV19397 97.550 34 −1190.503106AS 29.935994 SIO2V 104.823 35 −237.772522 11.246604 HEV19397 110.038 3610331.864054 AS 39.860150 SIO2V 122.900 37 −277.281811 10.852741HEV19397 125.931 38 214450.764260 31.052526 SIO2V 131.630 9 −428.57300713.316274 HEV19397 132.643 40 751.599719 33.094141 SIO2V 133.007 41−805.999226 1.057548 HEV19397 132.758 42 914.688148 AS 40.568688 SIO2V130.742 43 −348.277386 0.878766 HEV19397 129.732 44 219.106958 38.836424SIO2V 108.095 45 2357.913334 AS 1.971079 HEV19397 102.766 46 85.55443739.388562 SIO2V 72.129 47 193.092045 0.892017 HEV19397 62.113 4883.536468 37.250760 CAF2V193 49.390 49 0.000000 0.300000 SIO2V 21.410 500.000000 0.000000 SIO2V 21.050 51 0.000000 3.000000 H2OV193B 21.050 520.000000 0.000000 AIR 16.500

TABLE 30A Aspherical Constants Surface 2 5 7 9 14 K   0   0   0  1.84398   0 C1 −4.426813e−08 −2.968289e−08   1.574555e−07  1.174665e−07 −3.306265e−08 C2 −6.238723e−13   5.914537e−12−1.371133e−11   5.249946e−12 −1.008549e−12 C3   5.373027e−21−2.636410e−17   7.979944e−16   0.000000e+00 −2.352647e−16 C4  5.520432e−21 −2.348783e−20 −1.733518e−21   0.000000e+00   2.617179e−25C5 −4.165047e−25   1.589258e−24 −1.045941e−23   0.000000e+00−1.275061e−24 C6 −2.539882e−29 −3.710160e−29   1.048551e−27  0.000000e+00   7.076571e−29 C7   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 C8   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 C9  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00 Surface 16 19 20 25 33 K   0 −2.01302 −2.06565   0   0 C1−4.975918e−08 −3.276866e−08   4.322230e−08 −1.196195e−07   2.211028e−08C2   1.193440e−12   3.671721e−13 −3.203678e−13   6.474093e−12  7.931065e−13 C3 −3.326252e−18 −8.127219e−18   1.331133e−17−2.172807e−16   2.746964e−17 C4   5.194442e−21   1.823894e−22−2.254203e−22   5.562468e−21 −3.773718e−21 C5   7.844572e−25−2.990635e−27   4.731338e−27   4.566785e−26   8.556577e−25 C6−3.910445e−29   4.402752e−32 −3.185999e−32 −6.729599e−30 −5.193468e−29C7   0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00 C8   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C9   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 Surface 34 36 42 45 K   0  0   0   0 C1 −6.109386e−08 −2.940384e−09 −3.072861e−08 −4.317432e−08C2   1.186926e−12 −1.302883e−13   1.225198e−13   5.093533e−12 C3  9.338913e−17 −7.457684e−17   6.438064e−17 −2.542515e−16 C4−8.049754e−21   4.922730e−21 −2.717739e−21   1.185033e−20 C5  7.964565e−25 −1.822077e−25   3.936453e−26 −3.870604e−25 C6−3.877045e−29   3.491116e−30 −1.518766e−31   7.346646e−30 C7  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 C8  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 C9  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00

TABLE 31 (EM29) Sur- ½ face Radius Asphere Thickness Material Diameter 10.000000 −0.012399 LV193975 75.472 2 154.966472 AS 24.304901 SIO2V82.008 3 529.820026 2.090993 HEV19397 82.074 4 150.769271 40.595812SIO2V 84.201 5 5646.002857 29.581615 HEV19397 81.519 6 −1210.85756522.741810 SIO2V 74.381 7 −182.994045 AS 34.025994 HEV19397 72.364 8173.187773 25.484337 SIO2V 52.132 9 −296.185557 22.382287 HEV1939747.253 10 0.000000 10.110510 SIO2V 44.035 11 0.000000 17.152556 HEV1939746.863 12 51884.400557 AS 16.631540 SIO2V 54.537 13 −361.92301863.995754 HEV19397 58.291 14 −878.387785 AS 34.625490 SIO2V 82.453 15−136.078636 36.436642 HEV19397 85.494 16 0.000000 196.253966 HEV1939789.191 17 −182.153238 AS −196.253966 REFL 149.252 18 150.956725 AS196.253966 REFL 101.676 19 0.000000 36.446112 HEV19397 104.396 20333.439228 55.820683 SIO2V 116.602 21 −309.405465 37.869545 HEV19397116.527 22 −424.165104 20.518575 SIO2V 104.186 23 −285.104268 AS0.896321 HEV19397 103.405 24 635.351851 9.997637 SIO2V 92.108 25107.969149 40.308038 HEV19397 80.454 26 389.814743 9.996225 SIO2V 82.00627 152.951561 26.349381 HEV19397 81.938 28 1310.914891 9.999638 SIO2V84.278 29 275.521100 17.511021 HEV19397 89.677 30 1763.795762 26.773314SIO2V 93.617 31 −289.165601 AS 9.639413 HEV19397 97.853 32 −1578.752955AS 27.680692 SIO2V 106.237 33 −272.338400 9.732573 HEV19397 110.951 34−3842.769867 AS 35.516033 SIO2V 122.549 35 −314.937511 28.595034HEV19397 125.359 36 889.868029 47.614171 SIO2V 135.827 37 −355.067891−12.204373 HEV19397 136.279 38 0.000000 0.000000 HEV19397 133.729 390.000000 28.717983 HEV19397 133.729 40 574.174423 AS 45.539693 SIO2V132.500 41 −344.516223 0.852315 HEV19397 132.025 42 204.978326 45.863613SIO2V 111.958 43 −6283.361425 AS 0.828469 HEV19397 106.831 44 87.55557940.313564 SIO2V 74.022 45 201.419511 0.722913 HEV19397 64.044 4686.647656 38.420734 CAF2V193 50.908 47 0.000000 0.300000 SIO2V 21.485 480.000000 0.000000 SIO2V 21.121 49 0.000000 3.000000 H2OV193B 21.121 500.000000 0.000000 AIR 16.500

TABLE 31A Aspherical Constants Surface 2 7 12 14 17 K   0   0   0   0−205.145 C1   −5.06E−02     1.55E−01   −6.58E−02   −3.99E−02   −3.00E−02C2   −1.36E−06   −4.50E−06     6.94E−07     7.46E−07     3.06E−07 C3  −1.39E−10     2.86E−10   −8.42E−10   −4.18E−11   −7.06E−12 C4    2.02E−14     3.18E−14     3.01E−14   −4.94E−18     1.35E−16 C5  −1.21E−18   −4.70E−18     9.27E−20     2.51E−19   −2.46E−21 C6    7.59E−23     2.24E−22   −5.52E−22   −2.26E−23     2.42E−26 C7  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00 C8   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C9   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 Surface 18 23 31 32 34 K−19.986   0   0   0   0 C1     5.81E−02   −5.44E−02     2.45E−02  −6.17E−02     2.25E−02 C2   −5.04E−07     5.13E−06     5.17E−07    1.84E−06   −1.23E−06 C3     2.61E−11   −2.58E−10     4.76E−11    9.77E−11   −5.97E−11 C4   −5.07E−16     1.19E−14   −1.55E−15  −8.36E−15     6.09E−15 C5     1.40E−20   −3.68E−19     8.15E−19    8.28E−19   −2.59E−19 C6   −4.71E−26     5.92E−24   −4.46E−23  −3.91E−23     5.18E−24 C7   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C8   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 C9   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 Surface 4043 K   0   0 C1   −3.76E−02   −2.60E−02 C2     7.18E−08     3.27E−06 C3    5.92E−11   −1.25E−10 C4   −1.80E−15     4.09E−15 C5     7.98E−21  −8.18E−20 C6     1.92E−25     8.62E−25 C7   0.000000e+00  0.000000e+00 C8   0.000000e+00   0.000000e+00 C9   0.000000e+00  0.000000e+00

TABLE 32 (EM29) Sur- ½ face Radius Asphere Thickness Material Diameter 10.000000 −0.011620 LV193975 75.462 2 585.070331 AS 17.118596 SIO2V76.447 3 −766.901651 0.890161 HEV19397 78.252 4 145.560665 45.675278SIO2V 85.645 5 2818.543789 AS 40.269525 HEV19397 83.237 6 469.39623629.972759 SIO2V 75.894 7 −193.297708 AS 21.997025 HEV19397 73.717 8222.509238 27.666963 SIO2V 57.818 9 −274.231957 31.483375 HEV1939752.595 10 0.000000 10.117766 SIO2V 44.115 11 0.000000 15.361487 HEV1939747.050 12 26971.109897 AS 14.803554 SIO2V 54.127 13 −562.07042645.416373 HEV19397 58.058 14 −510.104298 AS 35.926312 SIO2V 76.585 15−118.683707 36.432152 HEV19397 80.636 16 0.000000 199.241665 HEV1939786.561 17 −181.080772 AS −199.241665 REFL 147.684 18 153.434246 AS199.241665 REFL 102.596 19 0.000000 36.432584 HEV19397 105.850 20408.244008 54.279598 SIO2V 118.053 21 −296.362521 34.669451 HEV19397118.398 22 −1378.452784 22.782283 SIO2V 106.566 23 −533.252331 AS0.892985 HEV19397 105.292 24 247.380841 9.992727 SIO2V 92.481 25103.088603 45.957039 HEV19397 80.536 26 −1832.351074 9.992069 SIO2V80.563 27 151.452362 28.883857 HEV19397 81.238 28 693.739003 11.559320SIO2V 86.714 29 303.301679 15.104783 HEV19397 91.779 30 1016.42662530.905849 SIO2V 95.900 31 −258.080954 AS 10.647394 HEV19397 99.790 32−1386.614747 AS 24.903261 SIO2V 108.140 33 −305.810572 14.249112HEV19397 112.465 34 −11755.656826 AS 32.472684 SIO2V 124.075 35−359.229865 16.650084 HEV19397 126.831 36 1581.896158 51.095339 SIO2V135.151 37 −290.829022 −5.686977 HEV19397 136.116 38 0.000000 0.000000HEV19397 131.224 39 0.000000 28.354383 HEV19397 131.224 40 524.037274 AS45.835992 SIO2V 130.144 41 −348.286331 0.878010 HEV19397 129.553 42184.730622 45.614622 SIO2V 108.838 43 2501.302312 AS 0.854125 HEV19397103.388 44 89.832394 38.416586 SIO2V 73.676 45 209.429378 0.697559HEV19397 63.921 46 83.525032 37.916651 CAF2V193 50.040 47 0.0000000.300000 SIO2V 21.480 48 0.000000 0.000000 SIO2V 21.116 49 0.0000003.000000 H2OV193B 21.116 50 0.000000 0.000000 AIR 16.500

TABLE 32A Aspherical Constants Surface 2 5 7 12 14 K 0 0 0 0 0 C1  −5.72E−02   −4.71E−02     1.75E−01   −8.29E−02   −4.35E−02 C2  −2.97E−07     7.04E−06   −1.17E−05   −1.87E−07     1.59E−06 C3    1.03E−12     1.09E−10     1.34E−09   −7.04E−10   −6.81E−11 C4    2.76E−14   −2.90E−14   −5.44E−14     6.65E−14     5.03E−15 C5  −1.51E−18   −1.55E−21   −1.82E−18   −1.33E−17   −1.68E−23 C6  −1.04E−24     5.61E−23     2.56E−22     2.46E−21   −2.36E−23 C70.000000e+00 0.000000e+00 0.000000e+00 0.000000e+00 0.000000e+00 C80.000000e+00 0.000000e+00 0.000000e+00 0.000000e+00 0.000000e+00 C90.000000e+00 0.000000e+00 0.000000e+00 0.000000e+00 0.000000e+00 Surface17 18 23 31 32 K −197.849 −204.054 0 0 0 C1   −2.94E−02     5.77E−02  −7.06E−02     3.41E−02   −4.85E−02 C2     2.63E−07   −5.00E−07    4.11E−06     4.07E−08     9.88E−07 C3   −6.11E−12     2.67E−11  −1.18E−10     8.10E−11     7.37E−11 C4     1.11E−16   −5.69E−16    2.92E−15   −4.34E−15   −6.56E−15 C5   −2.01E−21     1.89E−20  −3.23E−20     7.59E−19     6.53E−19 C6     2.08E−26   −1.49E−25    2.18E−25   −3.41E−23   −2.88E−23 C7 0.000000e+00 0.000000e+000.000000e+00 0.000000e+00 0.000000e+00 C8 0.000000e+00 0.000000e+000.000000e+00 0.000000e+00 0.000000e+00 C9 0.000000e+00 0.000000e+000.000000e+00 0.000000e+00 0.000000e+00 Surface 34 40 43 K 0 0 0 C1    1.59E−02   −4.10E−02   −3.89E−02 C2   −1.51E−06     3.04E−07    4.76E−06 C3     6.62E−13     5.71E−11   −2.23E−10 C4     1.72E−15  −1.72E−15     8.89E−15 C5   −9.36E−20   −9.60E−22   −2.41E−19 C6    2.36E−24     3.81E−25     3.43E−24 C7 0.000000e+00 0.000000e+000.000000e+00 C8 0.000000e+00 0.000000e+00 0.000000e+00 C9 0.000000e+000.000000e+00 0.000000e+00

TABLE 34 (EM26) WL 193.368 nm 193.468 nm 193.268 nm SIO2V′ 1.56078571.56062813 1.56094365 CAF2V193′ 1.50175423 1.50185255 1.50195109H2OV193′ 1.4364632 1.43667693 1.43689123 NA 1.2; Fmin = 18.63 mm; Fmax =66 mm Surface Radius Thickness Material ½Diam. Type 0 0.00000000031.982585487 AIR 66.000 1 0.000000000 −0.017071913 AIR 76.172 2147.976296433 25.157601132 SIO2V 83.329 3 483.267348199 66.318217434 AIR83.329 4 6843.187124890 14.990603080 SIO2V 89.462 5 −10922.8572272000.990910304 AIR 89.696 6 185.444884732 43.423576628 SIO2V 90.336 7−291.453552095 0.988388071 AIR 88.691 8 75.552245567 18.214694705 SIO2V66.883 9 76.794787833 36.638500036 AIR 60.819 10 119.89009373418.824651829 SIO2V 50.527 11 1688.559592410 8.584817314 AIR 45.933 120.000000000 0.000000000 AIR 38.451 13 0.000000000 52.042672045 AIR38.545 14 −59.826650342 14.981853380 SIO2V 48.449 15 −143.4427316520.981820223 AIR 65.183 16 −809.267677971 22.623991877 SIO2V 74.792 17−189.427877067 23.734179117 AIR 79.164 18 −404.048228936 40.321323389SIO2V 94.462 19 −133.255827443 0.996126038 AIR 98.239 20 −532.62606779525.229572964 SIO2V 102.508 21 −218.631437997 34.992902498 AIR 104.152 220.000000000 232.569743258 AIR 102.146 23 −203.850853866 −232.569743258AIR 154.862 REFL 24 180.897913619 232.569743258 AIR 125.795 REFL 250.000000000 35.093353727 AIR 89.945 26 −2097.871590640 18.902530877SIO2V 88.318 27 −311.592066935 1.000926290 AIR 88.349 28 197.04024764214.994864591 SIO2V 82.980 29 123.794489384 39.397144698 AIR 76.695 30−351.625590566 14.996140251 SIO2V 76.667 31 194.519969585 25.840876165AIR 79.734 32 −783.090311926 14.999335864 SIO2V 81.725 33 602.20989265015.636785753 AIR 89.884 34 −860.877333066 40.308090334 SIO2V 92.572 35−144.751331394 0.995503627 AIR 96.367 36 489.496864563 22.261422840SIO2V 107.265 37 −1492.086252490 0.998123009 AIR 108.225 38542.517785037 42.667711177 SIO2V 110.092 39 −278.956019182 30.784648856AIR 110.074 40 −143.206504187 16.457194925 SIO2V 109.358 41−245.275186574 0.991006459 AIR 118.513 42 450.076146500 56.637715430SIO2V 124.493 43 −281.238265383 0.994417156 AIR 124.569 44 173.28665980230.025805518 SIO2V 105.228 45 405.488019133 4.969943131 AIR 101.974 46170.349078374 38.966672867 SIO2V 93.740 47 78634.784391100 0.980473718AIR 86.875 48 65.899645851 30.022369482 SIO2V 58.766 49 115.3283884980.871701885 AIR 51.820 50 70.957276330 32.640666401 CAF2V193 44.305 510.000000000 3.000000148 H2OV193 21.157 52 0.000000000 0.000000000 AIR16.500

TABLE 34A Aspherical Constants Surface K C1 C2 C3 C4 2 0.00000000e+000−4.78882631e−008 −1.07874702e−012 −3.02679637e−016   1.88733824e−020 40.00000000e+000   6.93936013e−009   4.14547565e−012 −2.44188432e−016  3.37511708e−020 7 0.00000000e+000   2.35987002e−008   8.31924580e−012−7.77774842e−016   6.50303307e−021 11 0.00000000e+000   1.26922184e−007−4.36848744e−011   4.57206313e−015   1.74083492e−018 15 0.00000000e+000  7.93042774e−008 −2.07633723e−013   3.76353009e−016   7.36365299e−02018 0.00000000e+000 −1.97913247e−009 −8.66959877e−013   6.04641277e−017−4.73473989e−021 20 0.00000000e+000 −5.08811298e−009 −3.02758381e−013−6.93452917e−018   3.42662757e−022 23 0.00000000e+000   9.00942854e−009  1.77368463e−013   2.86086903e−018   5.71387977e−023 24 0.00000000e+000−6.79867230e−009 −1.66279668e−013 −3.17226607e−018 −2.14919508e−022 260.00000000e+000 −5.37053896e−008   1.67618239e−012   4.07995560e−016−3.53050500e−020 36 0.00000000e+000 −3.31965207e−008   6.14833787e−013  2.40373774e−017   1.18984531e−022 41 0.00000000e+000 −1.38336514e−008  8.93474375e−013 −2.71551009e−017   1.74375713e−021 45 0.00000000e+000  1.44983141e−008 −1.95881989e−014 −1.05859436e−016   5.32744894e−021 470.00000000e+000   3.11232761e−008   2.84716248e−012 −1.11706969e−016−2.66038924e−021 Surface C5 C6 C7 C8 2 −4.39149695e−025 −1.09132516e−028−1.04998811e−035   7.96689244e−037 4 −5.06638092e−024   5.32303197e−028−2.85457308e−032   3.58175757e−038 7   3.23059366e−024 −1.16477659e−030−4.43574135e−032   2.44981381e−036 11 −1.38306535e−022   2.43454067e−025−8.52163913e−029   1.77790237e−034 15 −4.68407947e−024   8.91865260e−029  8.87815151e−032 −8.32251546e−036 18   1.77442213e−025  4.52110292e−031 −2.53815340e−035 −4.30166930e−039 20 −9.21678831e−028−3.68127185e−033   1.89749139e−038 −4.16625182e−039 23 −4.46902171e−028  1.13482418e−031 −3.89411163e−036   7.97497644e−041 24  1.19742697e−026 −1.09727605e−030   4.00797914e−035 −7.95846450e−040 26  9.00535444e−025 −3.46673523e−029 −6.86798043e−033   5.92310794e−037 36−9.53667910e−026   4.93885674e−030 −2.90808572e−034   1.22198832e−039 41−1.26665751e−025   5.84505761e−030 −2.30469572e−034   6.06339556e−039 45−5.94726685e−026   2.48643254e−029 −1.88792088e−033   5.60469477e−038 47  2.43106684e−025 −3.95551801e−029 −7.28245783e−037   4.70291791e−038

TABLE 36 (EM27) WL 193.368 nm 193.468 nm 193.268 nm SIO2V′ 1.56078571.56062813 1.56094365 CAF2V193′ 1.50175423 1.50185255 1.50195109H2OV193′ 1.4364632 1.43667693 1.43689123 NA 1.2; Fmin = 18.63 mm; Fmax =66 mm Surface Radius Asphere Thickness Material ½ Diameter 1 0.000000−0.004216 LUFTV193 75.440 2 341.127979 AS 22.791928 SIO2V 77.399 3−547.910038 0.998331 N2VP950 79.138 4 127.727169 41.232021 SIO2V 85.8865 423.981317 AS 37.538965 N2VP950 83.125 6 1837.865411 20.893107 SIO2V73.497 7 −224.309944 AS 1.002068 N2VP950 71.189 8 162.793881 28.373758SIO2V 63.095 9 −357.404285 20.328095 N2VP950 58.827 10 −130.6681599.997405 SIO2V 40.623 11 −153.854050 6.572008 N2VP950 37.125 12 0.0000009.999712 SIO2V 37.199 13 0.000000 1.062092 N2VP950 40.839 14 743.44764718.547401 SIO2V 42.269 15 −194.707721 22.944701 N2VP950 46.232 16−91.226681 9.997232 SIO2V 51.224 17 −149.640287 18.143695 N2VP950 58.05518 −523.085587 AS 23.764093 SIO2V 70.561 19 −159.366370 0.999029 N2VP95075.025 20 −418.047917 AS 30.390060 SIO2V 78.905 21 −139.497541 36.995337N2VP950 82.309 22 0.000000 202.057337 N2VP950 86.976 23 −179.767561 AS−202.057337 REFL 144.017 24 157.031815 AS 202.057337 REFL 107.178 250.000000 36.997499 N2VP950 101.742 26 440.441126 47.272805 SIO2V 111.23227 −305.204169 41.252868 N2VP950 111.473 28 −462.717592 18.096500 SIO2V101.263 29 −434.773502 AS 1.272365 N2VP950 100.762 30 323.0342669.997203 SIO2V 90.351 31 107.871517 41.101537 N2VP950 80.055 32−2104.261715 9.996146 SIO2V 80.354 33 162.693545 24.114798 N2VP95082.448 34 461.867528 1.590831 SIO2V 88.405 35 292.431899 14.861810N2VP950 92.938 36 1076.736610 38.645047 SIO2V 96.114 37 −233.326361 AS4.528881 N2VP950 101.701 38 −818.919435 AS 26.752850 SIO2V 107.052 39−301.917563 18.307802 N2VP950 113.375 40 −2069.863617 AS 54.519854 SIO2V125.923 41 −240.586609 40.043329 N2VP950 131.701 42 0.000000 0.000000N2VP950 138.484 43 0.000000 −20.273619 N2VP950 138.484 44 442.81051263.820483 SIO2V 138.949 45 −533.873885 2.798052 N2VP950 139.304 46662.397337 AS 40.282382 SIO2V 135.640 47 −428.200815 0.994361 N2VP950134.489 48 213.024607 43.377768 SIO2V 113.450 49 3009.037627 AS 0.987971N2VP950 107.741 50 95.712001 40.028327 SIO2V 77.581 51 241.5285992.069796 N2VP950 67.915 52 85.826880 38.946996 CAF2V193 50.851 530.000000 3.000000 H2OV193 21.090 54 0.000000 0.000000 AIR 16.500

TABLE 36A Aspherical Constants Surface 2 5 7 18 20 K   0   0   0   0   0C1 −6.825898e−08 −1.139291e−07   1.715001e−07 −5.525454e−08−1.928670e−08 C2 −5.820149e−13   6.229489e−12 −3.362340e−12−1.835201e−13   1.369964e−12 C3 −1.764721e−16   2.070760e−16  2.245144e−16   1.097082e−16 −1.178098e−16 C4   1.898479e−20−3.072912e−20   6.731621e−20   2.983525e−22 −5.533661e−22 C5−2.878598e−26   5.780651e−25 −1.102455e−23 −7.073376e−25   4.333159e−25C6 −4.377548e−29   7.588531e−29   1.662149e−28   2.028418e−28−5.576742e−29 C7   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C8   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 C9   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00 Surface 2324 29 37 38 K −1.94543 −2.30892   0   0   0 C1 −2.949816e−08  6.225716e−08 −9.081623e−08   1.700564e−08 −5.539058e−08 C2  2.672898e−13 −8.664624e−13   4.328932e−12   7.578402e−13  7.069194e−13 C3 −5.319153e−18   3.983466e−17 −9.663515e−17  6.487979e−17   7.954509e−17 C4   1.038342e−22 −1.106567e−21  1.861873e−21 −4.481439e−21 −5.116182e−21 C5 −1.448694e−27  3.014885e−26 −2.365064e−26   9.785695e−25   7.622924e−25 C6  1.457411e−32 −3.386885e−31   4.413420e−31 −4.763684e−29 −3.862189e−29C7   0.000000e+00   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00 C8   0.000000e+00   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00 C9   0.000000e+00   0.000000e+00  0.000000e+00   0.000000e+00   0.000000e+00 Surface 40 46 49 K   0   0  0 C1 −6.320049e−10 −2.772679e−08 −2.949915e−08 C2 −1.306440e−13−1.390524e−13   3.478719e−12 C3 −3.923481e−17   4.871921e−17−1.481636e−16 C4   2.072577e−21 −1.427007e−21   6.052349e−21 C5−6.511387e−26   7.907911e−27 −1.731162e−25 C6   1.538497e−30  1.183697e−31   2.820274e−30 C7   0.000000e+00   0.000000e+00  0.000000e+00 C8   0.000000e+00   0.000000e+00   0.000000e+00 C9  0.000000e+00   0.000000e+00   0.000000e+00

TABLE 37 (j342p) Sur- face Radius Asphere Thickness Material ½ Diameter0 0.000000 32.000671 66.0 1 153.319623 25.301467 SILUV 83.9 2 362.3127061.846656 83.3 3 249.932462 10.039369 SILUV 83.5 4 296.617151 16.15620682.9 5 129.380687 32.591808 SILUV 85.8 6 353.939024 25.413158 83.3 7441.659706 33.067185 SILUV 77.6 8 −249.821483 0.999731 73.0 9 242.43243123.800036 SILUV 66.0 10 −418.172385 16.233683 62.2 11 −135.4974489.999688 SILUV 53.8 12 −172.144731 14.407576 51.0 13 0.000000 14.44698637.2 14 403.537798 17.810754 SILUV 47.2 15 −250.734154 43.083755 50.0 16−86.913472 14.999924 SILUV 58.5 17 −119.371112 3.501271 67.2 18−227.124051 29.708033 SILUV 72.5 19 −115.706665 0.999372 77.3 20−6458.564488 21.246094 SILUV 81.9 21 −316.595524 244.245108 83.5 22−175.503346 −209.246168 REFL 137.3 23 172.837073 259.698197 REFL 116.624 286.122846 54.616082 SILUV 114.1 25 −319.487475 0.999912 113.6 26966.963595 26.197513 SILUV 104.1 27 −1040.269926 1.072535 101.1 281363.207517 10.039037 SILUV 93.7 29 99.625589 52.260353 77.5 304756.567563 10.000836 SILUV 78.0 31 153.387698 31.977828 78.4 32−621.996267 10.519453 SILUV 80.7 33 337.392641 11.072501 89.8 34737.023107 38.757083 SILUV 94.6 35 −226.600466 0.999349 98.8 362080.296355 23.152743 SILUV 107.0 37 −464.590999 1.039809 110.3 381055.490633 38.268883 SILUV 115.5 39 −319.028277 39.203877 117.8 40653.756661 35.609928 SILUV 125.1 41 −584.439739 12.416338 125.1 42531.560104 43.648724 SILUV 121.9 43 −344.752529 0.999813 121.1 44216.368978 41.075323 SILUV 104.1 45 −1287.916059 1.004925 99.2 4680.185742 39.619634 SILUV 69.4 47 176.364295 1.538101 59.8 48 85.29253838.558988 SILUV 48.9 49 0.000000 3.000000 H2O 21.1 50 0.000000 16.5

TABLE 37A Aspherical Constants Surface 3 8 20 22 23 K   0   0   0−2.68078 −2.40925 C1 −3.607637E−08   1.865463E−07 −2.924038E−08−4.659443E−08   5.109968E−08 C2 −2.229774E−12 −7.002614E−12−1.606274E−13   1.037806E−12 −5.972057E−13 C3 −9.424200E−17  6.321555E−16 −3.464603E−17 −3.569130E−17   2.704163E−17 C4  2.475481E−20 −2.270568E−20 −8.460050E−22   1.252351E−21 −7.866414E−22C5 −2.200899E−24 −7.376870E−24 −3.093437E−26 −4.105857E−26  3.951644E−26 C6   2.031865E−28   4.292117E−28   1.330447E−29  1.072302E−30 −1.866653E−30 C7 −1.376196E−32 −4.030529E−32−2.982210E−33 −1.880272E−35   6.750678E−35 C8   1.838592E−38  6.145449E−36   1.368410E−37   1.598017E−40 −1.047201E−39 Surface 27 3638 42 45 K   0   0   0   0   0 C1 −7.658966E−08 −5.016408E−08−9.533350E−10 −3.314101E−08 −6.295604E−09 C2   5.681524E−12  6.321012E−13 −5.085963E−13   3.915833E−13   2.792116E−12 C3−2.238871E−16   1.067455E−16 −9.972640E−17   5.982003E−17 −1.225842E−16C4   5.298747E−21 −7.397651E−21   6.787141E−21 −1.575240E−21  1.102964E−20 C5   6.569464E−25   1.926832E−25 −1.791598E−25−3.559970E−26 −1.065854E−24 C6 −9.223653E−29   6.753657E−30−3.368098E−30   1.054274E−30   8.785997E−29 C7   5.022050E−33−9.556799E−34   3.525219E−34   1.406168E−35 −4.393692E−33 C8−1.105440E−37   1.329917E−38 −3.436374E−39 −3.845075E−40   1.041770E−37

TABLE 38 (j344p) Sur- face Radius Asphere Thickness Material ½ Diameter0 0.000000 35.248514 66.0 1 143.248122 28.781110 SILUV 86.3 2 358.4530842.742037 85.3 3 249.892226 15.480033 SILUV 85.2 4 590.981355 14.28339984.5 5 117.666799 24.212151 SILUV 83.0 6 167.854363 18.418499 79.6 7383.299246 37.170753 SILUV 78.0 8 −249.806207 1.005138 72.8 9 176.70848825.812894 SILUV 64.2 10 −489.209320 17.845992 60.0 11 −138.68946310.119648 SILUV 47.3 12 −180.883089 11.123457 43.8 13 1814.62680514.880881 SILUV 38.4 14 −249.444318 45.270915 42.1 15 −80.91618815.005805 SILUV 54.4 16 −125.947065 2.167332 65.0 17 −470.80175430.186754 SILUV 72.8 18 −134.611795 2.050714 78.1 19 −522.38421931.415391 SILUV 84.0 20 −154.268791 249.623006 87.1 21 −181.420630−209.608609 REFL 140.1 22 169.119629 250.842406 REFL 114.7 23 291.61636351.793776 SILUV 110.3 24 −309.683041 17.091881 109.8 25 −940.48329112.127436 SILUV 99.3 26 −42805.292832 1.002005 97.3 27 220.63169110.003981 SILUV 88.3 28 99.320400 49.161757 77.3 29 −561.336190 9.999954SILUV 77.2 30 154.957512 24.909934 79.0 31 1924.820454 13.223705 SILUV81.7 32 303.786903 14.995612 89.2 33 1300.890310 31.155401 SILUV 93.9 34−258.803624 9.929012 98.4 35 −3575.038127 30.701987 SILUV 109.0 36−265.328196 2.056209 113.6 37 2294.378555 44.440918 SILUV 123.1 38−267.747777 29.673499 125.9 39 557.248167 36.861702 SILUV 131.7 40−783.213643 −0.938224 131.3 41 −14802.205529 16.206383 129.7 42828.039709 43.221788 SILUV 129.1 43 −324.649154 0.998849 128.8 44206.870457 45.792196 SILUV 109.6 45 −1913.727624 0.997376 104.5 4681.421622 39.892459 SILUV 70.6 47 171.051496 1.070665 60.3 48 81.43525136.484505 CAFUV 48.6 49 0.000000 3.000000 H2O 21.1 50 0.000000 16.5

TABLE 38A (j344p) Aspherical Constants Surface 3 8 17 19 21 K   0   0  0   0 −2.35919 C1 −4.239547E−08   1.776408E−07 −3.517097E−08−2.260275E−08 −3.531314E−08 C2 −3.439882E−12 −7.365374E−12 −1.680998E−12  1.477964E−12   5.754980E−13 C3   2.585420E−17   6.010661E−16  1.988836E−16 −5.557313E−17 −1.422154E−17 C4 −7.398192E−21  3.465765E−20 −8.317822E−21 −1.521633E−21   3.469778E−22 C5  2.490541E−24 −1.352374E−23   1.490936E−25   2.529206E−25 −6.366916E−27C6 −1.543807E−28   7.789367E−28   9.086464E−29 −2.473128E−29  6.303151E−32 Surface 22 26 34 35 37 K −2.55041   0   0   0   0 C1  5.763867E−08 −9.608615E−08   1.305280E−08 −5.677213E−08   3.512847E−09C2 −8.648037E−13   4.888828E−12   5.858393E−13   1.460926E−12−4.457077E−13 C3   3.811912E−17 −1.061062E−16 −2.240057E−17  7.309271E−17 −9.211061E−17 C4 −1.031346E−21   2.226871E−21  1.299691E−21 −7.691388E−21   7.360949E−21 C5   2.586799E−26  6.374143E−26   1.071950E−25   4.906816E−25 −3.041901E−25 C6−2.333304E−31 −5.123581E−30 −1.228055E−29 −1.882267E−29   6.008115E−30Surface 42 45 K   0   0 C1 −2.753413E−08 −2.014104E−08 C2 −1.731330E−13  3.259304E−12 C3   6.979195E−17 −1.414937E−16 C4 −2.163794E−21  5.867152E−21 C5   9.215216E−27 −1.748151E−25 C6   2.896055E−31  3.188929E−30

TABLE 39 (dave 040421) ½ Diam- Surface Radius Asphere Thickness Materialeter 0 0.000000 40.000000 68.0 1 146.623761 AS 35.648639 SIO2V 84.3 2−262.402199 AS 11.489893 86.4 3 −1418.271111 AS 55.535686 SIO2V 89.1 4−149.803131 80.058956 92.8 5 −316.127680 −80.058956 REFL 66.8 6−149.803131 −55.535686 SIO2V 77.9 7 −1418.271111 −11.489893 77.7 8−262.402199 11.489893 REFL 78.4 9 −1418.271111 55.535686 SIO2V 88.5 10−149.803131 90.058608 97.6 11 −318.170858 AS 42.027645 SIO2V 125.7 12−174.217513 221.335808 130.9 13 −245.648700 AS −201.335981 REFL 202.8 14114.970031 AS 241.335931 REFL 93.2 15 372.783567 AS 46.864614 SIO2V124.6 16 −819.903755 1.038628 123.6 17 177.861341 41.772805 SIO2V 112.518 341.365208 37.021407 104.9 19 −466.562113 12.000000 SIO2V 100.5 20162.712763 42.079202 91.1 21 −370.098539 12.000000 SIO2V 91.3 22462.418362 26.721285 96.0 23 −356.944827 27.234109 SIO2V 97.2 24−176.415718 1.000000 100.3 25 250.680892 AS 35.225819 SIO2V 109.0 26−1151.380195 1.000000 108.8 27 400.524336 38.251924 SIO2V 107.1 28−405.535651 31.160614 105.6 29 −149.637246 50.218339 SIO2V 104.4 30−384.493074 AS 30.129631 114.6 31 0.000000 −29.129631 116.2 32266.421209 50.004341 SIO2V 116.1 33 −466.737916 1.000000 115.2 34142.958212 42.562558 SIO2V 102.2 35 432.609562 AS 0.098646 97.2 36114.421108 32.582267 SIO2V 82.2 37 573.116962 AS 1.000000 76.7 3860.777409 26.925305 SIO2V 52.9 39 76.682879 1.000000 41.9 40 70.39987126.141931 CAF2V193 40.0 41 0.000000 3.000000 H2OV193 21.6 42 0 0 17.0

TABLE 39A (dave 040421) Aspherical Constants Surface 1 2 3 11 13 K   0  0   0   0   0 C1 −3.341087E−07   8.388602E−08   3.429680E−08  3.116059E−09   3.046218E−09 C2 −2.505072E−12 −1.111052E−11−9.182012E−12   4.201540E−13   4.170047E−14 C3   2.943082E−15  1.569768E−15   8.908974E−16 −8.967249E−17   3.681161E−19 C4−4.955011E−19 −1.841754E−19 −1.039175E−19   4.467021E−21   2.802579E−23C5   4.666851E−23   1.342877E−23   7.467060E−24 −1.240183E−25−1.004802E−27 C6 −1.905456E−27 −4.061739E−28 −2.463306E−28 −3.737311E−31  3.611732E−32 C7 −6.507196E−37 C8   6.094959E−42 Surface 14 15 25 30 3537 K   0   0   0   0   0   0 C1 −1.471452E−07   1.493626E−09−2.761928E−08   3.891658E−09   8.202081E−10   1.252989E−07 C2  3.389142E−12   7.786239E−13   1.065077E−13 −2.344148E−13 −6.269685E−13  2.533320E−12 C3 −1.091618E−15   3.130190E−17   8.399310E−18  1.511118E−17 −2.459088E−16   1.123761E−16 C4   1.594470E−19  2.199868E−22 −2.005406E−21 −1.816247E−21   5.806198E−20 −1.266332E−19C5 −2.248477E−23 −1.132529E−25   1.619754E−25   3.834331E−26−3.997034E−24   1.618688E−23 C6   1.655691E−27   2.738900E−30−8.094709E−30   5.510731E−31   1.041043E−28 −8.614797E−28 C7−5.527960E−32 C8 −3.066052E−37

TABLE 40 (d125i9) ½ Surface Radius Asphere Thickness Material Diameter 00.000000 31.999820 72.0 1 1121.871530 AS 22.353990 SIO2V 81.6 2−593.507575 151.330057 83.2 3 −276.701090 −150.330068 REFL 99.4 4−1841.732700 158.991136 REFL 58.1 5 −1993.161426 66.359854 SIO2V 129.7 6−226.138813 0.999989 137.1 7 320.967306 58.008492 SIO2V 147.2 8−521.971452 AS 138.103093 146.7 9 1018.489753 AS 33.863171 SIO2V 132.410 −836.147368 169.056435 131.1 11 −150.333251 22.332601 SIO2V 98.2 12−264.622066 19.637756 104.6 13 −642.439229 −19.637756 REFL 105.6 14−264.622066 −22.332601 SIO2V 96.6 15 −150.333251 −169.056435 86.0 16−836.147368 −33.863171 SIO2V 72.6 17 1018.489753 AS −94.088120 78.6 18196.895316 −14.999941 SIO2V 99.4 19 1436.276484 −28.015060 114.2 20263.470635 28.015060 REFL 117.3 21 1436.276484 14.999941 SIO2V 115.4 22196.895316 94.088120 104.5 23 1018.489753 AS 33.863171 SIO2V 98.4 24−836.147368 232.111001 96.3 25 −203.114130 AS 20.739811 SIO2V 89.7 26−179.567740 1.000292 94.4 27 214.374385 45.853859 SIO2V 107.3 28−685.859253 AS 14.406908 106.3 29 155.448944 34.186529 SIO2V 99.0 30402.440360 26.948978 95.4 31 1784.180000 14.999955 SIO2V 87.8 32215.162499 22.977434 79.8 33 −1182.190098 22.085678 SIO2V 78.7 34−212.011934 1.511427 77.6 35 −2234.326431 AS 16.015583 SIO2V 73.6 36102.656630 55.587588 68.2 37 227.255721 75.569686 SIO2V 88.7 38−317.233998 1.001303 92.3 39 1810.772356 AS 34.492120 SIO2V 91.9 40−251.541624 3.237774 94.2 41 0.000000 −2.238080 92.7 42 312.03735116.355638 SIO2V 94.5 43 1101.731550 AS 0.999509 94.2 44 373.20377335.331514 SIO2V 95.0 45 −352.262575 0.999305 95.0 46 800.95256334.674551 SIO2V 91.8 47 −210.477645 AS 0.999728 90.3 48 72.23421029.521553 SIO2V 58.5 49 126.294484 7.096090 50.0 50 89.472175 36.272448SIO2V 41.5 51 0.000000 0.000000 18.0

TABLE 40A (d125i9) Aspherical Constants Surface 1 8 9 17 23 K   0   0  0   0   0 C1 −6.489547E−09   1.779063E−08 −2.537260E−09 −2.537260E−09−2.537260E−09 C2   2.573979E−12 −1.318309E−13   8.794118E−14  8.794118E−14   8.794118E−14 C3 −6.945437E−18   1.871976E−18  1.370489E−18   1.370489E−18   1.370489E−18 C4 −9.856064E−22−2.538137E−23   2.480376E−23   2.480376E−23   2.480376E−23 C5−5.398838E−26   5.262554E−28   3.221917E−28   3.221917E−28  3.221917E−28 C6   3.582736E−29 −4.568847E−33 −1.526882E−32−1.526882E−32 −1.526882E−32 Surface 25 28 35 39 43 47 K   0   0   0   0  0   0 C1   3.488627E−08   5.518741E−08 −1.889508E−07 −1.194060E−07  2.132675E−08   1.327564E−08 C2 −5.495753E−13 −1.879963E−12−7.683963E−12 −3.708989E−13   3.335407E−12   8.696711E−13 C3−6.723461E−17 −1.208371E−18   9.545139E−17   4.020986E−17   8.797815E−17−1.462960E−16 C4   2.810907E−21   8.370662E−22   1.920197E−20−1.082725E−20 −6.582985E−21   1.072413E−20 C5 −1.827899E−25−3.751988E−26   1.709381E−24   3.369011E−26 −4.306562E−26 −5.792663E−25C6   4.402454E−30   1.768617E−30 −4.887431E−30   1.763283E−29  1.609953E−29   7.946613E−30

TABLE 41 FIG. NA Y′ ZN_(L) N_(op) D_(max) COMP1 COMP2 COMP3 4 1.10 16.2517 3 201.5 10.25 174.21 58.07 7 1.10 16.25 17 3 220.9 11.23 190.99 63.668 1.15 16.25 17 3 220.1 10.24 174.11 58.04 16 1.20 16.25 20 3 219.7 9.39187.78 62.59 17 1.20 16.25 21 3 235.5 10.06 211.35 70.45 19 1.20 16.2520 3 263.9 11.28 225.56 75.19 20 1.20 16.00 19 3 306.5 13.30 252.7684.25 21 1.20 16.17 20 3 240.6 10.33 206.66 68.89 22 1.20 16.25 19 3249.3 10.65 202.42 67.47 23 1.20 16.17 18 3 264.2 11.35 204.24 68.08 271.20 16.50 23 3 269.9 11.36 261.27 87.09 28 1.20 16.50 23 3 229.4 9.65222.06 74.02 30 1.20 16.50 21 3 266.1 11.20 235.19 78.40 31 1.20 16.5020 3 272.6 11.47 229.46 76.49 32 1.20 16.50 20 3 272.3 11.46 229.2176.40 34 1.20 16.50 22 3 241.0 10.14 223.15 74.38 36 1.20 16.50 23 3278.6 11.73 269.69 89.90 37 1.20 16.50 23 3 250.2 10.53 242.20 80.73 381.20 16.50 23 3 263.4 11.09 254.97 84.99 39 1.20 17.00 16 3 260.0 10.62169.93 56.64 40 1.05 18.00 19 3 294.0 14.81 281.48 93.83

1. A catadioptric projection objective for imaging a pattern provided inan object plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; and all concave mirrors are arranged optically remotefrom a pupil surface, wherein the projection objective includes exactlytwo concave mirrors and exactly two intermediate images.
 2. Projectionobjective according to claim 1, wherein all concave mirrors are arrangedoptically remote from a pupil surface at a position where a chief rayheight exceeds a marginal ray height of the imaging process. 3.Projection objective according to claim 1, wherein the first objectivepart is a dioptric imaging system; the second objective part includesthe first and the second concave mirrors, the concave mirror surfaces ofthe concave mirrors facing each other and defining an intermirror space;wherein at least the first intermediate image is located geometricallywithin the intermirror space between the first concave mirror and thesecond concave mirror.
 4. Projection objective according to claim 3,wherein both the first intermediate image and the second intermediateimage are located geometrically within the intermirror space between thefirst concave mirror and the second concave mirror.
 5. Projectionobjective according to claim 1, wherein the first objective part and thesecond objective part and the third objective part share a commonstraight optical axis.
 6. Projection objective according to claim 1,wherein curvature surfaces of the first concave mirror and the secondconcave mirror have a common axis of rotational symmetry defining acatadioptric or catoptric part of the optical axis which is inclined atan angle to an object side part and an image side part of the opticalaxis.
 7. Projection objective according to claim 1, wherein at least onemirror surface of a concave mirror is aspheric.
 8. Projection objectiveaccording to claim 1, wherein the first objective part is a catadioptricobjective part including a first of the concave mirrors and the secondobjective part is a catadioptric objective part including a second ofthe two concave mirrors.
 9. Projection objective according to claim 1,wherein a mirror group defined by the first and the second concavemirror facing each other has a mirror group entry and a mirror groupexit, the mirror group entry being positioned geometrically next to anedge of the second concave mirror facing the optical axis and the mirrorgroup exit being positioned geometrically next to an edge of the firstconcave mirror facing the optical axis and wherein pupil surfaces of theprojection objective are arranged in a vicinity of the mirror groupentry and in a vicinity of the mirror group exit.
 10. Projectionobjective according to claim 1, wherein the projection objective isdesigned such that radiation reflected from the first concave mirrorcrosses the optical axis prior to impinging on the second concavemirror.
 11. Projection objective according to claim 1, wherein the firstobjective part is purely refractive, the second objective part iscatoptric or catadioptric, and the third objective part is purelyrefractive.
 12. Projection objective according to claim 1, wherein theprojection objective includes no convex mirror.
 13. Projection objectiveaccording to claim 1, wherein the first objective part is designed as anenlarging imaging system.
 14. Projection objective according to claim 1,wherein the first objective part is designed as an enlarging imagingsystem having a magnification β₁ in the range 1<|β₁|<2.5.
 15. Projectionobjective according to claim 1, wherein the second objective part isdesigned as near unit magnification optical system.
 16. Projectionobjective according to claim 15, wherein the second objective part isdesigned as an system having a magnification β₂ in the range0.4<|β₂|<1.5.
 17. Projection objective according to claim 15, whereinthe second objective part is designed as an system having amagnification β₂ in the range 0.9<|β₂|<1.1.
 18. Projection objectiveaccording to claim 1, wherein the third objective part has a reducingmagnification β₃ wherein |β₃|<1.
 19. Projection objective according toclaim 1, wherein the second intermediate image has a size larger thanthe image size.
 20. Projection objective according to claim 1, whereinat least one of the first concave mirror and the second concave mirroris designed as a Mangin Mirror.
 21. Projection objective according toclaim 1, wherein at least one of the first concave mirror and the secondconcave mirror is designed as a front face mirror.
 22. Projectionobjective according to claim 1, wherein at least one of the concavemirrors has an aspheric reflecting surface having an absolute value ofcurvature which decreases from an optical axis of the projectionobjective to the edge of the mirror in a radial direction. 23.Projection objective according to claim 1, wherein the projectionobjective includes no planar folding mirror.
 24. Projection objectiveaccording to claim 1, wherein a maximum light beam height at the concavemirrors is less than 1.5 fold of the maximum light beam height withinthe third objective part.
 25. Projection objective according to claim 1,wherein the diameter of the concave mirrors is less than 150% of thesize of the first and the second intermediate image.
 26. Projectionobjective according to claim 1, wherein all light beams within theprojection objective are located within a space defined as a cylinderaround the optical axis of said third objective part, extending from theobject plane to the image plane and having a maximum radius of 1.5 foldof a maximum beam height within said third objective part. 27.Projection objective according to claim 1, wherein a maximum freediameter is 2.4 fold of a maximum beam height within said thirdobjective part.
 28. Projection objective according to claim 1, whereinbetween the radius R1 of the first concave mirror and the radius R2 ofthe second concave mirror the following relation: 0.7<|R1/R2|<1.3 issatisfied.
 29. Projection objective according to claim 1, whereinbetween the radius R1 of the first concave mirror and the radius R2 ofthe second concave mirror and the distance d on the optical axis betweenthe two concave mirrors the relation: 0.7<(|R1|+|R2|)/2/d<1.3 issatisfied.
 30. Projection objective according to claim 1, wherein atleast one lens having a free entry surface and a free exit surface isarranged within an intermirror space defined between the first andsecond concave mirror.
 31. Projection objective according to claim 30,wherein the lens is a mirror-related lens arranged such that it istransited twice by the radiation passing to and from the concave mirror.32. Projection objective according to claim 31, wherein themirror-related lens is a negative lens.
 33. Projection objectiveaccording to claim 31, wherein the mirror-related lens is a meniscuslens having negative refractive power and a sense of curvature similarto the sense of curvature of the concave mirror to which themirror-related lens is assigned.
 34. Projection objective according toclaim 31, wherein the mirror-related lens is designed as a truncatedlens being arranged mostly on the side of the optical axis where theassociated concave mirror is situated.
 35. Projection objectiveaccording to claim 1, wherein there is at least one lens arranged withinan intermirror space defined between the first and second concavemirror, wherein the lens is transited three times by a light beambetween the object plane and the image plane.
 36. Projection objectiveaccording to claim 1, wherein the first concave mirror and the secondconcave mirror are designed to have essentially the same or exactly thesame curvature surfaces.
 37. Projection objective according to claim 1,wherein the first concave mirror and the second concave mirror aremanufactured such that firstly a mirror blank for the first and secondconcave mirror is manufactured to obtain a desired concave shape of amirror surface and that, afterwards, the mirror blank is separated intotwo truncated mirror used as the first and second concave mirror. 38.Projection objective according to claim 1, wherein the second objectivepart includes a first catadioptric sub-group consisting of the firstconcave mirror and a first mirror-related lens and a second catadioptricsub-group consisting of the second concave mirror and a secondmirror-related lens, wherein the catadioptric sub-groups are designedessentially identically.
 39. Projection objective according to claim 1,wherein concave surfaces of the two concave mirrors are aspheric. 40.Projection objective according to claim 1, wherein there is at least onelens arranged within an intermirror space defined between the concavemirrors, the at least one lens being positioned between an intermediateimage and one of the two concave mirrors optically near the intermediateimage; where at least one surface of the lens is aspheric. 41.Projection objective according to claim 40, wherein the aspheric surfaceof the lens is the surface facing the intermediate image.
 42. Projectionobjective according to claim 1, wherein the first concave mirror has acurvature c₁(in [mn⁻¹]) and the second concave mirror has a curvaturec₂(in [mm³¹ ¹]) and D (in [mm]) is a maximum diameter of a lens elementof the third objective part and wherein the following condition isfulfilled: 1<D/(|c₁|+|c₂|)·10⁻⁴<6.
 43. Projection objective according toclaim 1, wherein at least one of the concave mirrors fulfills thecondition: p>0.22R where p=R−(R2−D²/4^()0.5), wherein R is the curvatureradius and D is the diameter of the aspherical mirror surface. 44.Projection objective according to claim 43, wherein the condition D<1.3Ris fulfilled.
 45. Projection objective according to claim 1, wherein theprojection objective is designed such that the first intermediate imageis located geometrically within an intermirror space defined between thefirst and second concave mirror and the second intermediate image isarranged outside the intermirror space.
 46. Projection objectiveaccording to claim 1, wherein the first and the second concave mirrorare disposed on the same side of an optical axis of the projectionobjective.
 47. Projection objective according to claim 1, wherein thefirst concave mirror and the second concave mirror are positioned atopposite sides of an optical axis of the projection objective. 48.Projection objective according to claim 1, wherein at least one lens isarranged outside an intermirror space defined between the first andsecond concave mirror between a mirror group defined by the first andsecond concave mirror and the second intermediate image.
 49. Projectionobjective according to claim 1, wherein the projection objectiveincludes at least one biaspherical lens having an aspheric entrancesurface and an aspheric exit surface.
 50. Projection objective accordingto claim 49, wherein at least one of the pupil surfaces is formed in thethird objective part and wherein the biaspherical lens is arrangedbetween the at least one pupil surface in the third objective part andthe image plane.
 51. Projection objective according to claim 1, whereinthe first objective part includes at least one lens having a concavesurface facing the image plane.
 52. Projection objective according toclaim 51, wherein the lens having a concave surface facing the imageplane is a meniscus lens arranged between the object plane and a pupilsurface of the first objective part.
 53. Projection objective accordingto claim 1, wherein at least one of the pupil surfaces is formed in thefirst objective part and a first lens group is arranged between theobject plane and the at least one pupil surface in the first objectivepart, wherein the first lens group includes in that sequence a positivelens, a negative lens and a positive lens, wherein the negative lens hasa concave surface facing the image.
 54. Projection objective accordingto claim 1, wherein a maximum diameter of optical elements of the secondobjective part is smaller or equal to a maximum diameter of lenses ofthe third objective part.
 55. Projection objective according to claim 1,wherein at least one of the pupil surfaces is formed in the thirdobjective part and at least one lens having negative refractive powerarranged between the second intermediate image and the at least onepupil surface in the third objective part such that a shallow waist isdefined in the beam path, wherein no negative lens is arranged betweenthe waist and the image plane.
 56. Projection objective according toclaim 1, wherein the third objective part includes no more than twonegative lenses.
 57. Projection objective according to claim 1, whereinthe projection objective has an image side numerical aperture NA<0.9.58. Projection objective according to claim 1, wherein the projectionobjective is designed as an immersion objective adapted with referenceto aberrations such that an image side working distance between a lastoptical element and the image plane is filled up with an immersionmedium with a refractive index substantially greater than
 1. 59.Projection objective according to claim 1, wherein the projectionobjective has an image side numerical aperture NA<1.1 when used inconnection with an immersion medium.
 60. Projection objective accordingto claim 1, wherein the projection objective is telecentric on both itsobject end and image end.
 61. Projection objective according to claim 1,wherein the projection objective has an essentially homocentric entrancepupil.
 62. Projection objective according to claim 1, wherein anaperture stop is provided in the first objective part.
 63. Projectionobjective according to claim 1, wherein an aperture stop is provided inthe second objective part.
 64. Projection objective according to claim1, wherein an aperture stop is provided in the third objective part. 65.Projection objective according to claim 1, wherein the projectionobjective is configured for use with ultraviolet light falling within awavelength range extending from about 120 nm to about 260 nm. 66.Projection objective according to claim 1, wherein the first concavemirror has a first aspheric mirror surface and the second concave mirrorhas a second aspheric mirror surface, and wherein the first and secondmirror surfaces have essentially the same or identical aspheric shape.67. Projection objective according to claim 1, wherein at least one ofthe first and second concave mirrors has a mirror surface having aparabolic shape.
 68. Projection objective according to claim 1, whereinthe first objective part is purely refractive and has positive lensesonly.
 69. Projection objective according to claim 68, wherein a platehaving essentially parallel plate surfaces is provided in addition tothe positive lenses in the first objective part.
 70. Projectionobjective according to claim 1, wherein a first lens element of thefirst objective part immediately following the object plane has anaspheric surface facing the object plane, wherein the aspheric surfaceis essentially flat having a local radius R<300 mm at each point of theaspheric surface.
 71. Projection objective according to claim 1, whereinall negative lenses are arranged optically remote from the pupilsurfaces.
 72. Projection objective according to claim 1, wherein aplurality of optical elements having at least one aspherical surface isprovided, and wherein all aspheric surfaces have surface shapes whichare free of inflection points.
 73. Projection objective according toclaim 1, wherein the projection objective has at least one opticalelement having an aspherical surface with a surface shape free ofextremal points in an optically used area of the aspheric surfaceoutside the optical axis, wherein an extremal point is defined by:$\frac{\mathbb{d}p}{\mathbb{d}h} = {{0\mspace{14mu}{and}\mspace{14mu}\frac{\mathbb{d}^{2}p}{\mathbb{d}h^{2}}} \neq 0}$where parameter p represents a distance, measured parallel to theoptical axis of an optical element, of a point at height h from thevertex of the surface.
 74. Projection objective according to claim 73,wherein the aspheric surface is free of extremal point in an areaincluding the optically utilized area defined by the optically usedradius h_(opt) and going beyond that area up to a maximum heighth_(max)>h_(opt), where h_(max)=h _(opt) +OR and where OR is at least 5mm.
 75. Projection objective according to claim 1, wherein a pluralityof optical elements having at least one aspherical surface is provided,and wherein all aspheric surfaces have surface shapes which are free ofextremal points outside the optical axis.
 76. Projection objectiveaccording to claim 1, wherein aspheric surfaces having at least oneextremal point are essentially flat across the entire optically utilizedarea.
 77. Projection objective according to claim 1, having at least oneaspheric surface having at least one extremal point, where the asphericsurface is essentially flat across the entire optically utilized area ofthe optical element such that the following condition holds for thataspheric surface: |p(h)|<p_(max) where p_(max)=0.5 mm.
 78. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first, refractive objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second, catadioptric or catoptric objective partfor imaging the first intermediate imaging into a second intermediateimage; a third, refractive objective part for imaging the secondintermediate imaging onto the image plane; wherein the second objectivepart includes exactly one first concave mirror having a first continuousmirror surface and exactly one second concave mirror having a secondcontinuous mirror surface, the concave mirror faces of the concavemirrors facing each other and defining an intermirror space; wherein thefirst and the second intermediate image are located geometrically withinthe intermirror space between the first concave mirror and the secondconcave mirror.
 79. A catadioptric projection objective for imaging apattern provided in an object plane of the projection objective onto animage plane of the projection objective comprising: a first objectivepart for imaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; and all concavemirrors are arranged optically remote from a pupil surface at a positionwhere a chief ray height exceeds a marginal ray height of the imagingprocess.
 80. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and curvaturesurfaces of the first concave mirror and the at least one second concavemirror have a common axis of rotational symmetry defining a catadioptricor catoptric part of the optical axis which is inclined at an angle toan object side part and an image side part of the optical axis.
 81. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; and the first objective part is purely refractive, thesecond objective part is catoptric or catadioptric, and the thirdobjective part is purely refractive.
 82. A catadioptric projectionobjective for imaging a pattern provided in an object plane of theprojection objective onto an image plane of the projection objectivecomprising: a first objective part for imaging the pattern provided inthe object plane into a first intermediate image; a second objectivepart for imaging the first intermediate image into a second intermediateimage; a third objective part for imaging the second intermediate imageonto the image plane; wherein a first concave mirror having a firstcontinuous mirror surface and at least one second concave mirror havinga second continuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and the projection objective includes no convex mirror.83. A catadioptric projection objective for imaging a pattern providedin an object plane of the projection objective onto an image plane ofthe projection objective comprising: a first objective part for imagingthe pattern provided in the object plane into a first intermediateimage; a second objective part for imaging the first intermediate imageinto a second intermediate image; a third objective part for imaging thesecond intermediate image onto the image plane; wherein a first concavemirror having a first continuous mirror surface and at least one secondconcave mirror having a second continuous mirror surface are arrangedupstream of the second intermediate image; pupil surfaces are formedbetween the object plane and the first intermediate image, between thefirst and the second intermediate image and between the secondintermediate image and the image plane; all concave mirrors are arrangedoptically remote from a pupil surface; and wherein the first objectivepart is designed as an enlarging imaging system having a magnificationβ₁ in the range 1<|β₁|<2.5.
 84. A catadioptric projection objective forimaging a pattern provided in an object plane of the projectionobjective onto an image plane of the projection objective comprising: afirst objective part for imaging the pattern provided in the objectplane into a first intermediate image; a second objective part forimaging the first intermediate image into a second intermediate image; athird objective part for imaging the second intermediate image onto theimage plane; wherein a first concave mirror having a first continuousmirror surface and at least one second concave mirror having a secondcontinuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and the second objective part is designed as near unitmagnification optical system.
 85. A catadioptric projection objectivefor imaging a pattern provided in an object plane of the projectionobjective onto an image plane of the projection objective comprising: afirst objective part for imaging the pattern provided in the objectplane into a first intermediate image; a second objective part forimaging the first intermediate image into a second intermediate image; athird objective part for imaging the second intermediate image onto theimage plane; wherein a first concave mirror having a first continuousmirror surface and at least one second concave mirror having a secondcontinuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and at least one of the first concave mirror and the atleast one second concave mirror is designed as a Mangin Mirror.
 86. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; a maximum light beam height at the concave mirrors isless than 1.5 fold of the maximum light beam height within the thirdobjective part.
 87. A catadioptric projection objective for imaging apattern provided in an object plane of the projection objective onto animage plane of the projection objective comprising: a first objectivepart for imaging the pattern provided in the object plane into afirst˜intermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from the pupil surfaces; and all lightbeams within the projection objective are located within a space definedas a cylinder around the optical axis of the third objective part,extending from the object plane to the image plane and having a maximumradius of 1.5 fold of a maximum beam height within the third objectivepart.
 88. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and the firstconcave mirror has a radius of curvature R1, one of the at least onesecond concave mirrors has a radius of curvature R2, and there is adistance d on the optical axis between the two concave mirrors such thatthe relation: 0.7<(|R1|+|R2|)/2/d<1.3 is satisfied.
 89. A catadioptricprojection objective for imaging a pattern provided in an object planeof the projection objective onto an image plane of the projectionobjective comprising: a first objective part for imaging the patternprovided in the object plane into a first intermediate image; a secondobjective part for imaging the first intermediate image into a secondintermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; and at least one lens having a free entry surface and afree exit surface is arranged within an intermirror space definedbetween the first concave mirror and the at least one second concavemirror.
 90. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and at least onelens arranged within an intermirror space defined between the first anda second concave mirror, wherein the lens is transited three times by alight beam between the object plane and the image plane.
 91. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; and the first concave mirror and a second concavemirror are manufactured such that firstly a mirror blank for the firstand a second concave mirror is manufactured to obtain a desired concaveshape of a mirror surface and that, afterwards, the mirror blank isseparated into two truncated mirror used as the first and a secondconcave mirror.
 92. A catadioptric projection objective for imaging apattern provided in an object plane of the projection objective onto animage plane of the projection objective comprising: a first objectivepart for imaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and the secondobjective part includes a first catadioptric sub-group consisting of thefirst concave mirror and a first mirror-related lens and a secondcatadioptric sub-group consisting of a second concave mirror and asecond mirror-related lens, wherein the catadioptric sub-groups aredesigned essentially identically.
 93. A catadioptric projectionobjective for imaging a pattern provided in an object plane of theprojection objective onto an image plane of the projection objectivecomprising: a first objective part for imaging the pattern provided inthe object plane into a first intermediate image; a second objectivepart for imaging the first intermediate image into a second intermediateimage; a third objective part for imaging the second intermediate imageonto the image plane; wherein a first concave mirror having a firstcontinuous mirror surface and at least one second concave mirror havinga second continuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and there is at least one lens arranged within anintermirror space defined between the first and a second concave mirrorbetween an intermediate image and an associated concave mirror opticallynear the intermediate image, where at least one surface of the lens isaspheric.
 94. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and the projectionobjective is designed such that the first intermediate image is locatedgeometrically within an intermirror space defined between the first anda second concave mirror and the second intermediate image is arrangedoutside the intermirror space.
 95. A catadioptric projection objectivefor imaging a pattern provided in an object plane of the projectionobjective onto an image plane of the projection objective comprising: afirst objective part for imaging the pattern provided in the objectplane into a first intermediate image; a second objective part forimaging the first intermediate image into a second intermediate image; athird objective part for imaging the second intermediate image onto theimage plane; wherein a first concave mirror having a first continuousmirror surface and at least one second concave mirror having a secondcontinuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from thepupil surfaces; and the first and the at least one second concave mirrorare disposed on the same side of an optical axis of the proiectionobiective.
 96. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and at least onelens is arranged outside an intermirror space defined between the firstand a second concave mirror between a mirror group defined by the firstand the at least one second concave mirror and the second intermediateimage.
 97. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and the projectionobjective includes at least one biaspherical lens having an asphericentrance surface and an aspheric exit surface.
 98. A catadioptricprojection objective for imaging a pattern provided in an object planeof the projection objective onto an image plane of the projectionobjective comprising: a first objective part for imaging the patternprovided in the object plane into a first intermediate image; a secondobjective part for imaging the first intermediate image into a secondintermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; and the first objective part includes at least one lenshaving a concave surface facing the image plane.
 99. A catadioptricprojection objective for imaging a pattern provided in an object planeof the projection objective onto an image plane of the projectionobjective comprising: a first objective part for imaging the patternprovided in the object plane into a first intermediate image; a secondobjective part for imaging the first intermediate image into a secondintermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave minorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote frompupil surfaces; and the first objective part includes one of the pupilsurfaces and a first lens group arranged between the object plane andthe pupil surface of the first objective part, wherein the first lensgroup includes in that sequence a positive lens, a negative lens and apositive lens, wherein the negative lens has a concave surface facingthe image.
 100. A catadioptric projection objective for imaging apattern provided in an object plane of the projection objective onto animage plane of the projection objective comprising: a first objectivepart for imaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and a maximumdiameter of optical elements of the second objective part is smaller orequal to a maximum diameter of lenses of the third objective part. 101.A catadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; and the third objective part includes no more than twonegative lenses.
 102. A catadioptric projection objective for imaging apattern provided in an object plane of the projection objective onto animage plane of the projection objective comprising: a first objectivepart for imaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and an aperture stopis provided in the first objective part.
 103. A catadioptric projectionobjective for imaging a pattern provided in an object plane of theprojection objective onto an image plane of the projection objectivecomprising: a first objective part for imaging the pattern provided inthe object plane into a first intermediate image; a second objectivepart for imaging the first intermediate image into a second intermediateimage; a third objective part for imaging the second intermediate imageonto the image plane; wherein a first concave mirror having a firstcontinuous mirror surface and at least one second concave mirror havinga second continuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and an aperture stop is provided in the second objectivepart.
 104. A catadioptric projection objective for imaging a patternprovided in an object plane of the projection objective onto an imageplane of the projection objective comprising: a first objective part forimaging the pattern provided in the object plane into a firstintermediate image; a second objective part for imaging the firstintermediate image into a second intermediate image; a third objectivepart for imaging the second intermediate image onto the image plane;wherein a first concave mirror having a first continuous mirror surfaceand at least one second concave mirror having a second continuous mirrorsurface are arranged upstream of the second intermediate image; pupilsurfaces are formed between the object plane and the first intermediateimage, between the first and the second intermediate image and betweenthe second intermediate image and the image plane; all concave mirrorsare arranged optically remote from a pupil surface; and the firstconcave mirror has a first aspheric mirror surface and the at least onesecond concave mirror has a second aspheric mirror surface, and whereinthe first and second mirror surfaces have essentially the same oridentical aspheric shape.
 105. A catadioptric projection objective forimaging a pattern provided in an object plane of the projectionobjective onto an image plane of the projection objective comprising: afirst objective part for imaging the pattern provided in the objectplane into a first intermediate image; a second objective part forimaging the first intermediate image into a second intermediate image; athird objective part for imaging the second intermediate image onto theimage plane; wherein a first concave mirror having a first continuousmirror surface and at least one second concave mirror having a secondcontinuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and at least one of the first and the at least one secondconcave mirrors has a mirror surface having a parabolic shape.
 106. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote froma pupil surface; and the first objective part is purely refractive andhas positive lenses only.
 107. A catadioptric projection objective forimaging a pattern provided in an object plane of the projectionobjective onto an image plane of the projection objective comprising: afirst objective part for imaging the pattern provided in the objectplane into a first intermediate image; a second objective part forimaging the first intermediate image into a second intermediate image; athird objective part for imaging the second intermediate image onto theimage plane; wherein a first concave mirror having a first continuousmirror surface and at least one second concave mirror having a secondcontinuous mirror surface are arranged upstream of the secondintermediate image; pupil surfaces are formed between the object planeand the first intermediate image, between the first and the secondintermediate image and between the second intermediate image and theimage plane; all concave mirrors are arranged optically remote from apupil surface; and the projection objective, has at least one asphericsurface having at least one extremal point, where the aspheric surfaceis essentially flat across the entire optically utilized area of theoptical element such that the following condition holds for thataspheric surface: |p(h)|<p_(max) where p_(max)=0.5 mm.
 108. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; wherein a first concave mirrorhaving a first continuous mirror surface and at least one second concavemirror having a second continuous mirror surface are arranged upstreamof the second intermediate image; pupil surfaces are formed between theobject plane and the first intermediate image, between the first and thesecond intermediate image and between the second intermediate image andthe image plane; all concave mirrors are arranged optically remote frompupil surfaces; and the first objective part includes the first concavemirror and at least one additional mirror having a curved mirrorsurface, where the curved mirror surfaces of the concave mirror and theadditional mirror are facing each other, and the additional mirror ispositioned optically near a one of the pupil surfaces.
 109. Acatadioptric projection objective for imaging a pattern provided in anobject plane of the projection objective onto an image plane of theprojection objective comprising: a first objective part for imaging thepattern provided in the object plane into a first intermediate image; asecond objective part for imaging the first intermediate image into asecond intermediate image; a third objective part for imaging the secondintermediate image onto the image plane; pupil surfaces are formedbetween the object plane and the first intermediate image, between thefirst and the second intermediate image and between the secondintermediate image and the image plane; and the projection objective hasexactly three concave mirrors arranged optically remote from a pupilsurface, wherein a first concave mirror having a first continuous mirrorsurface and at least one second concave mirror having a secondcontinuous mirror surface are arranged upstream of the secondintermediate image; and the first objective part includes a concavemirror and at least one additional mirror having a curved mirrorsurface, wherein the curved mirror surfaces of the concave mirror andthe additional mirror are facing each other.